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Jürgen Brugger

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Publications associées (329)

Organic Thin Film Transistors on Flexible Polyimide Substrates Fabricated by Full Wafer Stencil Lithography

Mihai Adrian Ionescu, Jürgen Brugger, Dimitrios Tsamados, Katrin Sidler Arnet, Andreea Veronica Savu, Nenad Cvetkovic

This paper presents new results on miniaturized organic thin film transistors (TFT) fabricated on a spin coated polyimide (PI) film. Patterning steps, that are vital for the integrity and electrical performances of the organic TFT, were performed using res ...

Elsevier2010

Flexible Membranes Improve Resolution in Stencil Lithography

Jürgen Brugger, Oscar Vazquez Mena, Katrin Sidler Arnet, Andreea Veronica Savu, Luis Guillermo Villanueva Torrijo

2010

Ambipolar silicon nanowire FETs with stenciled sub-µm metal gate

Yusuf Leblebici, Jürgen Brugger, Giovanni De Micheli, Andreea Veronica Savu, Davide Sacchetto

A fully CMOS compatible fabrication flow using low temperature a-Si LPCVD and stencil lithography has been developed and proved suitable for SiNW FinFETs having ambipolar conductance. The stencil mask has been demonstrated to be a real option for sub-micro ...

2010

Direct polymer patterning by high energy reactive ion beam through stencil masks

Jürgen Brugger, Oscar Vazquez Mena, Andreea Veronica Savu

Polytetrafluoroethylene (PTFE) is a polymer with remarkable physico-chemical properties which has been used for membrane and biomedical applications [1]. This fluorpolymer is however difficult or cost- inhibiting to pattern with conventional methods with h ...

2010

Metallic Nanodot Arrays Fabricated by Stencil Lithography on SiO2 and Polymer Substrates

Jürgen Brugger, Oscar Vazquez Mena, Katrin Sidler Arnet, Andreea Veronica Savu, Luis Guillermo Villanueva Torrijo

2010

Inexpensive and fast wafer-scale fabrication of nanohole arrays in thin gold ﬁlms for plasmonics

Bernard Wenger, Jürgen Brugger, Harry Heinzelmann, Mona Julia Katharina Klein, Raphaël Pugin

In this paper, a fast and inexpensive wafer-scale process for the fabrication of arrays of nanoscale holes in thin gold ﬁlms for plasmonics is shown. The process combines nanosphere lithography using spin-coated polystyrene beads with a sputter-etching pro ...

Institute of Physics2010

High-density, high-aspect ratio epoxy microstructures by Direct Write Laser Patterning

Georges-André Racine, Jürgen Brugger, Jean-Baptiste Bureau, Victor Javier Cadarso Busto, Vaida Auzelyte

2010

Fluidic microstructuring of alginate hydrogels for the single cell niche

Philippe Renaud, Jürgen Brugger, Thomas Michael Braschler, Kristopher Pataky, Ana Valero, Ludovica Colella

Controlling alginate gel formation by diffusion of Ca2+ ions through a filter barrier, a layer-by-layer deposition technique with resolution on the size scale of a single cell is presented. It offers the possibility of exposing cells under biocompatible co ...

Royal Society of Chemistry2010

Direct writing laser of high aspect ratio epoxy microstructures

Georges-André Racine, Jürgen Brugger, Jean-Baptiste Bureau, Victor Javier Cadarso Busto

The development of high aspect ratio (AR) structures is of great interest in several ﬁelds such as micro-electro-mechanical systems or microﬂuidics. In this note we present a new processing method of epoxy materials based on direct write laser (DWL) scanni ...

Institute of Physics2010

System for aligning patterns on a substrate using stencil lithography

Jürgen Brugger

The invention relates to a system for aligning two or more patterns on a substrate using vacuum stencil lithography, such as to obtain optimum alignment precision. More specifically, the invention relates to a pattern-alignment system in which a mass senso ...

