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Publications associées (144)

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High Piezoelectric Longitudinal Coefficients in Sol-gel PZT Thin Film Multilayers

Paul Muralt, Silviu Cosmin Sandu, Antonia Neels, Alex Dommann, Andrea Mazzalai, Nachiappan Chidambaram, Davide Balma

A five-layer stack of lead zirconate titanate (PZT) thin films with Pt electrodes was fabricated for potential applications in nanoactuator systems. The 1 mu m thick PZT films were deposited by a sol-gel technique, the platinum electrodes by sputtering. Th ...

Wiley-Blackwell2014

Transient Negative Capacitance of Silicon-doped HfO2 in MFMIS and MFIS structures: experimental insights for hysteresis-free steep slope NC FETs

Mihai Adrian Ionescu, Paul Muralt, Igor Stolichnov, Ali Saeidi, Matteo Cavalieri, Carlotta Gastaldi

In this paper, we experimentally explore the transient negative capacitance effect in ferroelectric high-k gate stacks using multi-ferroelectric domain Si-doped HfO2 with and without the metal plane, MFMIS (TiN/Si:HfO2/TiN/SiO2) and MFIS (TiN/Si:HfO2/SiO2) ...

IEEE2019

A combinatorial chemical beam vapour deposition approach to tune the electrical conductivity of Nb:TiO2 films via Si co-doping

Paul Muralt, Silviu Cosmin Sandu, Giacomo Benvenuti, Estelle Wagner, Scott Harada

Chemical beam vapour deposition (CBVD) is a thin film deposition technique operated under high vacuum conditions in which film growth occurs through the thermally activated chemical decomposition of precursor molecules at the substrate surface. This techni ...

Elsevier Science Sa2016

Bulk acoustic wave resonator operating at 8 GHz for gravimetric sensing of organic films

Paul Muralt, Samuel Rey-Mermet, Roman Lanz

The mass sensitivity of an AlN thin film resonators operated in air at 6-8 GHz has been investigated in theory and experiment. The 30 x 30 mu m wide resonators included a 180-300 nm thick, highly oriented AlN thin film, bottom and top electrode, and an aco ...

2006

Highly piezoelectric AlN thin films grown on amorphous, insulating substrate

Paul Muralt, Silviu Cosmin Sandu

AlN thin films were grown by reactive sputtering on amorphous SiO2 thin films. Film texture, x-ray rocking curve width, mechanical stress, and the clamped piezoelectric constant d33,f were studied as a function of rf bias power and substrate roughness. A h ...

2010

PMBAR* - shear mode TFBAR based on (001)AlN thin film Piezo-Modulated Bulk Acoustic wave Resonator

Paul Muralt, Evgeny Milyutin

A novel concept for shear mode Bulk Acoustic Resonators (BAR) is presented. It is based on c-axis oriented AlN thin films grown on silicon dioxide thin films, combined with interdigitated electrodes. Such a structure leads to an excitation of mainly shear ...

Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa2008

Strong improvement in the photonic stop-band edge sharpness of a lithium niobate photonic crystal slab

Paul Muralt, Scott Harada

We report on a photonic crystal (PhC) etched into a 380 nm thick lithium niobate (LN) thin film deposited on a MgO substrate by pulsed laser deposition. The transmission properties of this device were assessed by optical near-field measurements and compare ...

AIP American Institute of Physics2009

Pb(Zr,Ti)O3 thin films by in-situ reactive sputtering on micromachined membranes for micromechanical applications

Nava Setter, Paul Muralt, Thomas Maeder

For micromechanical applications, piezoelectric PbZrTO3 (PZT) thin films have been deposited on metallised Si3N4/SiO2 layers on Si wafers. Films with compositions near the morphotropic phase boundary (x=0.53) were prepared at 600°C using a multitarget, in- ...

The Institute of Materials / Maney Publishing1995

Vibration Energy Harvesting with PZT Micro Device

Paul Muralt, Florian Calame

A micro power generator harvesting vibration energy by resonant inertial oscillation of a piezoelectric laminated cantilever with proof mass was designed, fabricated, and characterized. The active part with 2 pm thick PZT on 5 mu m silicon was equipped wit ...

Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa2009

Characterization and Fatigue of the Converse Piezoelectric Effect in PZT Films for MEMS Applications

Paul Muralt, Ramin Matloub Aghdam, Andrea Mazzalai, Nachiappan Chidambaram, Davide Balma

A measurement setup for the detailed study of the transverse piezoelectric coefficient e(31,f) in the converse (actuator) mode was developed. It allows the assessment of the piezoelectric stress in thin films on silicon cantilevers and provides for a corre ...

Institute of Electrical and Electronics Engineers2015

Admittance Matrix of a Trapezoidal Piezoelectric Heterogeneous Bimorph

Paul Muralt

Bimorph structures are a standard method for transforming the high force of piezoelectric materials into a large deflection. In micro electromechanical systems (MEMS) applications, it is preferable to use structures consisting of a passive substrate (usual ...

Ieee-Inst Electrical Electronics Engineers Inc2012

Optimization of Resonant PZT MEMS Mirrors by Inverse Design and Electrode Segmentation

Paul Muralt, Ramin Matloub Aghdam

This paper presents a systematic approach to transduction optimization of resonant piezo-based MEMS devices. The method is based on inverse design approach using direct piezoelectric effect and exploits mechanical action of desired mode to calculate the po ...

Institute of Electrical and Electronics Engineers2021

Comparison of lead zirconate titanate (PZT) thin films for MEMS energy harvester with interdigitated and parallel plate electrodes

Paul Muralt, Andrea Mazzalai, Nachiappan Chidambaram

PZT thin films on insulator buffered silicon substrates with interdigitated electrodes (IDEs) have the potential to harvest more energy than parallel plate electrode (PPE) structures, because IDE structures exploit the longitudinal piezoelectric effect, wh ...

Ieee2012

Bandpass filters for 8 GHz using solidly mounted bulk acoustic wave resonators

Paul Muralt, Roman Lanz

Frequency shift, design, and fabrication issues have been investigated for the realization of 8 GHz handpass filters based on AlN thin film bulk acoustic wave resonators. Fabrication includes well-textured AlN thin films on Pt (111) electrodes and SiO2/AlN ...

2005

Thick PZT sol-gel films for pMUT transducers performances improvement

Paul Muralt, Florian Calame

Piezoelectric micromachined ultrasonic transducers comprising a 10 mu m thick Si device layer and a 14 pro thick piezoelectric PZT layer were investigated. The PZT films were deposited by a sol-gel technique. The transverse piezoelectric coefficient was me ...

2006

Gradient free sol-gel Pb(Zr-x,Ti1-x)O-3 thin films

Paul Muralt, Florian Calame

Pb(Zr-x,Ti1-x)O-3 thin films of homogeneous composition were synthesized by means of a modified sol-gel route on Pt(111)/TiOx/SiO2/Si substrates. The usually observed gradient in B-site composition could be reduced from +/- 12 to +/- 12.5 at% amplitude in ...

IEEE2007

Polarization reversal due to charge injection in ferroelectric films

Paul Muralt, Enrico Colla, Simon Bühlmann

The origin of a recently reported peculiar phenomenon-polarization reversal against the applied electric field in ferroelectric thin films [M. Aplanalp and P. Gunter, Ferroelectrics 258, 3 (2001), T. Morita and Y. Cho, Appl. Phys. Lett. 84, 257 (2004)]-has ...

2005

Biaxial texture development in aluminum nitride layers during off-axis sputter deposition

Paul Muralt

Polycrystalline aluminum nitride (AlN) layers were deposited by pulsed-dc reactive magnetron sputtering from a variable deposition angle alpha = 0 degrees-84 degrees in 5 mTorr pure N-2 at room temperature. X-ray diffraction pole figure analyses show that ...

American Vacuum Society2012

Resonant PZT MEMS Scanner for High-Resolution Displays

Paul Muralt, Davide Balma

A resonant piezoelectric scanner is developed for high-resolution laser-scanning displays. A novel actuation scheme combines the principle of mechanical amplification with lead zirconate titanate (PZT) thin-film actuation. Sinusoidal actuation with 24 V at ...

Institute of Electrical and Electronics Engineers2012

Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer

Paul Muralt, Fazel Parsapour, Vladimir Pashchenko

Acoustic delay lines based on Al0.85Sc0.15N thin film hybrid transducers were investigated by finite element modeling. It was found that an acoustic impedance matching between transducer and non-piezoelectric substrate material plays a crucial role to effi ...

Ieee2017