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Paul Muralt

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Publications associées (144)

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Micro Solid Oxide Fuel Cell in Silicon Technology with Reinforced Electrolyte Membrane

Paul Muralt, Yan Yan, Samuel Rey-Mermet

Solid oxide electrolyte membranes of sputter deposited yttria-stablized zirconia (YSZ) were integrated in silicon technology for applications in micro power generators fuelled by hydrogen or H2+CO. An electrochemically deposited nickel grid was used as mec ...

Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa2009

Fabrication of complex oxide microstructures by combinatorial chemical beam vapour deposition through stencil masks

Paul Muralt, Andreea Veronica Savu, Silviu Cosmin Sandu, Giacomo Benvenuti, Estelle Wagner, Scott Harada

Chemical Beam Vapour Deposition is a gas phase deposition technique, operated under high vacuum conditions, in which evaporated chemical precursors are thermally decomposed on heated substrates to form a film. In the particular equipment used in this work, ...

Elsevier2015

Determination of elastic and piezoelectric properties of Al0.84Sc0.16N thin films

Paul Muralt, Vladimir Pashchenko, Fazel Parsapour

In this work, bar- and disk-shaped resonators were fabricated using Al(0.8)4Sc(0.16)N thin film Sensitivity analysis of the resonators' resonance frequencies with respect to the piezoelectric material parameters revealed that resonance analysis can be used ...

IEEE2018

Induced giant piezoelectricity in centrosymmetric oxides

Paul Muralt, Dragan Damjanovic, Vasiliki Tileli, Mahmoud Hadad, Lukas Riemer, Daesung Park

Piezoelectrics are materials that linearly deform in response to an applied electric field. As a fundamental prerequisite, piezoelectric materials must have a noncentrosymmetric crystal structure. For more than a century, this has remained a major obstacle ...

American Association for the Advancement of Science2022

Combinatorial Discovery and Optimization of Amorphous HfO2-Nb2O5 Mixture with Improved Transparency

Paul Muralt, Patrik Willi Hoffmann, Silviu Cosmin Sandu, Ali Dabirian, Giacomo Benvenuti, Estelle Wagner, Yury Kuzminykh, Scott Harada

Combinatorial high vacuum chemical vapor deposition (HV-CVD) of mixed HfO2-Nb2O5 thin films has been demonstrated to yield amorphous layers at substrate temperatures where individually deposited pure HfO2 and Nb2O5 films are polycrystalline. Spectroscopic ...

Electrochemical Society2010

Resonant Pzt Mems Mirror With Segmented Electrodes

Paul Muralt, Mohssen Moridi, Ramin Matloub Aghdam

We report a transduction optimization method of piezo-based MEMS structures using segmentation of the excitation electrodes. Optimal transduction is achieved by matching the electric field distribution to the polarization distribution including the direct ...

IEEE2020

Preface: Special Issue: Euromat 2011-European Congress and Exhibition on Advanced Materials and Processes: Symposium A53 MEMS/NEMS for Sensorial and Actorial Materials

Jürgen Brugger, Paul Muralt

SAGE Publications2013

Electromechanical properties of Al0.9Sc0.1N thin films evaluated at 2.5 GHz film bulk acoustic resonators

Paul Muralt, Silviu Cosmin Sandu, Ramin Matloub Aghdam, Evgeny Milyutin

AlN films are employed in RF filters for wireless communication. We report on enhanced coupling factors k(t)(2) obtained by partial substitution of Al by Sc. Al0.88Sc0.12N films were deposited by reactive magnetron sputtering from an Al0.9Sc0.1 alloy targe ...

AIP American Institute of Physics2011

Actuation of piezoelectric structures with ferroelectric thin films having multiple elements

Paul Muralt

A method for driving piezoelectric elements of a micro-system. The piezoelectric elements comprising a ferroelectric thin film, and being configured to be part of any one or a combination of items of a list comprising: a cantilever, a bridge, a diaphragm, ...

