Publication

Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli, Annalisa De Pastina, Muhammad Faizan
2019
Conference Papers

Abstract

This work presents the fabrication of a MEMS resonant device which addresses the need for high quality and miniaturized RF filters in the 3-6 GHz range for 5th generation (5G) mobile networks. The 4-mask fabrication process is based on the definition of interdigitated Aluminum (Al) electrodes on a suspended membrane of 400 nm-thick Z-cut lithium niobate (LiNbO3). Devices are fabricated with a yield of 70% and exhibit high electromechanical coupling (k(t)(2)) and quality factor (Q) up to 28% and 300, respectively, for frequencies around 5 GHz.

Official source

https://infoscience.epfl.ch/entities/publication/ee6418f7-9c75-466b-ad1d-66dd66e3f25d

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Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters

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