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Lecture

MEMS Resonators: Types and Applications

In course

MICRO-534: Advanced MEMS & microsystems

In depth analysis of the operation principles and technology of advanced micro- and nanosystems. Familiarisation to their implementation into products and their applications. ...

Description

This lecture covers the fundamentals of MEMS resonators, including types such as flexural and torsional resonators, and their applications in filters and oscillators. It discusses the importance of quality factor, trade-offs in resonator design, and transduction methods. The lecture also explores the significance of MEMS resonators in communication front-ends, timekeeping devices, and frequency sources. Additionally, it delves into key performance metrics like phase noise and temperature stability, along with the challenges and solutions in achieving precise frequency control. The presentation concludes with insights on resonator modeling, coupled resonators, and filter design considerations.

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Instructors (2)

Niels Quack

Prof. Dr. Niels Quack received the M.Sc. degree from Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland, in 2005, and the Dr.Sc. degree from Eidgenössische Technische Hochschule Zürich (ETH), Zürich, Switzerland, in 2010. From 2011 to 2015, he was Postdoctoral Researcher and Visiting Scholar with the Integrated Photonics Laboratory, Berkeley Sensor and Actuator Center, University of California, Berkeley, CA, USA. From 2014 to 2015, he was Senior MEMS Engineer with Sercalo Microtechnology, Neuchâtel, Switzerland. He is currently an SNSF Assistant Professor with Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland. He has authored and co-authored more than 50 papers in leading technical journals and conferences. His research interests include photonic micro and nanosystems, with an emphasis on diamond photonics and silicon photonic MEMS. He is Steering Committee Member of the IEEE International Conference on Optical MEMS and Nanophotonics (OMN) and served as General Chair of the IEEE OMN 2018 and the Latsis Symposium 2019 on Diamond Photonics. He is a Senior Member of IEEE, Member of The Optical Society (OSA) and life member of SPIE.

Danick Briand

Official source

Ontological neighbourhood

Information engineering

Signal processing: Filtering theory

Related concepts (32)

Resonator

A resonator is a device or system that exhibits resonance or resonant behavior. That is, it naturally oscillates with greater amplitude at some frequencies, called resonant frequencies, than at other frequencies. The oscillations in a resonator can be either electromagnetic or mechanical (including acoustic). Resonators are used to either generate waves of specific frequencies or to select specific frequencies from a signal. Musical instruments use acoustic resonators that produce sound waves of specific tones.

Analogue filter

Analogue filters are a basic building block of signal processing much used in electronics. Amongst their many applications are the separation of an audio signal before application to bass, mid-range, and tweeter loudspeakers; the combining and later separation of multiple telephone conversations onto a single channel; the selection of a chosen radio station in a radio receiver and rejection of others.

Filter design

Filter design is the process of designing a signal processing filter that satisfies a set of requirements, some of which may be conflicting. The purpose is to find a realization of the filter that meets each of the requirements to a sufficient degree to make it useful. The filter design process can be described as an optimization problem where each requirement contributes to an error function that should be minimized. Certain parts of the design process can be automated, but normally an experienced electrical engineer is needed to get a good result.

Electronic filter

Electronic filters are a type of signal processing filter in the form of electrical circuits. This article covers those filters consisting of lumped electronic components, as opposed to distributed-element filters. That is, using components and interconnections that, in analysis, can be considered to exist at a single point. These components can be in discrete packages or part of an integrated circuit. Electronic filters remove unwanted frequency components from the applied signal, enhance wanted ones, or both.

Low-pass filter

A low-pass filter is a filter that passes signals with a frequency lower than a selected cutoff frequency and attenuates signals with frequencies higher than the cutoff frequency. The exact frequency response of the filter depends on the filter design. The filter is sometimes called a high-cut filter, or treble-cut filter in audio applications. A low-pass filter is the complement of a high-pass filter. In optics, high-pass and low-pass may have different meanings, depending on whether referring to the frequency or wavelength of light, since these variables are inversely related.

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