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Covers advanced topics in MEMS technology, including design, packaging, device categories, historical perspective, market trends, and the role of startups.
Covers the introduction to Micro-Electro-Mechanical Systems (MEMS), including operating principles, elements, scaling laws, silicon choice, sensors, and actuators.
Explores transduction through actuation mechanisms, covering force-based and deformation-based methods, shape memory polymers, electrostatic and magnetic actuation principles, and examples like Texas Instruments DLP & DMD.
Explains the working principles of capacitive MEMS sensors, differential capacitors, MEMS microphones, and the impact of MEMS technology on consumer products.
Explores the evolution and advantages of micromachined ultrasonic transducers, focusing on PMUTs and their applications in biometric identity verification and high-resolution imaging.
