Michail Zervas

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Related publications (30)

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Die-Level TSV Fabrication Platform for CMOS-MEMS Integration

Yusuf Leblebici, Carlotta Guiducci, Michail Zervas, Yüksel Temiz

This paper reports a new post-CMOS processing platform for die-level through-silicon-via (TSV) fabrication, based on wafer reconstitution from embedded dies, parylene deposition, stencil lithography, and bottom-up electroplating. The goal of this work is t ...

2011

Applications of Multi-Terminal Memristive Devices: A Review

Giovanni De Micheli, Yusuf Leblebici, Sandro Carrara, Davide Sacchetto, Michail Zervas, Pierre-Emmanuel Julien Marc Gaillardon

Memristive devices have the potential for a complete renewal of the electron devices landscape, including memory, logic and sensing applications. This is especially true when considering that the memristive functionality is not limited to two-terminal devi ...

Ieee-Inst Electrical Electronics Engineers Inc2013

Raman Self-Frequency Shift of Dissipative Kerr Solitons in an Optical Microresonator

Tobias Kippenberg, Maxim Karpov, Martin Hubert Peter Pfeiffer, Hairun Guo, Arne Kordts, Victor Brasch, Michail Zervas, Michael Wolfgang Geiselmann

We experimentally observed the Raman-induced self-frequency shift of high-intensity dissipative Kerr solitons in high-Q silicon nitride microresonators. The Raman redshift is linearly dependent on the pump-frequency-detuning, associated with the tunability ...

Ieee2016

Top-down fabrication of very-high density vertically stacked silicon nanowire arrays with low temperature budget

Giovanni De Micheli, Yusuf Leblebici, Davide Sacchetto, Michail Zervas

We report on a top-down complementary metal oxide semiconductor (CMOS) compatible fabrication method of ultra-high density Si nanowire (SiNW) arrays using a time multiplexed alternating process (TMAP) with low temperature budget. The flexibility of the fab ...

Elsevier2011

Vertically-Stacked Si Nanowire FETs with sub-micrometer Gate-All-Around polysilicon gates patterned by nanostencil lithography

Giovanni De Micheli, Yusuf Leblebici, Jürgen Brugger, Andreea Veronica Savu, Davide Sacchetto, Michail Zervas, Shenqi Xie

2011

A chip-based silicon nitride platform for mid-infrared nonlinear photonics

Tobias Kippenberg, Camille Sophie Brès, Martin Hubert Peter Pfeiffer, Hairun Guo, Davide Grassani, Michail Zervas, Adrien Billat

We developed a chip-based silicon nitride platform with thick waveguides (> 2 mm) that overcomes the usual fabrication limitation. We demonstrate both microresonator frequency comb generation at 2:5 mm and supercontinuum generation extending beyond 4:0 mm ...

OSA Publishing2017

Generation of an optical frequency comb in the green with silicon nitride microresonators

Tobias Kippenberg, Martin Hubert Peter Pfeiffer, Hairun Guo, Michail Zervas, Nicolas Volet

The first realization of a green-light frequency comb is reported in a silicon nitride ring microresonator, from third-order non-linear interaction of a near-infrared 1-THz spacing Kerr comb spanning 2/3 of an octave. ...

Ieee2016

Integrated Photonic Interposers for Processing Octave-Spanning Microresonator Frequency Combs

Davide Sacchetto, Michail Zervas, Michael Wolfgang Geiselmann

We demonstrate multiple silicon-nitride nanophotonic elements for on-chip processing of octave-spanning microresonator frequency combs. Dichroic filters, multimode interferometers, and tunable add-drop microring filters are shown along with soliton microco ...

IEEE2020

A chip-based silicon nitride platform for mid-infrared nonlinear photonics

Tobias Kippenberg, Camille Sophie Brès, Martin Hubert Peter Pfeiffer, Hairun Guo, Davide Grassani, Michail Zervas, Adrien Billat

2017

Heterogeneous integration of lithium niobate and silicon nitride waveguides for wafer-scale photonic integrated circuits on silicon

Tobias Kippenberg, Martin Hubert Peter Pfeiffer, Michail Zervas, Nicolas Volet

An ideal photonic integrated circuit for nonlinear photonic applications requires high optical nonlinearities and low loss. This work demonstrates a heterogeneous platform by bonding lithium niobate (LN) thin films onto a silicon nitride (Si3N4) waveguide ...

Optical Society of America2017