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Paul Muralt

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Related publications (147)

Comparison of lead zirconate titanate (PZT) thin films for MEMS energy harvester with interdigitated and parallel plate electrodes

Paul Muralt, Nachiappan Chidambaram, Andrea Mazzalai

PZT thin films on insulator buffered silicon substrates with interdigitated electrodes (IDEs) have the potential to harvest more energy than parallel plate electrode (PPE) structures, because IDE structures exploit the longitudinal piezoelectric effect, wh ...

Ieee2012

Biaxial texture development in aluminum nitride layers during off-axis sputter deposition

Paul Muralt

Polycrystalline aluminum nitride (AlN) layers were deposited by pulsed-dc reactive magnetron sputtering from a variable deposition angle alpha = 0 degrees-84 degrees in 5 mTorr pure N-2 at room temperature. X-ray diffraction pole figure analyses show that ...

American Vacuum Society2012

Syngas generation from n-butane with an integrated MEMS assembly for gas processing in micro-solid oxide fuel cell systems

Thomas Maeder, Paul Muralt, Dimos Poulikakos, Bo Jiang

An integrated system of a microreformer and a carrier allowing for syngas generation from liquefied petroleum gas (LPG) for micro-SOFC application is discussed. The microreformer with an overall size of 12.7 mm × 12.7 mm × 1.9 mm is fabricated with micro-e ...

Royal Soc Chemistry2012

Resonant PZT MEMS Scanner for High-Resolution Displays

Paul Muralt, Sven Holmström, Davide Balma

A resonant piezoelectric scanner is developed for high-resolution laser-scanning displays. A novel actuation scheme combines the principle of mechanical amplification with lead zirconate titanate (PZT) thin-film actuation. Sinusoidal actuation with 24 V at ...

Institute of Electrical and Electronics Engineers2012

Experimental study of single triple-phase-boundary and platinum-yttria stabilized zirconia composite as cathodes for micro-solid oxide fuel cells

Paul Muralt, Janine Conde, Silviu Cosmin Sandu, Yan Yan

Micro-solid oxide fuel cell (mu SOFC) structures with annular Pt electrodes have been fabricated by means of silicon micromachining. The annular cathodes contained a defined triple phase boundary (TPB) length, which allowed the derivation of the ionic curr ...

2012

Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1-xN thin films

Paul Muralt, Ramin Matloub Aghdam

Piezoelectric wurtzite ScxAl1-xN (x = 0, 0.1, 0.2, 0.3) thin films were epitaxially grown by reactive magnetron co-sputtering from elemental Sc and Al targets. Al2O3(0001) wafers with TiN(111) seed and electrode layers were used as substrates. X-ray diffra ...

American Institute of Physics2012

Admittance Matrix of a Trapezoidal Piezoelectric Heterogeneous Bimorph

Paul Muralt

Bimorph structures are a standard method for transforming the high force of piezoelectric materials into a large deflection. In micro electromechanical systems (MEMS) applications, it is preferable to use structures consisting of a passive substrate (usual ...

Ieee-Inst Electrical Electronics Engineers Inc2012

Piezoelectric aluminum nitride thin films for microelectromechanical systems

Paul Muralt

This article reports on the state-of-the-art of the development of aluminum nitride (AlN) thin-film microelectromechanical systems (MEMS) with particular emphasis on acoustic devices for radio frequency (RF) signal processing. Examples of resonant devices ...

Cambridge University Press2012

Electromechanical properties of Al0.9Sc0.1N thin films evaluated at 2.5 GHz film bulk acoustic resonators

Paul Muralt, Alvaro Artieda, Silviu Cosmin Sandu, Evgeny Milyutin, Ramin Matloub Aghdam

AlN films are employed in RF filters for wireless communication. We report on enhanced coupling factors k(t)(2) obtained by partial substitution of Al by Sc. Al0.88Sc0.12N films were deposited by reactive magnetron sputtering from an Al0.9Sc0.1 alloy targe ...

AIP American Institute of Physics2011

Polarization Reversal in BiFeO3 Capacitors: Complex Behavior Revealed by PFM

Paul Muralt, Nava Setter, Alexander Tagantsev, Enrico Colla, Igor Stolichnov, Monika Iwanowska

Polarization reversal in BiFeO3 (BFO) thin films in a parallel-plate capacitor configuration has been explored using piezo-force microscopy (PFM). Through-electrode mapping of the local piezoresponse allows for direct observation of the domain growth, whic ...

