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Concept

Pulsed laser deposition

Related lectures (32)

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Covers the sputtering process, parameters influencing film quality, and advantages over thermal evaporation.

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Examines stress in thin films, including uniform distribution and intrinsic factors, within the context of microfabrication.

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Explores plasma-enhanced chemical vapor deposition for thin-film processing and its impact on film properties and material quality.

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Micro and Nanofabrication: Basics and Techniques MOOC: Micro and Nanofabrication (MEMS)

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Explores Physical Vapor Deposition techniques, including shadowing effects and equipment specifications for evaporation processes in micro and nanofabrication.

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Covers sputtering, plasma creation, and thin film deposition processes.

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