Publication

Integrated Nickel Micro-Nano-Hall Sensors on SU-8 Cantilevers for Scanning Hall Probe Microscopy

Jürgen Brugger, Giovanni Boero, Christian Santschi, Radivoje Popovic, Oscar Vazquez Mena, Schahrazede-Lila Mouaziz
2007
Conference Papers

Abstract

We report the fabrication and characterization of nickel Hall sensors integrated on SU-8 cantilevers. Sensors having active area down to 1x1 μm 2 show a magnetic field resolution better than 1μT/Hz 1/2 in the thermal noise frequency range. The fabricated devices have been tested for magnetic imaging using the scanning Hall probe microscopy technique.

Official source

https://infoscience.epfl.ch/entities/publication/b90c357b-bd8c-4f48-852e-3fdda5a9df30

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Integrated Nickel Micro-Nano-Hall Sensors on SU-8 Cantilevers for Scanning Hall Probe Microscopy

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