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Philippe Renaud

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Publications associées (301)

Polyimide microfluidic devices with integrated nanoporous filtration areas manufactured by micromachining and ion track technology

Philippe Renaud, Arnaud Bertsch, Stefan Metz

This paper reports on polyimide microfluidic devices fabricated by photolithography and a layer transfer lamination technology. The microchannels are sealed by laminating an uncured polyimide film on a partially cured layer and subsequent imidization. Sele ...

2004

Polyimide and SU-8 microfluidic devices manufactured by heat- depolymerizable sacrificial material technique

Philippe Renaud, Arnaud Bertsch, Stefan Metz, Sébastien Jiguet

The following paper describes a sacrificial layer method for the manufacturing of microfluidic devices in polyimide and SU-8. The technique uses heat-depolymerizable polycarbonates embedded in polyimide or SU-8 for the generation of microchannels and seale ...

2004

Dielectric spectroscopy in a micromachined flow cytometer: theoretical and practical considerations

Shady Didier Gawad, Philippe Renaud, Arnaud Bertsch, Urban Seger, Karen Cheung

We propose a model to determine the influence of different cell properties, such as size, membrane capacitance and cytoplasm conductivity, on the impedance spectrum as measured in a microfabricated cytometer. A dielectric sphere of equivalent complex permi ...

2004

An active microphotodiode array of oscillating pixels for retinal stimulation

Philippe Renaud, Mihai Adrian Ionescu, Olof Pontus Linderholm, Marco Mazza

We have developed an active microphotodiode array (MPDA) for retinal stimulation. The unique feature of the device is that each pixel acts as an independent oscillator, whose frequency is controlled by the incident light intensity. The design is based on a ...

2004

Microelectrical impedance tomography for biophysical characterization of thin film biomaterials

Philippe Renaud, Olof Pontus Linderholm, Reto Bruno Schoch

We present a new method for measuring the electrical resistivities of a stratified sample of thin biomaterials or tissue layers. The presented technique makes use of impedance measurements between It pairs of electrodes separated by varying distances. The ...

2003

Study of micro-glow discharges as ion sources for ion mobility spectrometry

Philippe Renaud, Harald Van Lintel

We develop a microionizer as the ion source in a miniaturized spectrometerlike gas analyzer, operating at atmospheric pressure. Several options for the ionizing principle were considered. The application of dc glow discharge in a microsystem was studied in ...

2003

Tunable optical filter of porous silicon as key component for a MEMS spectrometer

Sandra Schweizer, Philippe Renaud, Gerhard Lammel

We present a microspectrometer based on a tunable interference filter for infrared or visible light that scans the desired part of the spectrum within milliseconds. A single pixel detector measures serially the intensity at selected wavelengths. This conce ...

Institute of Electrical and Electronics Engineers2002

3-D integrable optoelectronic devices for telecommunications ICs

Michel Declercq, Philippe Robert, Luc Thévenaz, Philippe Renaud, Philippe Flückiger, Mihai Adrian Ionescu, Georges-André Racine, Cyrille Hibert

The design, fabrication and characterization of CMOS-compatible optoelectronic devices is discussed. All devices are fabricated on silicon on insulator (SOI) substrates which makes them suitable for three-dimensional (3-D) telecommunication photonic integr ...

2002

Bubble-free electrokinetic pumping

Philippe Renaud

Bubble-free electroosmotic flow (fr-EOF) of aqueous electrolytes in microfluidic channels with integrated electrodes is demonstrated. Undesirable electrolytic bubble formation is avoided by applying a periodic, zero net charge current to generate a nonzero ...

Institute of Electrical and Electronics Engineers2002

Flexible microchannels with integrated nanoporous membranes for filtration and separation of molecules and particles

Philippe Renaud, Arnaud Bertsch, Stefan Metz

This paper reports on the technology development and characterization of polyimide-based, microfluidic channels with integrated nanoporous membranes. A layer transfer and lamination technique is used to fabricate flexible microchannels from spin-on polyimi ...

2002

A high-performance silicon micropump for disposable drug delivery systems

Philippe Renaud, Harald Van Lintel

This paper describes the design, fabrication and experimental results of a new, low cost, high-performance silicon micropump developed for a disposable drug delivery system. The pump chip demonstrates linear and accurate (+/-5%) pumping characteristics for ...

2001

Fabrication of flexible, implantable microelectrodes with embedded fluidic microchannels

Philippe Renaud, Raphael Holzer, Stefan Metz

This paper describes the fabrication of polyimide-based microelectrodes with embedded fluidic microchannels. The thin-film structures combine for the first time a fluidic system with microelectrodes for recording and stimulation of biological signals on a ...

2001

MEMS infrared gas spectrometer based on a porous silicon tunable filter

Sandra Schweizer, Philippe Renaud, Gerhard Lammel

We present a MEMS infrared spectrometer for selective and quantitative chemical gas analysis. infrared absorption spectroscopy can distinguish gases easily and also detect nonreactive molecules like CO2, in contrast to e.g. metal oxide gas sensors The foll ...

2001

A novel CMOS SOI unbalanced Mach-Zehnder interferometer: from design and simulations to fabrication and characterization

Michel Declercq, Philippe Robert, Luc Thévenaz, Philippe Renaud, Philippe Flückiger, Mihai Adrian Ionescu, Georges-André Racine, Cyrille Hibert

This paper reports on a novel, simple yet reliable, unbalanced SOI Mach-Zehnder (M-Z) interferometer architecture based on 1.2 μm CMOS process and adapted post-processing for the waveguide sidewalls. The fabricated electro-optical device is based on multip ...

2001

Study of gas ionization schemes for micro devices

Christoph Hollenstein, Philippe Renaud, Harald Van Lintel

For the development of micro gas sensors, studies of field ionization and break-down in small gaps were performed. A finite element simulation was done for an estimate of the achievable field strength near a nanotube tip in small gaps. The simulation also ...

2001

Polyimide-based microfluidic devices

Philippe Renaud, Raphael Holzer, Stefan Metz

This paper describes the development of polyimide-based microfluidic devices. A layer transfer and lamination technique is used to fabricate flexible microfluidic channels in various shapes and with a wide range of dimensions. High bond strengths can be ac ...

2001

MEMS spectrometer for infrared gas analysis based on a tunable filter of porous silicon

Sandra Schweizer, Philippe Renaud, Gerhard Lammel

We present a MEMS infrared spectrometer for selective and quantitative chemical gas analysis. It contains a tunable optical filter of porous silicon that allows to measure the infrared absorption of a gas mixture at different wavelengths serially with only ...

2001

Two-dimensional thermally actuated optical microprojection

Sandra Schweizer, Philippe Renaud, Gerhard Lammel

A dual-axis, raster-scanning laser display based on a monolithic micromachined scanner is presented. The scanner consists of a mirror located at the end of a thermally actuated bimorph beam. The novelty of the device is that the two orthogonal angular moti ...

2000

Fabrication and test of implantable thin-film electrodes for stimulation and recording of biological signals

Philippe Renaud, Raphael Holzer, Stefan Metz

The fabrication, characterization and application of polyimide-based flexible microelectrodes for recording from and stimulation of biological tissue are described. The planar electrodes consist of a polyimide-platinum-polyimide sandwich structure with a t ...

2000

Integrated SSFIP-horn antenna at 75 GHz

Juan Ramon Mosig, Anja Skrivervik, Jean-François Zürcher, Philippe Renaud

We present in this paper an integrated cavity-backed patch antenna operating at 75 GHz. The design was optimized using a full-wave software based on the integral-equation method. The antenna was realized using micromachining technologies on two wafers: a s ...

2000

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