2011

Tunable thin film bulk acoustic wave resonator based on BaxSr1-xTiO3 thin film

Paul Muralt, Nava Setter, Alexander Tagantsev, Andreas Nöth

A tunable membrane-type thin film bulk acoustic wave resonator (TFBAR) based on a Ba0.3Sr0.7TiO3(BST) thin film has been fabricated. The resonance and antiresonance frequencies of the device can be altered by applying a dc bias: both shift down with increa ...

2010

Annealing effects on electrical properties and defects of CaCu_{3}Ti_{4}O_{12} thin films deposited by pulsed laser deposition

Paul Muralt

A systematic study was carried out to assess property changes in CaCu3Ti4O12 thin films upon annealing in air in order to evaluate the impact of oxygen vacancies on their colossal dielectric constant behavior. Highly preferentially oriented thin-film sampl ...

2010

Sputtering of (001)AlN thin films: Control of polarity by a seed layer

Jean-François Carlin, Paul Muralt, Denis Martin, Jürgen Brugger, Nicolas Grandjean, Evgeny Milyutin, Andreea Veronica Savu, Scott Harada

The authors report on the ability to control the polarity of sputter deposited AlN001 thin ﬁlms using seed layers. Reactive sputter deposition leads to N-polarity on any substrate hitherto applied, i.e., Si111, sapphire, SiO2, and polycrystalline metals su ...

American Vacuum Society2010

Piezoelectric resonator operating in thickness shear mode

Paul Muralt, Evgeny Milyutin

An acoustic wave resonator device comprising a resonant layer that comprises a series of side-by-side areas of first and second dielectric materials. In one embodiment the first dielectric material is a piezoelectric, in particular the first dielectric mat ...

2010

Nanoporous YSZ film in electrolyte membrane of Micro-Solid Oxide Fuel Cell

Paul Muralt, Samuel Rey-Mermet, Silviu Cosmin Sandu, Yan Yan

Yttria stabilized zirconia (YSZ) with 8 mol% Y was deposited by reactive magnetron sputtering onto oxidized (100) silicon substrates. It was possible to switch film texture from (111) to (200) by applying a strong RF substrate bias. Transmission electron m ...

2010

Combinatorial Discovery and Optimization of Amorphous HfO2-Nb2O5 Mixture with Improved Transparency

Paul Muralt, Patrik Willi Hoffmann, Estelle Wagner, Giacomo Benvenuti, Silviu Cosmin Sandu, Bamdad Afra, Ali Dabirian, Yury Kuzminykh, Scott Harada

Combinatorial high vacuum chemical vapor deposition (HV-CVD) of mixed HfO2-Nb2O5 thin films has been demonstrated to yield amorphous layers at substrate temperatures where individually deposited pure HfO2 and Nb2O5 films are polycrystalline. Spectroscopic ...

Electrochemical Society2010

Highly piezoelectric AlN thin films grown on amorphous, insulating substrate

Paul Muralt, Alvaro Artieda, Silviu Cosmin Sandu

AlN thin films were grown by reactive sputtering on amorphous SiO2 thin films. Film texture, x-ray rocking curve width, mechanical stress, and the clamped piezoelectric constant d33,f were studied as a function of rf bias power and substrate roughness. A h ...

2010

Micro Solid Oxide Fuel Cell in Silicon Technology with Reinforced Electrolyte Membrane

Paul Muralt, Samuel Rey-Mermet, Yan Yan

Solid oxide electrolyte membranes of sputter deposited yttria-stablized zirconia (YSZ) were integrated in silicon technology for applications in micro power generators fuelled by hydrogen or H2+CO. An electrochemically deposited nickel grid was used as mec ...

Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa2009

Self-Assembled Perovskite-Fluorite Oblique Nanostructures for Adaptive (Tunable) Electronics

Paul Muralt, Nava Setter, Alexander Tagantsev, Silviu Cosmin Sandu, Andreas Nöth, Maxim Gureev

The relative concentration of BaTiO3 and CeO2 is shown to control the inclination of composite growth. The oblique composite structures consist of tunable BaTiO3 nanofibers embedded in a CeO2 matrix, which lowers considerably the permittivity while signifi ...

Wiley2009

Physical aspects of colossal dielectric constant material CaCu3Ti4O12 thin films

Paul Muralt

The underlying physical mechanism of the so-called colossal dielectric constant phenomenon in CaCu3Ti4O12 CCTO thin films were investigated by using semiconductor theories and methods. The semiconductivity of CCTO thin films originated from the acceptor de ...

2009

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