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Luis Guillermo Villanueva Torrijo

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Publications associées (132)

Reliable and Improved Nanoscale Stencil Lithography by Membrane Stabilization, Blurring and Clogging Corrections

Jürgen Brugger, Oscar Vazquez Mena, Katrin Sidler Arnet, Andreea Veronica Savu, Luis Guillermo Villanueva Torrijo

The reliable and reproducible fabrication of nanostructures by stencil lithography faces three main challenges: the stability of the thin stencil membranes with nanoapertures, the blurring of the deposited structures, and the clogging of the nanoapertures ...

2011

Metallic Nanodot Arrays by Stencil Lithography for Plasmonic Biosensing Applications

Jürgen Brugger, Oscar Vazquez Mena, Luis Guillermo Villanueva Torrijo

The fabrication of gold nanodots by stencil lithography and its application for optical biosensing based on localized surface plasmon resonance are presented. Arrays of 50−200 nm wide nanodots with different spacing of 50−300 nm are fabricated without any ...

American Chemical Society2011

Flexible Membranes Improve Resolution in Stencil Lithography

Jürgen Brugger, Oscar Vazquez Mena, Katrin Sidler Arnet, Andreea Veronica Savu, Luis Guillermo Villanueva Torrijo

2010

Metallic Nanodot Arrays Fabricated by Stencil Lithography on SiO2 and Polymer Substrates

Jürgen Brugger, Oscar Vazquez Mena, Katrin Sidler Arnet, Andreea Veronica Savu, Luis Guillermo Villanueva Torrijo

2010

Stenciled conducting bismuth nanowires

Jürgen Brugger, Sam Neuser, Oscar Vazquez Mena, Katrin Sidler Arnet, Andreea Veronica Savu, Luis Guillermo Villanueva Torrijo

Stencil lithography is used here for the fabrication of bismuth nanowires using thermal evaporation. This technique provides good electrical contact resistance by having the nanowire structure and the contact pads deposited at the same time. It has also th ...

2010

Large arrays of chemo-mechanical nanoswitches for ultralow-power hydrogen sensing

Jürgen Brugger, Thomas Kiefer, Luis Guillermo Villanueva Torrijo, Arnaud Salette

A hydrogen sensor based on large arrays of nanoswitches in palladium (Pd) is presented. An individual nanoswitch is realized by a suspended Pd/Ti/poly-Si trimorph electrode and a fixed Pd/Ti bottom electrode, which are separated by a vertical nanoscopic ga ...

Institute of Physics2010

Very Large Scale Arrays of Chemo-Mechanical Nano-Switches for Ultralow Power Hydrogen Sensing

Jürgen Brugger, Thomas Kiefer, Luis Guillermo Villanueva Torrijo, Arnaud Salette

2010

Pd-functionalized MEMS resonator for hydrogen gas sensing at ambient pressure

Jürgen Brugger, Thomas Kiefer, Luis Guillermo Villanueva Torrijo, Jonas Gustav Henriksson

This work presents the fabrication and characterization of a novel hydrogen-detecting micro-resonator based on the expansion of palladium (Pd) as it is exposed to hydrogen (H2) gas. The working principle of the device has been confirmed and it shows a stro ...

2010

The transition in hydrogen sensing behavior in non-continuous palladium films

Jürgen Brugger, Thomas Kiefer, Luis Guillermo Villanueva Torrijo

The morphological transition in ultrathin palladium (Pd) films around the percolation threshold and the related transition in hydrogen sensing behavior is investigated.We find that besides the transition from continuous to discontinuous Pd, an intermediate ...

American Institute of Physics2010

Fabrication of Metallic Nanodots by Stencil Lithography for Localized Surface Plasmon Resonance Biosensing

Jürgen Brugger, Oscar Vazquez Mena, Luis Guillermo Villanueva Torrijo

2010

Fast and robust hydrogen sensors based on discontinuous palladium films on polyimide, fabricated on a wafer scale

Jürgen Brugger, Thomas Kiefer, Luis Guillermo Villanueva Torrijo

Fast hydrogen sensors based on discontinuous palladium (Pd) ﬁlms on supporting polyimide layers, fabricated by a cost-efﬁcient and full-wafer compatible process, are presented. The ﬁlms, deposited by electron-beam evaporation with a nominal thickness of 1. ...

Institute of Physics2010

Microcollimator for Micrometer-Wide Stripe Irradiation of Cells Using 20–30 keV X Rays

Jürgen Brugger, Kristopher Pataky, Luis Guillermo Villanueva Torrijo

The exposure of subnuclear compartments of cells to ionizing radiation is currently not trivial. We describe here a collimator for micrometer-wide stripe irradiation designed to work with conventional high-voltage X-ray tubes and cells cultured on standard ...

2009

Direct Etching of High Aspect structures through a Stencil

Cyrille Hibert, Jürgen Brugger, Oscar Vazquez Mena, Luis Guillermo Villanueva Torrijo

2009

Analysis and Applications of Nanostructures Created by Stencil Lithography

Jürgen Brugger, Oscar Vazquez Mena, Luis Guillermo Villanueva Torrijo

2009

Stress and aging minimization in photoplastic AFM probes

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Cristina Martin Olmos

Photostructurable epoxy based resists, like SU-8, are soft materials with a Young’s Modulus around 4 GPa, which makes them particularly suitable as base material to fabricate Atomic Force Microscopy (AFM) probes for non-destructive analysis of fragile samp ...

Elsevier2009

Analysis of the blurring in stencil lithography

Philippe Langlet, Jürgen Brugger, Oscar Vazquez Mena, Katrin Sidler Arnet, Andreea Veronica Savu, Luis Guillermo Villanueva Torrijo

A quantitative analysis of the blurring and its dependence on the stencil-substrate gap and the deposition parameters in stencil lithography, a high resolution shadow mask technique, is presented. The blurring is manifested in two ways: first, the structur ...

2009

Minimized Blurring in Stencil Lithography using a Compliant Membrane

Jürgen Brugger, Oscar Vazquez Mena, Katrin Sidler Arnet, Luis Guillermo Villanueva Torrijo

2009

Stencilled Conducting Bismuth Nanowires

Jürgen Brugger, Sam Neuser, Oscar Vazquez Mena, Katrin Sidler Arnet, Andreea Veronica Savu, Luis Guillermo Villanueva Torrijo

2009

Mechanically tuneable microoptical structure based on PDMS

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Victor Javier Cadarso Busto

A PDMS based tuneable microoptical system fabricated merging deep reactive ion etching, SU-8 and soft lithography, with a low-cost (mass-production), simple and highly repetitive technology, is presented. This system consists on a structure of two microlen ...

2009

Direct fabrication of NIL stamps using Stencil Lithography

Jürgen Brugger, Oscar Vazquez Mena, Thomas Kiefer, Luis Guillermo Villanueva Torrijo

Stencil Lithography has been used for the rapid and low cost fabrication of high resolution NIL stamps. The stamps are fabricated by Al deposition through a nanoscale shadow mask and subsequent Si etching. Features down to 50 nm in the stamps have been ach ...

2008

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