Lecture

Sensors Technologies Comparison

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In course

MICRO-534: Advanced MEMS & microsystems

In depth analysis of the operation principles and technology of advanced micro- and nanosystems. Familiarisation to their implementation into products and their applications. ...

Description

This lecture covers various sensor technologies used in MEMS, including pressure sensors, accelerometers, and gyroscopes. It discusses the advancements in pressure sensor technologies, applications in smartphones and tablets, and the development of MEMS pressure sensors. The presentation also delves into the fabrication processes of pressure sensors, such as membrane etching and the use of APSM technology. Furthermore, it explores the integration of sensors in devices like smartphones and tablets, emphasizing the importance of sensor fusion for accurate data collection and analysis.

Instructors (2)

Niels Quack

Prof. Dr. Niels Quack received the M.Sc. degree from Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland, in 2005, and the Dr.Sc. degree from Eidgenössische Technische Hochschule Zürich (ETH), Zürich, Switzerland, in 2010. From 2011 to 2015, he was Postdoctoral Researcher and Visiting Scholar with the Integrated Photonics Laboratory, Berkeley Sensor and Actuator Center, University of California, Berkeley, CA, USA. From 2014 to 2015, he was Senior MEMS Engineer with Sercalo Microtechnology, Neuchâtel, Switzerland. He is currently an SNSF Assistant Professor with Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland. He has authored and co-authored more than 50 papers in leading technical journals and conferences. His research interests include photonic micro and nanosystems, with an emphasis on diamond photonics and silicon photonic MEMS. He is Steering Committee Member of the IEEE International Conference on Optical MEMS and Nanophotonics (OMN) and served as General Chair of the IEEE OMN 2018 and the Latsis Symposium 2019 on Diamond Photonics. He is a Senior Member of IEEE, Member of The Optical Society (OSA) and life member of SPIE.

Danick Briand

Expertise MEMS and MicrosystemsFlexible and Printed ElectronicsEnergy Harvesting and PowerMEMSSmart Sensing SystemsAdvanced Gas Sensing TechnologiesMicrofabrication and Printing technologiesMicrosystems Integration and Packaging Expertise MEMS and MicrosystemsFlexible and Printed ElectronicsEnergy Harvesting and PowerMEMSSmart Sensing SystemsAdvanced Gas Sensing TechnologiesMicrofabrication and Printing technologiesMicrosystems Integration and Packaging Mission Environmentally-friendly technology is a rapid

Official source

Ontological neighbourhood

Physics

Relativity: Special relativity

Related concepts (32)

Ring laser gyroscope

A ring laser gyroscope (RLG) consists of a ring laser having two independent counter-propagating resonant modes over the same path; the difference in phase is used to detect rotation. It operates on the principle of the Sagnac effect which shifts the nulls of the internal standing wave pattern in response to angular rotation. Interference between the counter-propagating beams, observed externally, results in motion of the standing wave pattern, and thus indicates rotation.

Fibre-optic gyroscope

A fibre-optic gyroscope (FOG) senses changes in orientation using the Sagnac effect, thus performing the function of a mechanical gyroscope. However its principle of operation is instead based on the interference of light which has passed through a coil of optical fibre, which can be as long as . Two beams from a laser are injected into the same fibre but in opposite directions. Due to the Sagnac effect, the beam travelling against the rotation experiences a slightly shorter path delay than the other beam.

Vibrating structure gyroscope

A vibrating structure gyroscope, defined by the IEEE as a Coriolis vibratory gyroscope (CVG), is a gyroscope that uses a vibrating structure to determine the rate of rotation. A vibrating structure gyroscope functions much like the halteres of flies (insects in the order Diptera). The underlying physical principle is that a vibrating object tends to continue vibrating in the same plane even if its support rotates. The Coriolis effect causes the object to exert a force on its support, and by measuring this force the rate of rotation can be determined.

Adobe Acrobat

Adobe Acrobat is a family of application software and Web services developed by Adobe Inc. to view, create, manipulate, print and manage Portable Document Format (PDF) files. The family comprises Acrobat Reader (formerly Reader), Acrobat (formerly Exchange) and Acrobat.com. The basic Acrobat Reader, available for several desktop and mobile platforms, is freeware; it supports viewing, printing, scaling or resizing and annotating of PDF files. Additional, "Premium", services are available on paid subscription.

Smartphone

A smartphone is a portable computer device that combines mobile telephone functions and computing functions into one unit. They are distinguished from older-design feature phones by their more advanced hardware capabilities and extensive mobile operating systems, which facilitate wider software, access to the internet (including web browsing over mobile broadband), and multimedia functionality (including music, video, cameras, and gaming), alongside core phone functions such as voice calls and text messaging.

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