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Lecture

Flexible Silicon Electronics

In course

MICRO-514: Flexible bioelectronics

The course is an introduction to the emerging field of flexible (bio)electronics. It provides an overview of the materials and processes used to design and manufacture flexible circuits and sensors. Applications encompass flexible sensors, biointerfaces, ...

Description

This lecture by the instructor covers the integration of silicon on flexible substrates for bioelectronics applications, discussing the challenges and methods such as transfer printing and thin film deposition. It explores the fabrication of flexible multiplexed transistor arrays and the process flow for creating multilayered devices, emphasizing the potential for flexible electronics in healthcare and neural interfaces.

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Instructor

Stéphanie Lacour

Stéphanie P. Lacour holds the Bertarelli Foundation Chair in Neuroprosthetic Technology in the School of Engineering at EPFL and leads the Laboratory for Soft Bioelectronic Interfaces. She received her PhD in Electrical Engineering from INSA de Lyon, France, and completed postdoctoral research at Princeton University and the University of Cambridge. She is the recipient of the 2006 MIT TR35, a University Research Fellowship of the Royal Society, European Research Council ERC Starting and POC Grants, and a SNSF-ERC Consolidator Grant. She was elected a 2015 Young Global Leader by the World Economic Forum.

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Related concepts (29)

Flexible electronics

Flexible electronics, also known as flex circuits, is a technology for assembling electronic circuits by mounting electronic devices on flexible plastic substrates, such as polyimide, PEEK or transparent conductive polyester film. Additionally, flex circuits can be screen printed silver circuits on polyester. Flexible electronic assemblies may be manufactured using identical components used for rigid printed circuit boards, allowing the board to conform to a desired shape, or to flex during its use.

Printed electronics

Printed electronics is a set of printing methods used to create electrical devices on various substrates. Printing typically uses common printing equipment suitable for defining patterns on material, such as screen printing, flexography, gravure, offset lithography, and inkjet. By electronic-industry standards, these are low-cost processes. Electrically functional electronic or optical inks are deposited on the substrate, creating active or passive devices, such as thin film transistors; capacitors; coils; resistors.

Integrated circuit

An integrated circuit or monolithic integrated circuit (also referred to as an IC, a chip, or a microchip) is a set of electronic circuits on one small flat piece (or "chip") of semiconductor material, usually silicon. Large numbers of miniaturized transistors and other electronic components are integrated together on the chip. This results in circuits that are orders of magnitude smaller, faster, and less expensive than those constructed of discrete components, allowing a large transistor count.

Thin film

A thin film is a layer of material ranging from fractions of a nanometer (monolayer) to several micrometers in thickness. The controlled synthesis of materials as thin films (a process referred to as deposition) is a fundamental step in many applications. A familiar example is the household mirror, which typically has a thin metal coating on the back of a sheet of glass to form a reflective interface. The process of silvering was once commonly used to produce mirrors, while more recently the metal layer is deposited using techniques such as sputtering.

Silicon on sapphire

Silicon on sapphire (SOS) is a hetero-epitaxial process for metal–oxide–semiconductor (MOS) integrated circuit (IC) manufacturing that consists of a thin layer (typically thinner than 0.6 μm) of silicon grown on a sapphire (Al2O3) wafer. SOS is part of the silicon-on-insulator (SOI) family of CMOS (complementary MOS) technologies. Typically, high-purity artificially grown sapphire crystals are used. The silicon is usually deposited by the decomposition of silane gas (SiH4) on heated sapphire substrates.

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