Publication

Focused electron beam induced deposition of a periodic transparent nano-optic pattern

Patrik Willi Hoffmann, Marcel Leutenegger, Ivo Utke, Adrian Bachmann, Alexandre Perentes
2004
Journal Articles

Abstract

In this paper we describe the fabrication of a two-dimensional photonic band gap structure by focused electron beam induced deposition. Structure geometry is computed in order to create a light-trapping effect at 632 nm wavelength. Deposits produced using tetraethyl orthosilicate (SiO4C8H20) as precursor were studied to determine their chemical composition and geometrical dimensions. The deposited material has a refractive index ~n ¼ 1:85 þ i3:9 � 10�4 at 632 nm. Transmission electron microscopy revealed deposits obtained at low currents (100 pA) are amorphous. The structure was deposited on a quartz prism, coated with a transparent conducting antimony-doped tin oxide layer to minimize electron beam drifts and distortions. Multiple beam re-alignments during the deposition assured drift com- pensation. Optical characterisation of the photonic band gap effect is currently under investigation.

Official source

https://infoscience.epfl.ch/entities/publication/3ee96651-bb20-46c2-b996-8a30ea278215

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Patrik Willi Hoffmann, Marcel Leutenegger, Ivo Utke, Adrian Bachmann, Alexandre Perentes
2004
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/3ee96651-bb20-46c2-b996-8a30ea278215

About this result

Related concepts (32)

Photonic crystal

A photonic crystal is an optical nanostructure in which the refractive index changes periodically. This affects the propagation of light in the same way that the structure of natural crystals gives rise to X-ray diffraction and that the atomic lattices (crystal structure) of semiconductors affect their conductivity of electrons. Photonic crystals occur in nature in the form of structural coloration and animal reflectors, and, as artificially produced, promise to be useful in a range of applications.

Transmission electron microscopy

Transmission electron microscopy (TEM) is a microscopy technique in which a beam of electrons is transmitted through a specimen to form an image. The specimen is most often an ultrathin section less than 100 nm thick or a suspension on a grid. An image is formed from the interaction of the electrons with the sample as the beam is transmitted through the specimen. The image is then magnified and focused onto an imaging device, such as a fluorescent screen, a layer of photographic film, or a sensor such as a scintillator attached to a charge-coupled device.

Band gap

In solid-state physics and solid-state chemistry, a band gap, also called a bandgap or energy gap, is an energy range in a solid where no electronic states exist. In graphs of the electronic band structure of solids, the band gap refers to the energy difference (often expressed in electronvolts) between the top of the valence band and the bottom of the conduction band in insulators and semiconductors. It is the energy required to promote an electron from the valence band to the conduction band.