Luis Guillermo Villanueva Torrijo

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The standard lithographic techniques to fabricate electronic components involve the use of polymers, baking steps and chemicals. This typically restricts their application to flat substrates made up of standard materials. Stencil lithography has been propo ...

Aluminum and gold nanowires were fabricated using 100 mm stencil wafers containing nanoslits fabricated with a focused ion beam. The stencils were aligned and the nanowires deposited on a substrate with predefined electrical pads. The morphology and resist ...

Improving the quality factor (Q) of electromechanical resonators is of paramount importance for different applications, ranging from RF filtering to sensing. In this paper, we present a modified fabrication process flow for contour mode resonators to simul ...

Experiments on micro- and nano-mechanical systems (M/NEMS) have shown that their behavior under bending loads departs in many cases from the classical predictions using Euler-Bernoulli theory and Hooke's law. This anomalous response has usually been seen a ...

A suspended 400nm thin mono-crystalline ZY cut Lithium Niobate (LN) membrane with narrow interdigital electrodes (IDEs) on top having a pitch of the order of few microns excites standing shear bulk acoustic wave resonance (XBAR) within the membrane through ...

This work presents the fabrication of a MEMS resonant device which addresses the need for high quality and miniaturized RF filters in the 3-6 GHz range for 5th generation (5G) mobile networks. The 4-mask fabrication process is based on the definition of in ...

Acceleration measurements are fundamental in applications such as consumer electronics, navigation, automotive safety and Internet of things (IoT). In comparison with capacitive or piezoresistive MEMS accelerometers, resonant graphene accelerometers have t ...

Nonlinear optics is the precursor for many of the modern-day applications of photonics, including femtosecond pulse synthesis, precision spectroscopy, and metrology. In the last decade, nanophotonic waveguides have not only boosted the efficiencies of nonl ...

We report on an 18 GHz repetition-rate electro-optic frequency comb centered at 390 nm via on-chip cascaded harmonic generation covering more than 2000 lines across 40 THz of optical bandwidth. ...

Resistless ion implantation of sub-micron scale features through nano-stencil ...

Luis Guillermo Villanueva Torrijo

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All-stencil transistor fabrication on 3D silicon substrates

Metallic Nanowires by Full Wafer Stencil Lithography

Engineered acoustic mismatch for anchor loss control in contour mode resonators

Optical detection of radio waves through a nanomechanical transducer

Modelling the Size Effects on the Mechanical Properties of Micro/Nano Structures

Analysis of XBAR resonance and higher order spurious modes

Analysis and Applications of Nanostructures Created by Stencil Lithography

Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters

Proof Of Concept Of A Graphene-Based Resonant Accelerometer

Fabrication of Metallic Nanodots by Stencil Lithography for Localized Surface Plasmon Resonance Biosensing

Fabrication of periodically poled lithium niobate waveguides for broadband nonlinear photonics

Single-layer graphene on silicon nitride micromembrane resonators

Metallic Nanodot Arrays Fabricated by Stencil Lithography on SiO2 and Polymer Substrates

18 GHz Frequency Comb in the UV via On-Chip Cascaded Harmonics

Flexible Membranes Improve Resolution in Stencil Lithography

Resistless ion implantation of sub-micron scale features through nano-stencil

Very Large Scale Arrays of Chemo-Mechanical Nano-Switches for Ultralow Power Hydrogen Sensing

Minimized Blurring in Stencil Lithography using a Compliant Membrane

Stencil Lithography: Quick and Clean

Phase Synchronization of Two Anharmonic Nanomechanical Oscillators