Publication

MICROFABRICATED HALL SENSORS MINIATURIZED TO THE NANOMETER SCALE

Giovanni Boero, Christian Santschi, Radivoje Popovic
2006
Reports

Abstract

The aim of the project is the development of a new technology for the fabrication of bismuth (Bi) micro-nano Hall sensors integrated on plastic cantilevers. Bi, a semi-metal, is deposited by evaporation and structured by lift-off. Four electrodes made with Ti-Al are deposited and structured in the same way as Bi. SU-8 cantilevers and carrier chip are structured by photolithography process. The smallest size of the Hall sensor active area obtained with the photolithography was 2 x 2 um2 and was reduced to the nanometer scale (200x200 nm2) by the mean of the focused ion beam (FIB).

Official source

https://infoscience.epfl.ch/entities/publication/354491a9-17c2-4c55-be5e-c65c52243225

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Giovanni Boero, Christian Santschi, Radivoje Popovic
2006
Reports

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/354491a9-17c2-4c55-be5e-c65c52243225

About this result

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