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MSE-619: Nanofabrication with focused electron and ion beams

Summary

Nanofabrication with focused charged particle beams (SEM, FIB) and their applications such as lithography, gas assisted deposition / etching, and milling are discussed and the limitations of these processes are developed based on the acquired understanding of the interactions.

Lectures

Instructor

Ivo Utke

Official source

https://edu.epfl.ch/coursebook/en/nanofabrication-with-focused-electron-and-ion-beams-MSE-619

Moodle Page

http://go.epfl.ch/MSE-619

About this result

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Summary

Lectures

Instructor

Ivo Utke

Official source

https://edu.epfl.ch/coursebook/en/nanofabrication-with-focused-electron-and-ion-beams-MSE-619

Moodle Page

http://go.epfl.ch/MSE-619

About this result

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