Publications de Paul Muralt | EPFL Graph Search

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(001)-textured AlN thin films as needed for bulk acoustic wave devices exhibit large mechanical stress variations as a function of growth substrate properties. We studied the relationship between stress and the surface morphology of a thermally oxidized si ...

An acoustic wave resonator device comprising a resonant layer that comprises a series of side-by-side areas of first and second dielectric materials. In one embodiment the first dielectric material is a piezoelectric, in particular the first dielectric mat ...

We tested a new soft-x-ray transmission spectromiscropy technique on the Aladdin storage ring at the Wisconsin Synchrotron Radiation Center. Transmitted x rays were converted with a photocathode into photoelectrons, which were subsequently electron-optically processed by an x-ray secondary electron-emission microscope producing submicron-resolution images. Test images demonstrated the excellent contrast due to the chemical differences between silicon features and a silicon nitride substrate. We also obtaine

Sputter deposited Al(1-x)ScxN thin films with a Sc content from x = 0 to 43 at% are investigated by electron microscopy in order to study and explain the formation and growth of abnormally oriented grains (AOG). It is found that the latter did not nucleate ...

Piezoelectric membranes consisting of sputter deposited PbZrXTi1-XO3 (PZT) films on silicon diaphragms have been investigated for their resonance and piezoelectrical properties, in view of their application as stator of a micromotor. The behavior of resonance frequencies was studied as a function of membrane thickness and de-bias, in order to derive the total stress in the films and the piezoelectric coupling constant (d(31)approximate to 40 pm/V). The latter was also derived from the quasi-static deflectio

Processing optimization allowed the sol-gel fabrication of 1 mum thick, phase pure perovskite thin films with identical grain size and controlled texture. This made it possible to fabricate stress compensated beams to measure the transverse piezoelectric coefficient over the whole composition range of PbZr1-xTixO3. The highest value of -12.1 C/m(2) was measured for (100)/(001) textured PZT53/47. For (111) textured films the maximum value of -8.7 C/m(2) was found to be in the tetragonal phase field at 55% Ti

Triangular (111) and square-shaped (100) Pb(Zr,Ti)O-3 single crystallites with lateral dimensions down to 50 nm and thickness of 20 nm have been grown using lithography-modulated self-assembly in an in situ sputter process. Epitaxial (111)-oriented Pt on a SrTiO3 single crystal served as the substrate. An epitaxial 2 nm thick rutile TiO2 film was grown and patterned into 100-200 nm wide attachment sites by electron beam lithography. The perovskite nucleation density was 60 times higher on TiO2 seeds than on

This paper presents a mesa-scale low-temperature co-fired ceramic (LTCC) hotplate system. Using embedded thick-film platinum heaters, the hotplate has been able to operate at about 600 degrees C in a reliable manner, while its operating temperature can be ...

The development of microreactors that operate under harsh conditions is always of great interest for many applications. Here we present a microfabrication process based on low-temperature co-fired ceramic (LTCC) technology for producing microreactors which ...

There is a need for sensors capable operating at temperatures above 1000 degrees C. We describe an innovative sensor that might achieve this goal. The sensor comprises two main elements: a thermocouple and a surface acoustic wave (SAW) strain sensor. The c ...

This article is the preface to the Special Issue of the Journal of Intelligent Material Systems and Structures on occasion of the Symposium A53 MEMS/NEMS for Sensorial and Actorial Materials' held at the Euromat 2011 Conference, Montpellier, France, Septem ...

Scandium doped aluminium nitride (ScAlN) gained much attention during last years, since its piezoelectric response is much enlarged as compared to pure AlN films. Above 30% Sc the films are of high interest for piezoMEMS sensing and actuation, ultrasound g ...

A high-resolution negative Calixarene resist has been used to pattern 2-nm-thick Ti O2 films on 50-nm-thick Pt layers by electron beam lithography, in order to carry out site controlled growth of Pb (Zr,Ti) O3 structures. Single dot structures have been wr ...

This work introduces and investigates the a novel compact catalytic nanoparticle bed micro-fabricated reactor suitable for utilization in small-scale intermediate-temperature micro-SOFC systems. It is shown that the presented micro-reactor is able to produ ...

The authors report on the ability to control the polarity of sputter deposited AlN001 thin ﬁlms using seed layers. Reactive sputter deposition leads to N-polarity on any substrate hitherto applied, i.e., Si111, sapphire, SiO2, and polycrystalline metals su ...

This paper reviews deposition, integration. and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems. As examples, a piezoelectric ultrasonic micromotor and pyroelectric infrared detector array are presented. A summary of the published data on the piezoelectric properties of PZT thin films is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin f

(100)-oriented stoichiometric LSCO films were deposited on Pt/TiO2/SiO2/Si, TiO2/Pt/TiO2/SiO2/Si and Si substrates with rf magnetron sputtering using a single self fabricated oxide target. Best conductive LSCO film was obtained at 600 degrees C, yielding a specific resistivity of 90 mu Ohm cm. The PZT film deposited on the LSCO(100) electrode oriented to (100) or (001). Maximum value of d(33) coefficientwas 73.5 pm/V.

Since the discovery of a high piezoelectric response in AlScN by Akiyama and coworkers in 2009, a number of works of other groups confirmed the large increase of piezoelectricity when partially substituting Al cations by Sc cations, as long as the alloy gr ...

BaxSr1-xTiO3 (BST) and its composite films have been studied for the improvement of the tunable performances via nano-structual control. The strong correlation between strain and tunability similar to that between strain and permittivity was confirmed in t ...

Paul Muralt

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Effect of substrate roughness on c-oriented AlN thin films

Piezoelectric resonator operating in thickness shear mode

An electron imaging approach to soft-x-ray transmission spectromicroscopy

Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces

Characterization of PZT thin films for micromotors

Processing optimization of solution derived PbZr1-xTixO3 thin films for piezoelectric applications

Lithography-modulated self-assembly of small ferroelectric Pb(Zr,Ti)O-3 single crystals

Meso-scale ceramic hotplates - A playground for high temperature microsystems

Fine structuration of low-temperature co-fired ceramic (LTCC) microreactors

A concept of wireless and passive very-high temperature sensor

Process optimization for the sputter deposition of molybdenum thin films as electrode for AlN thin films

When nothing is constant but change: Adaptive and sensorial materials and their impact on product design

Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level

Electron beam lithography with negative Calixarene resists on dense materials: Taking advantage of proximity effects of increase pattern density

A nanoparticle bed micro-reactor with high syngas yield for moderate temperature micro-scale SOFC power plants

Sputtering of (001)AlN thin films: Control of polarity by a seed layer

Ferroelectric thin films for micro-sensors and actuators: a review

Preparation of La1-xSrxCoO3 electrodes for ferroelectric thin films by RF magnetron sputtering

Piezoelectric Coefficients of AlScN Thin Films in Comparison

Tunable ferroelectric thin films with enhanced responses through nano- structural control