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Teaching & PhD PhD Students Camilla Minzoni Past EPFL PhD Students as codirector Vinzenz Friedli, Laurent Bernau, Luisa Berger Courses Nanofabrication with focused electron and ion beams MSE-619 Nanofabrication with focused charged particle beams (SEM, FIB) and their applications such as lithography, gas assisted deposition / etching, and milling are discussed and the limitations of these processes are developed based on the acquired understanding of the interactions.
Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.
Ivo Utke, Johann Michler, Xavier Maeder
Theo Lasser, Benjamin Dwir, Patrik Willi Hoffmann, Marcel Leutenegger, Ivo Utke, Alexandre Perentes
Patrik Willi Hoffmann, Ivo Utke