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Paul Muralt

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Publications associées (147)

Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting

Paul Muralt

2009

Strong improvement in the photonic stop-band edge sharpness of a lithium niobate photonic crystal slab

Paul Muralt, Maria-Pilar Bernal, Scott Harada

We report on a photonic crystal (PhC) etched into a 380 nm thick lithium niobate (LN) thin film deposited on a MgO substrate by pulsed laser deposition. The transmission properties of this device were assessed by optical near-field measurements and compare ...

AIP American Institute of Physics2009

Effect of substrate roughness on c-oriented AlN thin films

Paul Muralt, Alvaro Artieda, Michela Antonella Barbieri

(001)-textured AlN thin films as needed for bulk acoustic wave devices exhibit large mechanical stress variations as a function of growth substrate properties. We studied the relationship between stress and the surface morphology of a thermally oxidized si ...

2009

Vibration Energy Harvesting with PZT Micro Device

Paul Muralt, Florian Calame

A micro power generator harvesting vibration energy by resonant inertial oscillation of a piezoelectric laminated cantilever with proof mass was designed, fabricated, and characterized. The active part with 2 pm thick PZT on 5 mu m silicon was equipped wit ...

Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa2009

Piezoelectric materials parameters for piezoelectric thin films in GHz applications

Paul Muralt, Alvaro Artieda, Marco Cantoni, Janine Conde

Piezoelectric thin films have existing and promising new applications in microwave filter technologies. The final performance depends on many parameters, and very specifically on the materials properties of each involved material. In this article, material ...

Cambridge University Press2009

Characterization of sol-gel Pb(Zr0.53Ti0.47)O-3 in thin film bulk acoustic resonators

Paul Muralt, Janine Conde

2008

PMBAR* - shear mode TFBAR based on (001)AlN thin film Piezo-Modulated Bulk Acoustic wave Resonator

Paul Muralt, Evgeny Milyutin

A novel concept for shear mode Bulk Acoustic Resonators (BAR) is presented. It is based on c-axis oriented AlN thin films grown on silicon dioxide thin films, combined with interdigitated electrodes. Such a structure leads to an excitation of mainly shear ...

Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa2008

High-Q AlN/SiO2 Symmetric Composite Thin Film Bulk Acoustic Wave Resonators

Paul Muralt, Alvaro Artieda

2008

A micro-solid oxide fuel cell system as battery replacement

Paul Victor Georges Muller, Paul Muralt, Samuel Rey-Mermet, Anna Infortuna, Dimos Poulikakos

2008

Chemical nature of colossal dielectric constant of CaCu3Ti4O12 thin film by pulsed laser deposition

Paul Muralt, Nicolas Xanthopoulos

AIP American Institute of Physics2008

Electrical Nanoscale Training of Piezoelectric Response Leading to Theoretically Predicted Ferroelastic Domain Contributions in PZT Thin Films

Paul Muralt

Wiley2008

Solid oxide fuel cell membranes supported by nickel grid anode

Paul Muralt, Samuel Rey-Mermet

2008

Piezoelectrics in micro and nanosystems: Solutions for a wide range of applications

Paul Muralt

2008

Shear mode bulk acoustic wave resonator based on c-axis oriented AIN thin film

Paul Muralt, Evgeny Milyutin

A shear mode resonator based on bulk waves trapped in c-axis oriented AlN thin films was fabricated, simulated, and tested. The active 1.55 mu m thick AlN layer was deposited on top of an acoustic Bragg reflector composed of SiO2/AlN lambda/4 layer pairs. ...

2008

Recent progress in materials issues for piezoelectric MEMS

Paul Muralt

2008

Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals

Paul Muralt, Florian Calame

2007

Power and radio frequency inductors using a hybrid ferrite-flex foil technology

Paul Muralt, Martinus Gijs

2007

The Impact of chemical ordering on the dielectric properties of lead scandium tantalate Pb(Sc1/2Ta1/2)O-3 thin films

Paul Muralt, Nava Setter, Alexander Tagantsev, Kyle Brinkman, Yi Wang

2007

Ferroelectric Gate on AlGaN/GaN Heterostructures

Paul Muralt, Nava Setter, Igor Stolichnov, Lisa Malin

A PZT, Pb(Zr,Ti)O-3 (40:60), ferroelectric layer has been successfully deposited onto a Al0.3Ga0.7N/GaN heterostructure with a 2DEG, two dimensional electron gas. Due to the chemical and temperature stability of AlGaN/GaN it was possible to implement the c ...

IEEE2007

Effects of film orientation on ferroelectric and piezoelectric properties of lanthanoid-substituted Bi4Ti3O12 thin films

Paul Muralt, Nava Setter

2007

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