Publications by Radivoje Popovic

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This paper presents a new technique to sense the direction of the magnetic field, enabling a new generation of contactless 360 degrees absolute angle encoders. The sensor consists of a microchip that contains a special ring-shaped Hall element. It is the f ...

In this paper the realization and optimization of two coreless open-loop bus bar current transducers based on a Hall effect sensor are presented. Two types of bus bar are evaluated: flat rectangular and rectangular with a restrictive region in the middle. ...

The aim of the project is the development of a new technology for the fabrication of bismuth (Bi) micro-nano Hall sensors integrated on plastic cantilevers. Bi, a semi-metal, is deposited by evaporation and structured by lift-off. Four electrodes made with Ti-Al are deposited and structured in the same way as Bi. SU-8 cantilevers and carrier chip are structured by photolithography process. The smallest size of the Hall sensor active area obtained with the photolithography was 2 x 2 um2 and was reduced to th

The paper presents an inductive proximity sensor with fully integrated electronics. The sensor with the compact hybrid configuration is composed of a sensing flat coil and an integrated electronic interface. The sensor exhibits a longitudinal resolution of 120 nm for an aluminum target position up to 500 µm from the sensing coil. The total working range is from 100 µm to 1200 µm. The temperature drift of the sensor is less than 400 ppm/°C. The sensor power consumption is 125 mW and the active sensor dimensi

A semiconductor device for measuring ultra low currents down to the level of single electrons or low voltages comprises a first and a second voltage supply terminal (1, 2), an input terminal (3) for receiving an electrical current or being supplied with a ...

Hall devices having an active area of about (500 nm)2 are fabricated by focused electron-beam-induced deposition. The deposited material consists of cobalt nanoparticles in a carbonaceous matrix. The realized devices have, at room temperature, a current se ...

In this paper, we present a new microfabricated orthogonal fluxgate sensor structure. The sensor consists of an electroplated copper excitation rod surrounded by an electroplated permalloy layer and has planar pick-up coils for signal detection. The use of ...

A semiconductor photodiode (18) is formed as a pn-junction between a region (2) of a first conductivity type and a region (6) of a second conductivity type. The region (6) of the second conductivity type is approximately hemispherical. A mini guard ring (8 ...

We report the fabrication and characterization of nickel Hall sensors integrated on SU-8 cantilevers. Sensors having active area down to 1x1 μm 2 show a magnetic field resolution better than 1μT/Hz 1/2 in the thermal noise frequency range. The fabricated d ...

We report here on a new method to release functional SU-8 micro-components with embedded and integrated metal electrodes from the surface, based on isotropic SF6 dry etching of a poly-silicon sacrificial layer. This new fast and clean release technique allows a reproducible fabrication of SU-8 structures with integrated metal devices without risk of damage or altering their performance.

In this paper, we present a new microfabricated orthogonal fluxgate sensor tructure. The sensor consists of an electroplated copper excitation rod surrounded by an electroplated Permalloy layer and has planar pick-up coils for signal detection. The use of ...

Using a highly sensitive silicon Hall sensor fabricated in a standard complementary metal-oxide-semiconductor (CMOS) technology, we detect a single magnetic microbead of 2.8 μm in diameter. The miniaturized sensor has an active area of 2.4×2.4 μm 2, a sensitivity of 175 V/AT and a resistance of 8.5 k. Two detection methods, both exploiting the superparamagnetic behavior of the bead, are experimentally tested and their performances are compared. This work opens the way to the fabrication of low cost microsys

In this paper, we present a new planar fluxgate magnetometer structure. The sensor has the orthogonal fluxgate configuration which makes the detection part independent of the excitation mechanism. The sensor consists of a ferromagnetic cylindrical core cov ...

We developed a new integrated magnetic sensor based on the Hall effect, suitable for the application in magnetic contactless 360° absolute angle sensors. The device consists of a narrow n-well ring with a chain of 64 contacts equally distributed around the ...

We present a technique for contactless angular position sensing that allows low power consumption while keeping dynamic properties comparable to existing sensors. The technique essentially consists in combining a recently developed sensing element, the so- ...

A CMOS HALL magnetometer is presented herein that can be optimally used in current sensing applications thanks to its specific features. The magnetometer incorporates a set of integrated coils that generate a reference AC magnetic field to allow for sensitivity and offset stabilization against temperature variations.

A miniaturized circular vertical Hall device with 8 contacts was studied in terms of its sensitivity, biasing topologies and residual offset. The geometry accounts for about 30% lower sensitivity, but offers the possibility of biasing the whole device in a ...

Anewmicrosystem with the ability to detect magnetic microstructures based on the non-invasive Hall principle is presented. The micro-Hall plate embedded in the microsystem and scaled down to the physical limits of the employedCMOStechnology has an active a ...

A technology for the fabrication of bismuth Hall sensors integrated on SU-8 cantilevers has been developed in this project. Hall sensors with active area of 2 x 2 μm2 (Fig.2) are produced with lift-off and resized to 200 x 200 nm2 (Fig.3) with the FIB. SU-8 cantilevers containing the sensors are characterized as well as the magnetic properties of the sensors.

We report here a new method to release functional SU-8 micro-cantilevers with embedded metal electrodes from the surface, based on isotropic SF6 dry etching of a poly-silicon sacrificial layer. This new fast and clean release technique allows a reproducible fabrication of SU-8 structures with integrated metal devices without risk of damage or altering their performance.

Radivoje Popovic

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Purely CMOS Angular Position Sensor Based on a New Hall Microchip

Realization and optimization of bus bar current transducers based on Hall effect sensors

MICROFABRICATED HALL SENSORS MINIATURIZED TO THE NANOMETER SCALE

A low-cost inductive proximity sensor for industrial applications

Semiconductor device for measuring ultra small electrical currents and small voltages

Submicrometer Hall devices fabricated by focused electron-beam-induced deposition

An Orthogonal Fluxgate-Type Magnetic Microsensor

Semiconductor photodiode and method of making

Integrated Nickel Micro-Nano-Hall Sensors on SU-8 Cantilevers for Scanning Hall Probe Microscopy

Surface microfabricated SU-8 devices with integrated electrodes for scanning probe microscopy

An orthogonal fluxgate-type magnetic microsensor with electroplated Permalloy core

Detection of a single magnetic microbead using a miniaturized silicon Hall sensor

A novel planar magnetic sensor based on orthogonal fluxgate principle

Circular Hall transducer for angular position sensing

Ultra Low-Power Angular Position Sensor for High-Speed Portable Applications

A 0.35um-CMOS, wide-band, low-noise HALL magnetometer for current sensing applications

Miniaturized Circular Vertical Hall Device

An integrated micro-Hall probe for scanning magnetic microscopy

MICROFABRICATED HALL SENSORS ON SU-8 CANTILEVERS

Dry etching release of polymer-based cantilevers with integrated electrodes