Lecture

NEMS: Fabrication and Applications

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In course

MICRO-534: Advanced MEMS & microsystems

In depth analysis of the operation principles and technology of advanced micro- and nanosystems. Familiarisation to their implementation into products and their applications. ...

Description

This lecture covers the introduction to NEMS, including examples and definitions. It discusses the fabrication techniques for NEMS, highlighting the challenges faced. The lecture also explores the reasons for using NEMS, focusing on size, mass, stiffness, and frequency. Additionally, it delves into the flexural and torsional aspects of NEMS, as well as the static and dynamic detection mechanisms. The challenges related to fabrication and measurement in NEMS are thoroughly explained, along with the importance of static and dynamic sensing. The lecture concludes with key takeaways and possible questions for further understanding.

Instructors (2)

Niels Quack

Prof. Dr. Niels Quack received the M.Sc. degree from Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland, in 2005, and the Dr.Sc. degree from Eidgenössische Technische Hochschule Zürich (ETH), Zürich, Switzerland, in 2010. From 2011 to 2015, he was Postdoctoral Researcher and Visiting Scholar with the Integrated Photonics Laboratory, Berkeley Sensor and Actuator Center, University of California, Berkeley, CA, USA. From 2014 to 2015, he was Senior MEMS Engineer with Sercalo Microtechnology, Neuchâtel, Switzerland. He is currently an SNSF Assistant Professor with Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland. He has authored and co-authored more than 50 papers in leading technical journals and conferences. His research interests include photonic micro and nanosystems, with an emphasis on diamond photonics and silicon photonic MEMS. He is Steering Committee Member of the IEEE International Conference on Optical MEMS and Nanophotonics (OMN) and served as General Chair of the IEEE OMN 2018 and the Latsis Symposium 2019 on Diamond Photonics. He is a Senior Member of IEEE, Member of The Optical Society (OSA) and life member of SPIE.

Danick Briand

Expertise MEMS and MicrosystemsFlexible and Printed ElectronicsEnergy Harvesting and PowerMEMSSmart Sensing SystemsAdvanced Gas Sensing TechnologiesMicrofabrication and Printing technologiesMicrosystems Integration and Packaging Expertise MEMS and MicrosystemsFlexible and Printed ElectronicsEnergy Harvesting and PowerMEMSSmart Sensing SystemsAdvanced Gas Sensing TechnologiesMicrofabrication and Printing technologiesMicrosystems Integration and Packaging Mission Environmentally-friendly technology is a rapid

Official source

Related concepts (27)

Rich Internet Application

A Rich Internet Application (also known as a rich web application, RIA or installable Internet application) is a web application that has many of the characteristics of desktop application software. The concept is closely related to a single-page application, and may allow the user interactive features such as drag and drop, background menu, WYSIWYG editing, etc. The concept was first introduced in 2002 by Macromedia to describe Macromedia Flash MX product (which later became Adobe Flash).

Web application

A web application (or web app) is application software that is accessed using a web browser. Web applications are delivered on the World Wide Web to users with an active network connection. In earlier computing models like client-server, the processing load for the application was shared between code on the server and code installed on each client locally. In other words, an application had its own pre-compiled client program which served as its user interface and had to be separately installed on each user's personal computer.

Dynamic range

Dynamic range (abbreviated DR, DNR, or DYR) is the ratio between the largest and smallest values that a certain quantity can assume. It is often used in the context of signals, like sound and light. It is measured either as a ratio or as a base-10 (decibel) or base-2 (doublings, bits or stops) logarithmic value of the difference between the smallest and largest signal values. Electronically reproduced audio and video is often processed to fit the original material with a wide dynamic range into a narrower recorded dynamic range that can more easily be stored and reproduced; this processing is called dynamic range compression.

Dynamic web page

A dynamic web page is a web page constructed at runtime (during software execution), as opposed to a static web page, delivered as it is stored. A server-side dynamic web page is a web page whose construction is controlled by an application server processing server-side scripts. In server-side scripting, parameters determine how the assembly of every new web page proceeds, and including the setting up of more client-side processing. A client-side dynamic web page processes the web page using JavaScript running in the browser as it loads.

Application software

An application program (software application, or application, or app for short) is a computer program designed to carry out a specific task other than one relating to the operation of the computer itself, typically to be used by end-users. Word processors, media players, and accounting software are examples. The collective noun "application software" refers to all applications collectively. The other principal classifications of software are system software, relating to the operation of the computer, and utility software ("utilities").

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