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Alan Howling

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Publications associées (70)

Complex image method for RF antenna-plasma inductive coupling calculation in planar geometry. Part II: measurements on a resonant network

Philippe Frédérique Bruno Guittienne, Alan Howling, Ivo Furno, Rémy Jacquier

Measurements and analysis of a radio-frequency planar antenna are presented for applications in inductively-coupled plasma processing. The network of inductive and capacitive elements exhibits high currents under resonance which are efficient for plasma ge ...

Iop Publishing Ltd2015

R&D around a photoneutralizer-based NBI system (Siphore) in view of a DEMO Tokamak steady state fusion reactor

Philippe Frédérique Bruno Guittienne, Alan Howling, Ivo Furno, Rémy Jacquier

Since the signature of the ITER treaty in 2006, a new research programme targeting the emergence of a new generation of neutral beam (NB) system for the future fusion reactor (DEMO Tokamak) has been underway between several laboratories in Europe. The spec ...

IOP Publishing Ltd2015

Analysis of resonant planar dissipative network antennas for rf inductively coupled plasma sources

Philippe Frédérique Bruno Guittienne, Christoph Hollenstein, Alan Howling

The analysis of a radio-frequency (RF) planar antenna is presented for applications in plasma processing. The antenna is a network of elementary meshes composed of inductive and capacitive elements which exhibits a set of resonant modes. The high currents ...

Iop Publishing Ltd2014

Direct current breakdown in gases for complex geometries from high vacuum to atmospheric pressure

Christoph Hollenstein, Alan Howling, Ralph Schnyder

The demand for improved performances of power transmission devices requires ever smaller dimensions and higher working voltages which lead to increased risk of breakdown, for example, in satellite slip rings. Previous works are mostly limited to breakdown ...

Iop Publishing Ltd2013

Low ion energy RF reactor using an array of plasmas through a grounded grid

Christoph Hollenstein, Alan Howling, Michaël Chesaux

A reactor using localized remote plasma in a grid electrode is presented in this study. The aim is to reduce the ion bombardment energy inherent in RF capacitively coupled parallel plate reactors used to deposit large area thin film silicon solar cells. Hi ...

A V S Amer Inst Physics2013

Resonant RF network antennas for large-area and large-volume inductively coupled plasma sources

Philippe Frédérique Bruno Guittienne, Christoph Hollenstein, Alan Howling

Large-area and large-volume radio frequency (RF) plasmas are produced by different arrangements of an elementary electrical mesh consisting of two conductors interconnected by a capacitor at each end. The obtained cylindrical and planar RF networks are res ...

Iop Publishing Ltd2013

Funnelling of rf current via a plasmoid through a grid hole in an rf capacitive plasma reactor

Christoph Hollenstein, Alan Howling, Michaël Chesaux

The boundaries of capacitively coupled radio-frequency (rf) plasma reactors generally include at least one grounded metal grid or perforated plate for purposes of gas flow or diagnostic access. When increasing the rf power, an intense localized plasma (a p ...

Iop Publishing Ltd2013

Generation of Whistler-Wave Heated Discharges with Planar Resonant rf Networks

Philippe Frédérique Bruno Guittienne, Christoph Hollenstein, Alan Howling

Magnetized plasma discharges generated by a planar resonant rf network are investigated. A regime transition is observed above a magnetic field threshold, associated with rf waves propagating in the plasma and which present the characteristics of whistler ...

Amer Physical Soc2013

Plasma deposition in an ideal showerhead reactor: a two-dimensional analytical solution

Christoph Hollenstein, Alan Howling, Michaël Chesaux, Boris Legradic

The interplay of gas flow and depletion by plasma dissociation determines the spatial distribution of species and the deposition uniformity in a plasma source. Many plasma reactors use a gas showerhead and the design of the flow dynamics is a critical aspe ...

2012

Plasma generation by inductive coupling with a planar resonant RF network antenna

Philippe Frédérique Bruno Guittienne, Christoph Hollenstein, Alan Howling, Sylvain Lecoultre

A planar antenna operating at 13.56MHz is presented for potential applications in plasma processing. It consists of interconnected elementary resonant meshes composed of inductive and capacitive elements. Due to its structure, the antenna exhibits a set of ...

2012

Resonant planar antenna as an inductive plasma source

Philippe Frédérique Bruno Guittienne, Christoph Hollenstein, Alan Howling, Sylvain Lecoultre

A resonant planar antenna as an inductive plasma source operating at 13.56 MHz inside a low pressure vacuum vessel is presented for potential plasma processing applications. Its principle consists in interconnecting elementary resonant meshes composed of i ...

2012

Plasma generation by inductive coupling with a planar resonant RF network antenna (vol 45, 082001, 2012)

Philippe Frédérique Bruno Guittienne, Christoph Hollenstein, Alan Howling, Sylvain Lecoultre

Iop Publishing Ltd2012

Hydrogen-dominated plasma, due to silane depletion, for microcrystalline silicon deposition

Christoph Hollenstein, Alan Howling, Raffaello Sobbia

Plasma conditions for microcrystalline silicon deposition generally require a high flux of atomic hydrogen, relative to SiH alpha=0 -> 3 radicals, on the growing film. The necessary dominant partial pressure of hydrogen in the plasma is conventionally obta ...

American Vacuum Society2010

Radio frequency breakdown between structured parallel plate electrodes with a millimetric gap in low pressure gases

Christoph Hollenstein, Alan Howling, Boris Legradic

This paper presents an investigation into radio frequency (rf) breakdown for electrodes with holes or protrusions, approximating the situation in real reactors and providing a benchmark for fluid simulations. rf breakdown curves (voltage versus pressure) g ...

American Institute of Physics2010

Non-intrusive plasma diagnostics for the deposition of large area thin film silicon

Christoph Hollenstein, Alan Howling, Benjamin Strahm

Plasma diagnostics for large area, industrial RF parallel-plate reactors can be useful for process optimization and monitoring, provided that their implementation is practical and non-intrusive. For instance, Fourier transform infrared (FTIR) absorption sp ...

Elsevier2009

Uniformity of silicon microcrystallinity in large area RF capacitive reactors

Christoph Hollenstein, Alan Howling, Benjamin Strahm

2008

Plasma silane concentration as a determining factor for the transition from amorphous to microcrystalline silicon in SiH4/H-2 discharges

Laurent Fabien Hubert Sansonnens, Christoph Hollenstein, Alan Howling, Benjamin Strahm

In this work, the microstructure transition from amorphous to microcrystalline silicon is defined in terms of the silane concentration in the plasma as opposed to the silane concentration in the input gas flow. In situ Fourier transform infrared absorption ...

2007

Optimization of microcrystaline silicon deposition efficiency

Laurent Fabien Hubert Sansonnens, Christoph Hollenstein, Alan Howling, Benjamin Strahm

2007

Electromagnetic sources of nonuniformity in large area capacitive reactors

Laurent Fabien Hubert Sansonnens, Christoph Hollenstein, Alan Howling

Theory and experiment show that two electromagnetic modes are necessary and sufficient to determine the field nonuniformity within a parallel-plate rf capacitive plasma reactor. These two modes give rise to the standing wave effect and the telegraph effect ...

2007

Fast equilibration of silane/hydrogen plasmas in large area RF capacitive reactors monitored by optical emission spectroscopy

Laurent Fabien Hubert Sansonnens, Christoph Hollenstein, Alan Howling, Benjamin Strahm

The optimal plasma parameters for plasma processing, such as deposition of microcrystalline silicon from silane and hydrogen, are generally chosen in steady-state discharge conditions. However, this steady state must be reached in a short time after plasma ...

2007

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