2010

Special Issue of the Eurosensors XXIII conference Preface

Jürgen Brugger, Danick Briand

2010

Stenciled conducting bismuth nanowires

Jürgen Brugger, Sam Neuser, Oscar Vazquez Mena, Katrin Sidler Arnet, Andreea Veronica Savu, Luis Guillermo Villanueva Torrijo

Stencil lithography is used here for the fabrication of bismuth nanowires using thermal evaporation. This technique provides good electrical contact resistance by having the nanowire structure and the contact pads deposited at the same time. It has also th ...

2010

Large arrays of chemo-mechanical nanoswitches for ultralow-power hydrogen sensing

Jürgen Brugger, Thomas Kiefer, Luis Guillermo Villanueva Torrijo, Arnaud Salette

A hydrogen sensor based on large arrays of nanoswitches in palladium (Pd) is presented. An individual nanoswitch is realized by a suspended Pd/Ti/poly-Si trimorph electrode and a fixed Pd/Ti bottom electrode, which are separated by a vertical nanoscopic ga ...

Institute of Physics2010

Very Large Scale Arrays of Chemo-Mechanical Nano-Switches for Ultralow Power Hydrogen Sensing

Jürgen Brugger, Thomas Kiefer, Luis Guillermo Villanueva Torrijo, Arnaud Salette

2010

Pd-functionalized MEMS resonator for hydrogen gas sensing at ambient pressure

Jürgen Brugger, Thomas Kiefer, Luis Guillermo Villanueva Torrijo, Jonas Gustav Henriksson

This work presents the fabrication and characterization of a novel hydrogen-detecting micro-resonator based on the expansion of palladium (Pd) as it is exposed to hydrogen (H2) gas. The working principle of the device has been confirmed and it shows a stro ...

2010

Sputtering of (001)AlN thin films: Control of polarity by a seed layer

Jean-François Carlin, Paul Muralt, Denis Martin, Jürgen Brugger, Nicolas Grandjean, Evgeny Milyutin, Andreea Veronica Savu, Scott Harada

The authors report on the ability to control the polarity of sputter deposited AlN001 thin ﬁlms using seed layers. Reactive sputter deposition leads to N-polarity on any substrate hitherto applied, i.e., Si111, sapphire, SiO2, and polycrystalline metals su ...

American Vacuum Society2010

The transition in hydrogen sensing behavior in non-continuous palladium films

Jürgen Brugger, Thomas Kiefer, Luis Guillermo Villanueva Torrijo

The morphological transition in ultrathin palladium (Pd) films around the percolation threshold and the related transition in hydrogen sensing behavior is investigated.We find that besides the transition from continuous to discontinuous Pd, an intermediate ...

American Institute of Physics2010

Fabrication of Metallic Nanodots by Stencil Lithography for Localized Surface Plasmon Resonance Biosensing

Jürgen Brugger, Oscar Vazquez Mena, Luis Guillermo Villanueva Torrijo

2010

Fast and robust hydrogen sensors based on discontinuous palladium films on polyimide, fabricated on a wafer scale

Jürgen Brugger, Thomas Kiefer, Luis Guillermo Villanueva Torrijo

Fast hydrogen sensors based on discontinuous palladium (Pd) ﬁlms on supporting polyimide layers, fabricated by a cost-efﬁcient and full-wafer compatible process, are presented. The ﬁlms, deposited by electron-beam evaporation with a nominal thickness of 1. ...

Institute of Physics2010

Nanoporous SiN membranes patterned by wafer-scale nanosphere lithography

Jürgen Brugger, Harry Heinzelmann, Oscar Vazquez Mena, Andreea Veronica Savu, Mona Julia Katharina Klein, Raphaël Pugin, Franck Montagne

Nanoporous SiN membranes are interesting for a number of applications, e.g. stenciling, filtration, or tissue engineering [1-3]. The patterning of the pores requires a high resolution lithographic tool. Focused ion beam milling or e-beam lithography fulfil ...

2010

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