Lecture

Capacitive MEMS Sensors: Working Principles

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In course

MICRO-534: Advanced MEMS & microsystems

In depth analysis of the operation principles and technology of advanced micro- and nanosystems. Familiarisation to their implementation into products and their applications. ...

Description

This lecture covers the working principles of capacitive MEMS sensors, focusing on motion sensing and differential capacitors. It explains how capacitors change capacity to detect motion, the concept of differential drive for sensing signals, and the design of differential capacitors with combs. The instructor discusses the applications of MEMS microphones in consumer products, the evolution of MEMS microphone markets, and the impact of MEMS technology on smartphones. Additionally, the lecture explores the fabrication process of MEMS microphones, sound inlet strategies, and the use of piezoelectric materials in MEMS technology.

Instructors (2)

Niels Quack

Prof. Dr. Niels Quack received the M.Sc. degree from Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland, in 2005, and the Dr.Sc. degree from Eidgenössische Technische Hochschule Zürich (ETH), Zürich, Switzerland, in 2010. From 2011 to 2015, he was Postdoctoral Researcher and Visiting Scholar with the Integrated Photonics Laboratory, Berkeley Sensor and Actuator Center, University of California, Berkeley, CA, USA. From 2014 to 2015, he was Senior MEMS Engineer with Sercalo Microtechnology, Neuchâtel, Switzerland. He is currently an SNSF Assistant Professor with Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland. He has authored and co-authored more than 50 papers in leading technical journals and conferences. His research interests include photonic micro and nanosystems, with an emphasis on diamond photonics and silicon photonic MEMS. He is Steering Committee Member of the IEEE International Conference on Optical MEMS and Nanophotonics (OMN) and served as General Chair of the IEEE OMN 2018 and the Latsis Symposium 2019 on Diamond Photonics. He is a Senior Member of IEEE, Member of The Optical Society (OSA) and life member of SPIE.

Danick Briand

Expertise MEMS and MicrosystemsFlexible and Printed ElectronicsEnergy Harvesting and PowerMEMSSmart Sensing SystemsAdvanced Gas Sensing TechnologiesMicrofabrication and Printing technologiesMicrosystems Integration and Packaging Expertise MEMS and MicrosystemsFlexible and Printed ElectronicsEnergy Harvesting and PowerMEMSSmart Sensing SystemsAdvanced Gas Sensing TechnologiesMicrofabrication and Printing technologiesMicrosystems Integration and Packaging Mission Environmentally-friendly technology is a rapid

Official source

Related concepts (32)

Smartphone

A smartphone is a portable computer device that combines mobile telephone functions and computing functions into one unit. They are distinguished from older-design feature phones by their more advanced hardware capabilities and extensive mobile operating systems, which facilitate wider software, access to the internet (including web browsing over mobile broadband), and multimedia functionality (including music, video, cameras, and gaming), alongside core phone functions such as voice calls and text messaging.

Microelectromechanical system oscillator

Microelectromechanical system oscillators (MEMS oscillators) are devices that generate highly stable reference frequencies (used to sequence electronic systems, manage data transfer, define radio frequencies, and measure elapsed time) to measure time. The core technologies used in MEMS oscillators have been in development since the mid-1960s, but have only been sufficiently advanced for commercial applications since 2006. MEMS oscillators incorporate MEMS resonators, which are microelectromechanical structures that define stable frequencies.

Modular smartphone

A modular smartphone is a smartphone designed for users to upgrade or replace components and modules without the need for resoldering or repair services. The most important component is the main board, to which others such as cameras and batteries are attached. Components can be obtained from open-source hardware stores. This design aims to reduce electronic waste, increase the phone's lifespan, and lower repair costs. However, modular smartphones are generally bulkier and slower than their non-modular counterparts which may make them less attractive for most consumers.

Touchscreen

A touchscreen or touch screen is the assembly of both an input ('touch panel') and output ('display') device. The touch panel is normally layered on the top of an electronic visual display of an electronic device. The display is often an LCD, AMOLED or OLED display. A user can give input or control the information processing system through simple or multi-touch gestures by touching the screen with a special stylus or one or more fingers. Some touchscreens use ordinary or specially coated gloves to work, while others may only work using a special stylus or pen.

Piezoelectricity

Piezoelectricity (ˌpiːzoʊ-,_ˌpiːtsoʊ-,_paɪˌiːzoʊ-, piˌeɪzoʊ-,_piˌeɪtsoʊ-) is the electric charge that accumulates in certain solid materials—such as crystals, certain ceramics, and biological matter such as bone, DNA, and various proteins—in response to applied mechanical stress. The word piezoelectricity means electricity resulting from pressure and latent heat. It is derived (an ancient source of electric current). The piezoelectric effect results from the linear electromechanical interaction between the mechanical and electrical states in crystalline materials with no inversion symmetry.

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