Publications de Paul Muralt | EPFL Graph Search

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Aluminium scandium nitride (Al1-xScxN) with its strongly enhanced piezoelectric response is the upcoming piezoelectric material of choice in next generation RF filters, sensors, actuators and energy harvesting devices. This paper will concentrate on the de ...

Piezoelectric thin films have existing and promising new applications in microwave filter technologies. The final performance depends on many parameters, and very specifically on the materials properties of each involved material. In this article, material ...

Pyroelectric thin-film point detectors and 1 x 12 arrays have been fabricated and characterized. They consist of sol-gel-deposited PZT thin-film elements on micromachined Si3N4/SiO2 membranes. The measured current and voltage response as a function of modulation frequency of a 1 x 12 array element is compared with finite-element calculations. Voltage responsivities of almost 3000 V W-1 in vacuum and 800 V W-1 in air have been achieved for 0.4 mm x 0.9 mm elements. Some point detectors have been completely p

We fabricated and characterized a micromotor driven by a piezoelectric PZT (PbZrxTi1-xO3) thin films. Sputter and sol-gel techniques have been applied for the deposition of the PZT films onto a silicon stator membrane, which was 20 to 30 µm thick and had a diameter of 4 mm. The amplitudes of the membrane deflections are as large as 800 nm/V at the first resonance (26 kHz), and 60 nm/V at 1 Hz. The operation of the motor was obtained at 1 to 3 Vrms, with speeds of up to 200 rpm at 1.1 Vrms and torques of 35

Lamb wave microresonators with wavelengths ...

Dual mode bulk acoustic wave resonators were fabricated using tilted c-axis oriented grains. In this case, longitudinal and shear modes are excited at the same time. The stiffness matrix for the tilted geometry was derived, and served to determine c(33) an ...

The texture of sputter deposited PbTiO3 films could be turned from (100)- to (111)-orientation by adding a few nm thick TiO2 layer onto the textured Pt(111) substrate film. AES, XPS, and XPD measurements showed that such TiO2 films were epitaxially ordered and covered the whole surface of Pt. Various deposition experiments indicated that the TiO2 is effective only when it is ordered before the PbTiO3 nucleation starts. Otherwise, the (100) self texture dominates.

Pyroelectric PbTiO3 thin films devices with two temperature compensating elements on a SiO2/Si3N4 membranes have been fabricated and characterized. The measured voltage responsivity as a function of radiation modulation frequency has been compared to finite element model calculation. The relevant film properties have been compared for sputter and a sol-gel deposition techniques. The calculated responsivity amounts to 30 V/W. The measured pyroelectric signal is a few mu V.

A piezoelectric elastic fin micromotor based on a PbZr0.53Ti0.47O3 thin film driving a micromachined silicon membrane was fabricated and studied. The stator was characterized by interferometry, and a laser set-up was used to measure the angular velocity and acceleration of the motor. The torque, the output power, and the efficiency of the device were extracted from these measurements. Values up to 1020 rpm and 0.94 mu Nm were observed for the velocity and the torque, respectively, which would be sufficient

Unexpectedly high-longitudinal piezoelectric coefficients have recently been reported in c-axis oriented Pb(Zr,Ti)O-3 thin films with morphotropic phase boundary composition [Fu , Appl. Phys. Lett. 80, 3572 (2002)]. Our analysis and experimental results show that, in comparison with other methods commonly used to investigate piezoelectric response of thin films, the charge integration technique used by Fu may lead to an order of magnitude higher apparent piezoelectric coefficients if the substrate on which

Pyroelectric sensor has each pixel's secondary electrode made with no contact with other secondary electrodes. The pyroelectric sensor consists of a series of pixels (12A) with primary (14) and secondary (28) electrodes on opposite surfaces of a thin porou ...

A review is given on the current state of the art in piezoelectric micromachined ultrasonic transducers (pMUT). It is attempted to quantify the limits of pMUT's with respect to the electromechanical coupling, and to relate current achievements. Main needs for future research are identified in design, micromachining and further improvements of PZT films. Applications are shortly reviewed.

In a fuel cell system component, the fuel cell system component comprises a glass ceramic composite. ...

Effective transverse piezoelectric coefficient e(31,f) has been measured on (100)/(001) sol-gel Pb(ZrXTi1-X) thin films with compositions between 30% and 45% Zr. A maximum value of 8.07 +/- 0.36 C/m(2) at 40% Zr is found. The influence of the poling field ranging from 50 kV/cm to 250 kV/cm has been evaluated.

Aluminium scandium nitride (ASN) exhibits a largely enhanced piezoelectric response as compared to aluminium nitride (AlN), which makes it an upcoming piezoelectric material for use in next generation RF filters, sensors, actuators and energy harvesting de ...

Paul Muralt

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Sputter Deposition Technology For Al((1-X))Sc(X)N Films With High Sc Concentration

Piezoelectric materials parameters for piezoelectric thin films in GHz applications

Pyroelectric thin-film sensor array

Micromachined PZT thin film actuators for micromotors

Free standing and solidly mounted Lamb wave resonators based on Al0.85Sc0.15N thin film

Material Constants Extraction For Alscn Thin Films Using A Dual Mode Baw Resonator

In-situ sputter deposition of PbTiO3 thin films: nucleation on textured platinum films

Processing and properties of thin film pyroelectric devices

PZT thin film actuated elastic fin micromotor

Chemical nature of colossal dielectric constant of CaCu3Ti4O12 thin film by pulsed laser deposition

Piezoelectric response of thin films determined by charge integration technique: Substrate bending effects

Epitaxial growth of Ba0.3Sr0.7TiO3 thin films on Al2O3(0001) using ultrathin TiN layer as a sacrificial template

Capteur pyroelectrique ayant entre ses pixels un couplage thermique parasite reduit

Transmission-electron-microscopy study of quasi-epitaxial tungsten-bronze (Sr2.5Ba2.5Nb10O30) thin film on perovskite (SrTO3) single crystal

Micromachined ultrasonic transducers and acoustic sensors based on piezoelectric thin films

Fuel cell system for portable applications

Piezoelectric thin films for MEMS

Effective transverse piezoelectric coefficient e(31,f) of (100)/(001) textured PZT thin films

Texture control and seeded nucleation of nanosize structures of ferroelectric thin films

Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: influence of intrinsic stress and sputtering parameters