Explores beam-matter interactions, focusing on emission phenomena from core electron ionization by X-Rays and electrons, and the competition between Auger and X-Rays emissions.
Covers X-Ray Micro-Analysis (XRMA) comparing techniques for analyzing matter with electron beams, discussing interaction volume, emission, fluorescence, and matrix effects.
Explores surface analysis methods using electrons, ions, atoms, and photons, emphasizing the importance of ToF-SIMS for in-depth surface analysis in various fields.
Explores the principles and applications of scanning electron microscopy in micro and nanofabrication, covering electron signals, charging issues, and dimensional measurements.
Covers Energy Dispersive X-ray Microanalysis, explaining how X-rays reveal elemental composition and discussing X-ray generation, detection, efficiency, and quantification.