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Lecture

Film Thickness Determination: XPS Analysis

In course

MSE-351: Surface analysis

The course treats the main surface analysis methods for the characterization of surfaces, interfaces and thin films. It discusses how these methods can be applied to gain specific knowledge about structural, chemical and functional properties of surfaces a ...

Description

This lecture covers the determination of film thickness using X-ray Photoelectron Spectroscopy (XPS). It explains how to calculate film thickness from XPS measurements, considering factors like electron escape depth and atomic concentrations. The lecture also delves into the principles of Auger Electron Spectroscopy (AES) and its comparison with XPS, detailing the instrumentation, spectral interpretation, quantification, and depth profiling. Additionally, it explores electron sources for AES, analytical techniques like Scanning Auger Microscopy, and the concept of Auger vs. Fluorescence transition probabilities.

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Instructors (3)

Igor Stolichnov

Anna Neus Igual Muñoz

Stefano Mischler

Stefano Mischler obtained the diploma in materials science in 1983 at the Swiss Federal Institute of Technology ETHZ in Zurich. He accomplished his PhD thesis in the field of surface analysis and corrosion at the Materials department of the Swiss Federal Institute of Technology EPFL in Lausanne in 1988. In the years 1989-1990 he held a postdoctoral position at the United Kingdom Atomic Energy Establishment in Harwell (Oxfordshire) where he developed novel quantification procedures for Auger Electron Spectroscopy and high lateral resolution surface analytical methods for fiber reinforced ceramics. In 1991 he joined the newly created Tribology group at the Laboratory for Metallurgical Chemistry of the EPFL where he developed research activities in the field of wear-corrosion interactions (tribocorrosion) and of tribological coatings. He is currently head of the tribology group and is developing a reserach and training activity devoted to modern aspects of tribology and surface science and technology, including surface chemical effects in tribology, biotribology and biocorrosion, tribology in microfabrication processes and wear protection methods. In 2006 he spent a sabbatical leave of 3 months at the Tokyo Medical and Dental University, Institute of Biomaterials.

Official source

Ontological neighbourhood

Chemistry

Physical chemistry: Spectroscopy

Related concepts (32)

Auger electron spectroscopy

Auger electron spectroscopy (AES; pronounced oʒe in French) is a common analytical technique used specifically in the study of surfaces and, more generally, in the area of materials science. It is a form of electron spectroscopy that relies on the Auger effect, based on the analysis of energetic electrons emitted from an excited atom after a series of internal relaxation events. The Auger effect was discovered independently by both Lise Meitner and Pierre Auger in the 1920s.

X-ray photoelectron spectroscopy

X-ray photoelectron spectroscopy (XPS) is a surface-sensitive quantitative spectroscopic technique based on the photoelectric effect that can identify the elements that exist within a material (elemental composition) or are covering its surface, as well as their chemical state, and the overall electronic structure and density of the electronic states in the material. XPS is a powerful measurement technique because it not only shows what elements are present, but also what other elements they are bonded to.

Electron

The electron (_Electron or _beta-) is a subatomic particle with a negative one elementary electric charge. Electrons belong to the first generation of the lepton particle family, and are generally thought to be elementary particles because they have no known components or substructure. The electron's mass is approximately 1/1836 that of the proton. Quantum mechanical properties of the electron include an intrinsic angular momentum (spin) of a half-integer value, expressed in units of the reduced Planck constant, ħ.

Photoemission spectroscopy

Photoemission spectroscopy (PES), also known as photoelectron spectroscopy, refers to energy measurement of electrons emitted from solids, gases or liquids by the photoelectric effect, in order to determine the binding energies of electrons in the substance. The term refers to various techniques, depending on whether the ionization energy is provided by X-ray, XUV or UV photons. Regardless of the incident photon beam, however, all photoelectron spectroscopy revolves around the general theme of surface analysis by measuring the ejected electrons.

Auger effect

The Auger effect or Auger−Meitner effect is a physical phenomenon in which the filling of an inner-shell vacancy of an atom is accompanied by the emission of an electron from the same atom. When a core electron is removed, leaving a vacancy, an electron from a higher energy level may fall into the vacancy, resulting in a release of energy. Although most often this energy is released in the form of an emitted photon, the energy can also be transferred to another electron, which is ejected from the atom; this second ejected electron is called an Auger electron.

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