Publication

Analysis of XBAR resonance and higher order spurious modes

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli
2019
Conference Papers

Abstract

A suspended 400nm thin mono-crystalline ZY cut Lithium Niobate (LN) membrane with narrow interdigital electrodes (IDEs) on top having a pitch of the order of few microns excites standing shear bulk acoustic wave resonance (XBAR) within the membrane through lateral field excitation. Recently the first XBAR was simulated and demonstrated experimentally with a resonance frequency of 4800MHz having high electromechanical coupling of about 25% and loaded quality factor at resonance close to 500.

Official source

https://infoscience.epfl.ch/entities/publication/d732fc5e-cdc7-432b-b4ed-b6562e865187

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Analysis of XBAR resonance and higher order spurious modes

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