Publications de Jürgen Brugger

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Precise packaging of nanoliter amounts of liquid in a microsystem is important for many biomedical applications. However, existing liquid encapsulation technologies have limitations in terms of liquid waste, evaporation, trapped bubbles, and liquid degrada ...

Periodic arrays of elongated cobalt islands exchange coupled to continuous Permalloy thin films were fabricated using silicon nitride stencil masks and the magnetic spin configurations during magnetization reversal were studied with photoemission electron ...

Hall devices having an active area of about (500 nm)2 are fabricated by focused electron-beam-induced deposition. The deposited material consists of cobalt nanoparticles in a carbonaceous matrix. The realized devices have, at room temperature, a current se ...

We demonstrate the use of copolymer micelle lithography using polystyrene-block-poly(2-vinylpyridine) reverse micelle thin films in their as-coated form to create nanopillars with tunable dimensions and spacing, on different substrates such as silicon, sil ...

In article number 2000733 by Juergen Brugger and co‐workers, a novel composite membrane of silk fibroin, microgels and magnetic nanoparticles whose permeability can be adjusted by temperature for controlled drug release is studied. The temperature induced ...

Resistless processes to realize the pattern transfer of your designs into the substrate present some advantages, as the reduction in fabrication steps. Stencil Lithography (SL) is one of the most used resistless processes and, up to now, it has mainly been ...

We report the fabrication and characterization of nickel Hall sensors integrated on SU-8 cantilevers. Sensors having active area down to 1x1 μm 2 show a magnetic field resolution better than 1μT/Hz 1/2 in the thermal noise frequency range. The fabricated d ...

In cochlear implants, the electrode insertion trauma during surgery can cause damage residual hearing. Preserving the residual hearing is an important challenge and the localized administration of drugs, such as steroids, is one of the most promising ways, ...

Thermal scanning probe lithography is an emerging nanofabrication technique for rapid prototyping of arbitrary topographies in thermally sensitive resist. This feature, paired to the recent advances in dry plasma etching techniques, allows the fabrication ...

Additive manufacturing (AM) methods are being integrated in ceramics fabrication either as the main manufacturing tool or for auxiliary purposes. By using polymers, powders and preceramic formulated materials, AM techniques are pushing towards higher resol ...

Photostructurable epoxy based resists, like SU-8, are soft materials with a Young’s Modulus around 4 GPa, which makes them particularly suitable as base material to fabricate Atomic Force Microscopy (AFM) probes for non-destructive analysis of fragile samp ...

We report on the fabrication and electrical characterization of functionalized solid-state nanopores in low stress silicon nitride membranes. First, a pore of approximately 50 nm diameter was drilled using a focused ion beam technique, followed by the loca ...

The authors report on the ability to control the polarity of sputter deposited AlN001 thin ﬁlms using seed layers. Reactive sputter deposition leads to N-polarity on any substrate hitherto applied, i.e., Si111, sapphire, SiO2, and polycrystalline metals su ...

The loss of olfactory function has a profound impact on quality of life, affecting not only sensory perception but also memory, emotion, and overall well-being. Despite this, advancements in olfactory prostheses have lagged significantly behind those made ...

Gold membranes with large arrays of sub-µm holes were fabricated and optically characterized. The fabrication is a combination of a bottom-up, self-assembly based patterning technique, Nanosphere Lithography (NSL), and standard microfabrication. This was a ...

A method is presented that allows the deﬁnition of micrometer- and submicrometer-sized implanted structures in silicon without using photoresist patterning. The process is based on the use of stencils as masks in a conventional ion implanter, and is tested ...

Capillary-assisted particle assembly (CAPA) in predefined topographical templates is a scalable method for the precise positioning of nanoscale objects on various surfaces. High-resolution CAPA templates are typically fabricated by expensive electron-beam ...

Glass-like carbon (GC) has been widely used in micro-nano devices due to its excellent properties such as hardness, biocompatibility, and chemical inertness. In this work we investigate, for the first time, the piezoresistive behavior of GC in view of its ...

This paper presents advances in micro and nanofabrication techniques beyond conventional lithographic masks with examples of inkj et printing, nanostencil lithography, molecular-level doping methods, and thermal scanning probe lithography. These methods en ...

This paper presents new results on miniaturized organic thin film transistors (TFT) fabricated on a spin coated polyimide (PI) film. Patterning steps, that are vital for the integrity and electrical performances of the organic TFT, were performed using res ...

Jürgen Brugger

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Nanoliter Liquid Packaging in a Bioresorbable Microsystem by Additive Manufacturing and its Application as a Controlled Drug Delivery Device

Permalloy thin films exchange coupled to arrays of cobalt islands

Submicrometer Hall devices fabricated by focused electron-beam-induced deposition

Tunable, high aspect ratio pillars on diverse substrates using copolymer micelle lithography: an interesting platform for applications

Reversible Drug Delivery: Thermal and pH Sensitive Composite Membrane for On‐Demand Drug Delivery by Applying an Alternating Magnetic Field (Adv. Mater. Interfaces 17/2020)

Etching of sub-micrometer structures through Stencil

Integrated Nickel Micro-Nano-Hall Sensors on SU-8 Cantilevers for Scanning Hall Probe Microscopy

A 3D Microscaffold Cochlear Electrode Array for Steroid Elution

High-aspect ratio nanopatterning via combined thermal scanning probe lithography and dry etching

Additive micro-manufacturing of crack-free PDCs by two-photon polymerization of a single, low-shrinkage preceramic resin

Stress and aging minimization in photoplastic AFM probes

Fabrication and functionalization of nanochannels by electron-beam-induced silicon oxide deposition

Sputtering of (001)AlN thin films: Control of polarity by a seed layer

Devices for the electrical stimulation of the olfactory system: A review

GOLD MEMBRANES WITH LARGE ARRAYS OF SUB-µm HOLES FABRICATED BY WAFER-SCALE NANOSPHERE LITHOGRAPHY

Localized Ion Implantation Through Micro/Nanostencil Masks

Precise Capillary‐Assisted Nanoparticle Assembly in Reusable Templates

A Glass-Like Carbon Mems Strain Sensor

Beyond the Mask: Advancing Fabrication and Immersive Learning

Organic Thin Film Transistors on Flexible Polyimide Substrates Fabricated by Full Wafer Stencil Lithography