Publications by Ivo Utke | EPFL Graph Search

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We report on the fabrication of two-dimensional arrays of nano-optical apertures in gold layers by electron beam lithography (EBL) on a transparent glass substrate. 30 x 30 μ m(2) large arrays of high aspect ratio sub-wavelength cylinders (400 nm diameter ...

In this paper we describe the fabrication of a two-dimensional photonic band gap structure by focused electron beam induced deposition. Structure geometry is computed in order to create a light-trapping effect at 632 nm wavelength. Deposits produced using tetraethyl orthosilicate (SiO4C8H20) as precursor were studied to determine their chemical composition and geometrical dimensions. The deposited material has a refractive index ~n ¼ 1:85 þ i3:9 � 10�4 at 632 nm. Transmission electron microscopy revealed

Codeposition of hydrocarbons is a severe problem during focused electron beam writing of pure metal nanostructures. When using organometallic precursors, a low metal content carbonaceous matrix embedding and separating numerous nanosized metal clusters is formed. In this work, we present a new and easy approach to obtain high purity gold lines: the use of inorganic PF3AuCl as a precursor. Electrical resistivities as low as 22 µOhms cm at 295 K (ten times the bulk Au value) were obtained. This is to our know

The spatial evolution of compositions and sub-structures inside focused-electron-beam-deposited tips from dicobalt-octacarbonyl Co2(CO)8 precursor at 25 keV and varying beam current (20 pA - 3 A) is extensively studied for the first time by means of energy ...

Ivo Utke

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Fabrication of arrays of sub-wavelength nano-apertures in an optically thick gold layer on glass slides for optical studies

Focused electron beam induced deposition of a periodic transparent nano-optic pattern

Focused electron beam induced deposition of gold

Cross section investigations of compositions and sub-structures of tips obtained by focused electron beam induced deposition

Polarisation stabilisation of vertical cavity surface emitting lasers by minimally invasive focused electron beam triggered chemistry

Electron beam induced deposition of metallic tips and wires for microelectronics applications

Focused electron beam induced deposition of high resolution magnetic scanning probe tips

Thermal effects during focused electron beam induced deposition of nanocomposite magnetic-cobalt-containing tips

Direct Evidence for Quantum Contact Resistance Effects in V-Groove Quantum Wires

Electron beam induced deposition of rhodium from the precursor [RhCl(PF3)2]2: morphology, structure and chemical composition

Focused-electron-beam-induced deposition of freestanding three-dimensional nanostructures of pure coalesced copper crystals

Electron-Beam Lithography of V-groove Quantum Wire Devices

Vertical Cavity Surface Emitting Lasers Incorporating Structured Mirrors Patterned by Electron Beam Lithography

Focused electron beam induced deposition of gold and rhodium