Lecture

Micromachining Technology: Safety Concepts and Applications

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In course

MICRO-431: Materials and technology of microfabrication

The student will learn procedures and applications of modern microfabrication technologies, as practiced in a clean room environment, in particular modern techniques that go beyond the classical steps of deposition, lithography and etching, with a focus on ...

Description

This lecture covers the micromachining technology used in advanced weapon systems, focusing on the safety concept involving positionable mirrors and target electronics. It delves into the fabrication of mirrors, control engines, and anti-reverse mechanisms, along with the application of dual-mirror-redirect safety concepts. The presentation also discusses the history and vision of Sandia National Laboratories in developing MEMS technology. Various technologies like 2-layer, 3-layer, and 4-layer structures are explained, emphasizing stress control in PolySi layers. The lecture concludes with a detailed explanation of the fabrication process, including post-annealing techniques and the use of sacrificial layers for stress control.

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Instructors (2)

Thomas Lehnert

Martinus Adela Maria Gijs

Martin A.M. Gijs received his degree in physics in 1981 from the Katholieke Universiteit Leuven, Belgium and his Ph.D. degree in physics at the same university in 1986. He joined the Philips Research Laboratories in Eindhoven, The Netherlands, in 1987. Subsequently, he has worked there on micro-and nano-fabrication processes of high critical temperature superconducting Josephson and tunnel junctions, the microfabrication of microstructures in magnetic multilayers showing the giant magnetoresistance effect, the design and realisation of miniaturised motors for hard disk applications and the design and realisation of planar transformers for miniaturised power applications. He joined EPFL in 1997. His present interests are in developing technologies for novel magnetic devices, new microfabrication technologies for microsystems fabrication in general and the development and use of microsystems technologies for microfluidic and biomedical applications in particular.

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Related concepts (32)

Semiconductor device fabrication

Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuits (ICs) such as computer processors, microcontrollers, and memory chips (such as NAND flash and DRAM) that are present in everyday electrical and electronic devices. It is a multiple-step photolithographic and physio-chemical process (with steps such as thermal oxidation, thin-film deposition, ion-implantation, etching) during which electronic circuits are gradually created on a wafer, typically made of pure single-crystal semiconducting material.

Type system

In computer programming, a type system is a logical system comprising a set of rules that assigns a property called a type (for example, integer, floating point, string) to every "term" (a word, phrase, or other set of symbols). Usually the terms are various constructs of a computer program, such as variables, expressions, functions, or modules. A type system dictates the operations that can be performed on a term. For variables, the type system determines the allowed values of that term.

Type theory

In mathematics, logic, and computer science, a type theory is the formal presentation of a specific type system, and in general, type theory is the academic study of type systems. Some type theories serve as alternatives to set theory as a foundation of mathematics. Two influential type theories that were proposed as foundations are Alonzo Church's typed λ-calculus and Per Martin-Löf's intuitionistic type theory. Most computerized proof-writing systems use a type theory for their foundation, a common one is Thierry Coquand's Calculus of Inductive Constructions.

Type safety

In computer science, type safety and type soundness are the extent to which a programming language discourages or prevents type errors. Type safety is sometimes alternatively considered to be a property of facilities of a computer language; that is, some facilities are type-safe and their usage will not result in type errors, while other facilities in the same language may be type-unsafe and a program using them may encounter type errors.

Data type

In computer science and computer programming, a data type (or simply type) is a collection or grouping of data values, usually specified by a set of possible values, a set of allowed operations on these values, and/or a representation of these values as machine types. A data type specification in a program constrains the possible values that an expression, such as a variable or a function call, might take. On literal data, it tells the compiler or interpreter how the programmer intends to use the data.

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