2020

Hybrid BAW/SAW AlN and AlScN Thin Film Resonator First Experimental data

Paul Muralt, Ramin Matloub Aghdam, Vladimir Pashchenko

A novel type of hybrid resonator based on BAW transformation into SAW in a ridged layered structure was fabricated and characterized. Bulk waves are excited by micromachined piezoelectric AlScN pillars located on the non-piezoelectric Si and sapphire subst ...

Ieee2016

Combinatorial study of low-refractive Mg-F-Si-O nano-composites deposited by magnetron co-sputtering from compound targets

Paul Muralt, Jean-Louis Scartezzini, Silviu Cosmin Sandu, Stefan Mertin

2018

Power and radio frequency inductors using a hybrid ferrite-flex foil technology

Martinus Adela Maria Gijs, Paul Muralt

2007

Ferroelectric and piezoelectric properties of lanthanoid-substituted Bi4Ti3O12 thin films grown on (111)Pt and (100)IrO2 electrodes

Nava Setter, Paul Muralt

We investigated he effect of film orientation on piezoelectric and ferroelectric properties of (Bi(3.25)Ln(0.75))Ti3O12 (Ln=La, Nd, and Sm). c-axis-oriented films were grown on (111)Pt electrodes with nondoped Bi4Ti3O12 buffer layers. The films grown on (1 ...

2005

Growth, Properties, and Applications of Al1-xScxN Thin Films

Paul Muralt, Stefan Mertin, Vladimir Pashchenko, Fazel Parsapour

The discovery of enhanced piezoelectricity in solid solutions of AlN and ScN is certainly one of the most important events in piezoelectric MEMS. As compared to pure AlN, it brought a crucial factor 2 to 3 improvement in a number of figures of merit govern ...

IEEE2019

Characterization of piezoelectric material for micro thermal harvesters

Paul Muralt

This paper presents the first realizations of a novel concept for thermal energy harvesting at micro scale. The devices proposed here are based on a two-step transduction combining thermo-mechanical and piezoelectric conversion. In this contribution, we pr ...

IOP Publishing Ltd2014

Effect of substrate roughness on c-oriented AlN thin films

Paul Muralt

(001)-textured AlN thin films as needed for bulk acoustic wave devices exhibit large mechanical stress variations as a function of growth substrate properties. We studied the relationship between stress and the surface morphology of a thermally oxidized si ...

2009

Piezoelectric resonator operating in thickness shear mode

Paul Muralt, Evgeny Milyutin

An acoustic wave resonator device comprising a resonant layer that comprises a series of side-by-side areas of first and second dielectric materials. In one embodiment the first dielectric material is a piezoelectric, in particular the first dielectric mat ...

2010

Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces

Paul Muralt, Thomas La Grange, Stefan Mertin, Vladimir Pashchenko, Fazel Parsapour, Silviu Cosmin Sandu, Ramin Matloub Aghdam

Sputter deposited Al(1-x)ScxN thin films with a Sc content from x = 0 to 43 at% are investigated by electron microscopy in order to study and explain the formation and growth of abnormally oriented grains (AOG). It is found that the latter did not nucleate ...

Wiley-VCH Verlag2019

Meso-scale ceramic hotplates - A playground for high temperature microsystems

Thomas Maeder, Paul Muralt, Bo Jiang

This paper presents a mesa-scale low-temperature co-fired ceramic (LTCC) hotplate system. Using embedded thick-film platinum heaters, the hotplate has been able to operate at about 600 degrees C in a reliable manner, while its operating temperature can be ...

Elsevier2015

Fine structuration of low-temperature co-fired ceramic (LTCC) microreactors

Albert Renken, Thomas Maeder, Lioubov Kiwi, Paul Muralt, Bo Jiang, Julien Haber

The development of microreactors that operate under harsh conditions is always of great interest for many applications. Here we present a microfabrication process based on low-temperature co-fired ceramic (LTCC) technology for producing microreactors which ...

Royal Society of Chemistry2015