Explores sheath formation, plasma etching, ion velocity, and energy in industrial plasmas, emphasizing their significance for modern electronics manufacturing.
Covers the introduction to Micro-Electro-Mechanical Systems (MEMS), including operating principles, elements, scaling laws, silicon choice, sensors, and actuators.
Explores the forces, tips, and probes used in Scanning Probe Microscopy, focusing on AFM principles, tip resolution limits, and cantilever probe fabrication.