Explores beam-matter interactions, focusing on emission phenomena from core electron ionization by X-Rays and electrons, and the competition between Auger and X-Rays emissions.
Covers the principles of Scanning Electron Microscopy, including SEM signals, detectors, and energy spectrum of electrons, as well as the efficiency of X-ray generation.
Discusses X-ray detectors' properties, sensitivity, and signal-to-noise ratio quantification, as well as systematic errors like flat field corrections.
Covers X-Ray Micro-Analysis (XRMA) comparing techniques for analyzing matter with electron beams, discussing interaction volume, emission, fluorescence, and matrix effects.
Covers X-Ray Photoelectron Spectrometry (XPS), a surface analysis technique developed by Kai Siegbahn, explaining its components, mechanism, and analysis methods.
Explores the principles and applications of scanning electron microscopy in micro and nanofabrication, covering electron signals, charging issues, and dimensional measurements.
Covers Energy Dispersive X-ray Microanalysis, explaining how X-rays reveal elemental composition and discussing X-ray generation, detection, efficiency, and quantification.