Lecture

Transduction: Detection

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In course

MICRO-534: Advanced MEMS & microsystems

In depth analysis of the operation principles and technology of advanced micro- and nanosystems. Familiarisation to their implementation into products and their applications. ...

Description

This lecture covers various methods of transduction for detecting motion and deformation, including optical lever detection, optical interferometer detection, capacitive detection, piezoelectric detection, and piezoresistive detection. It explains the principles behind each method and their advantages and limitations, such as resolution, accuracy, integration feasibility, and alignment issues. The instructor discusses the use of different transduction techniques in microscale applications, emphasizing the association with forces and deformations. The lecture also explores the electromechanical efficiency and performance requirements for MEMS transduction, highlighting the trade-offs involved in selecting the most suitable method for specific applications.

Instructors (2)

Niels Quack

Prof. Dr. Niels Quack received the M.Sc. degree from Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland, in 2005, and the Dr.Sc. degree from Eidgenössische Technische Hochschule Zürich (ETH), Zürich, Switzerland, in 2010. From 2011 to 2015, he was Postdoctoral Researcher and Visiting Scholar with the Integrated Photonics Laboratory, Berkeley Sensor and Actuator Center, University of California, Berkeley, CA, USA. From 2014 to 2015, he was Senior MEMS Engineer with Sercalo Microtechnology, Neuchâtel, Switzerland. He is currently an SNSF Assistant Professor with Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland. He has authored and co-authored more than 50 papers in leading technical journals and conferences. His research interests include photonic micro and nanosystems, with an emphasis on diamond photonics and silicon photonic MEMS. He is Steering Committee Member of the IEEE International Conference on Optical MEMS and Nanophotonics (OMN) and served as General Chair of the IEEE OMN 2018 and the Latsis Symposium 2019 on Diamond Photonics. He is a Senior Member of IEEE, Member of The Optical Society (OSA) and life member of SPIE.

Danick Briand

Expertise MEMS and MicrosystemsFlexible and Printed ElectronicsEnergy Harvesting and PowerMEMSSmart Sensing SystemsAdvanced Gas Sensing TechnologiesMicrofabrication and Printing technologiesMicrosystems Integration and Packaging Expertise MEMS and MicrosystemsFlexible and Printed ElectronicsEnergy Harvesting and PowerMEMSSmart Sensing SystemsAdvanced Gas Sensing TechnologiesMicrofabrication and Printing technologiesMicrosystems Integration and Packaging Mission Environmentally-friendly technology is a rapid

Official source

Related concepts (32)

Force

In physics, a force is an influence that can cause an object to change its velocity, i.e., to accelerate, unless counterbalanced by other forces. The concept of force makes the everyday notion of pushing or pulling mathematically precise. Because the magnitude and direction of a force are both important, force is a vector quantity. It is measured in the SI unit of newton (N) and often represented by the symbol F.

Fictitious force

A fictitious force is a force that appears to act on a mass whose motion is described using a non-inertial frame of reference, such as a linearly accelerating or rotating reference frame. It is related to Newton's second law of motion, which treats forces for just one object. Passengers in a vehicle accelerating in the forward direction may perceive they are acted upon by a force moving them into the direction of the backrest of their seats for instance.

Centrifugal force

In Newtonian mechanics, the centrifugal force is an inertial force (also called a "fictitious" or "pseudo" force) that appears to act on all objects when viewed in a rotating frame of reference. It is directed away from an axis which is parallel to the axis of rotation and passing through the coordinate system's origin. If the axis of rotation passes through the coordinate system's origin, the centrifugal force is directed radially outwards from that axis.

Conservative force

In physics, a conservative force is a force with the property that the total work done in moving a particle between two points is independent of the path taken. Equivalently, if a particle travels in a closed loop, the total work done (the sum of the force acting along the path multiplied by the displacement) by a conservative force is zero. A conservative force depends only on the position of the object.

Motion

In physics, motion is the phenomenon by which an object changes its position with respect to time. Motion is mathematically described in terms of displacement, distance, velocity, acceleration, speed, and frame of reference to an observer, measuring the change in position of the body relative to that frame with a change in time. The branch of physics describing the motion of objects without reference to their cause is called kinematics, while the branch studying forces and their effect on motion is called dynamics.

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