Publications de Michail Zervas

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This paper reports a new post-CMOS processing platform for die-level through-silicon-via (TSV) fabrication, based on wafer reconstitution from embedded dies, parylene deposition, stencil lithography, and bottom-up electroplating. The goal of this work is t ...

Memristive devices have the potential for a complete renewal of the electron devices landscape, including memory, logic and sensing applications. This is especially true when considering that the memristive functionality is not limited to two-terminal devi ...

We experimentally observed the Raman-induced self-frequency shift of high-intensity dissipative Kerr solitons in high-Q silicon nitride microresonators. The Raman redshift is linearly dependent on the pump-frequency-detuning, associated with the tunability ...

We report on a top-down complementary metal oxide semiconductor (CMOS) compatible fabrication method of ultra-high density Si nanowire (SiNW) arrays using a time multiplexed alternating process (TMAP) with low temperature budget. The flexibility of the fab ...

We developed a chip-based silicon nitride platform with thick waveguides (> 2 mm) that overcomes the usual fabrication limitation. We demonstrate both microresonator frequency comb generation at 2:5 mm and supercontinuum generation extending beyond 4:0 mm ...

The first realization of a green-light frequency comb is reported in a silicon nitride ring microresonator, from third-order non-linear interaction of a near-infrared 1-THz spacing Kerr comb spanning 2/3 of an octave. ...

We demonstrate multiple silicon-nitride nanophotonic elements for on-chip processing of octave-spanning microresonator frequency combs. Dichroic filters, multimode interferometers, and tunable add-drop microring filters are shown along with soliton microco ...

Michail Zervas

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Die-Level TSV Fabrication Platform for CMOS-MEMS Integration

Applications of Multi-Terminal Memristive Devices: A Review

Raman Self-Frequency Shift of Dissipative Kerr Solitons in an Optical Microresonator

Top-down fabrication of very-high density vertically stacked silicon nanowire arrays with low temperature budget

Vertically-Stacked Si Nanowire FETs with sub-micrometer Gate-All-Around polysilicon gates patterned by nanostencil lithography

A chip-based silicon nitride platform for mid-infrared nonlinear photonics

Generation of an optical frequency comb in the green with silicon nitride microresonators

Integrated Photonic Interposers for Processing Octave-Spanning Microresonator Frequency Combs

A chip-based silicon nitride platform for mid-infrared nonlinear photonics