Lecture

Film Thickness Determination: XPS Analysis

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In course

MSE-351: Surface analysis

The course treats the main surface analysis methods for the characterization of surfaces, interfaces and thin films. It discusses how these methods can be applied to gain specific knowledge about structural, chemical and functional properties of surfaces a ...

Description

This lecture covers the determination of film thickness using X-ray Photoelectron Spectroscopy (XPS). It explains how to calculate film thickness from XPS measurements, considering factors like electron escape depth and atomic concentrations. The lecture also delves into the principles of Auger Electron Spectroscopy (AES) and its comparison with XPS, detailing the instrumentation, spectral interpretation, quantification, and depth profiling. Additionally, it explores electron sources for AES, analytical techniques like Scanning Auger Microscopy, and the concept of Auger vs. Fluorescence transition probabilities.

Instructors (3)

Stefano Mischler

Stefano Mischler obtained the diploma in materials science in 1983 at the Swiss Federal Institute of Technology ETHZ in Zurich. He accomplished his PhD thesis in the field of surface analysis and corrosion at the Materials department of the Swiss Federal Institute of Technology EPFL in Lausanne in 1988. In the years 1989-1990 he held a postdoctoral position at the United Kingdom Atomic Energy Establishment in Harwell (Oxfordshire) where he developed novel quantification procedures for Auger Electron Spectroscopy and high lateral resolution surface analytical methods for fiber reinforced ceramics. In 1991 he joined the newly created Tribology group at the Laboratory for Metallurgical Chemistry of the EPFL where he developed research activities in the field of wear-corrosion interactions (tribocorrosion) and of tribological coatings. He is currently head of the tribology group and is developing a reserach and training activity devoted to modern aspects of tribology and surface science and technology, including surface chemical effects in tribology, biotribology and biocorrosion, tribology in microfabrication processes and wear protection methods. In 2006 he spent a sabbatical leave of 3 months at the Tokyo Medical and Dental University, Institute of Biomaterials.

Igor Stolichnov

Igor Stolichnov received his Master degree in solid state physics at Saint Petersburg State Polytechnical University in 1994. In 1996 he joined EPFL, where he was awarded PhD in 2000 for his work on ferroelectric non-volatile memories. Currently he is a senior scientist, member of staff of Nanoelectronic devices laboratory, EPFL. His scientific interests are focused on functional materials and their applications for information processing in energy-efficient circuitry, including ferroelectrics, dielectrics,

Anna Neus Igual Muñoz

Expertise Tribology, corrosion, tribocorrosion, surface analysis, electrochemistry Anna Igual Munoz is senior scientist at EPFL since 2022. She has a master degree in Industrial engineering (specialised in chemical engineering) and a PhD in Electrochemical corrosion (2001) from UPV. She did a Postdoctoral research at the University of Virginia (USA) in 2002 in the field of electrochemical impedance spectroscopy and local electrochemical techniques. She was Professor at the Technical University of Valencia (

Official source

Ontological neighbourhood

Chemistry

Physical chemistry: Spectroscopy

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