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MICRO-534: Advanced MEMS & microsystems

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Lectures in this course (26)

Transduction: Actuation Log in to Mediaspace to watch this video

Explores transduction through actuation mechanisms, covering force-based and deformation-based methods, shape memory polymers, electrostatic and magnetic actuation principles, and examples like Texas Instruments DLP & DMD.

Sensors: MEMS Advantages & Sensing Techniques Log in to Mediaspace to watch this video

Covers the importance of sensors in micro and nanostructured devices and explores MEMS sensors, their applications, and sensing techniques.

Capacitive MEMS Sensors: Working Principles Log in to Mediaspace to watch this video

Explains the working principles of capacitive MEMS sensors, differential capacitors, MEMS microphones, and the impact of MEMS technology on consumer products.

Piezoresistive MEMS Sensors: Working Principles and Applications Log in to Mediaspace to watch this video

Explores the working principles and applications of piezoresistive MEMS sensors in various industries.

Sensors Technologies Comparison Log in to Mediaspace to watch this video

Explores sensor technologies in MEMS, focusing on pressure sensors, accelerometers, and gyroscopes, and highlights the significance of sensor fusion.

Micromachined Ultrasonic Transducers: PMUTs Log in to Mediaspace to watch this video

Explores the evolution and advantages of micromachined ultrasonic transducers, focusing on PMUTs and their applications in biometric identity verification and high-resolution imaging.

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