Publication

MICROFABRICATED HALL SENSORS ON SU-8 CANTILEVERS

Giovanni Boero, Radivoje Popovic
2005
Reports

Abstract

A technology for the fabrication of bismuth Hall sensors integrated on SU-8 cantilevers has been developed in this project. Hall sensors with active area of 2 x 2 μm2 (Fig.2) are produced with lift-off and resized to 200 x 200 nm2 (Fig.3) with the FIB. SU-8 cantilevers containing the sensors are characterized as well as the magnetic properties of the sensors.

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MICROFABRICATED HALL SENSORS ON SU-8 CANTILEVERS

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