Lectures related to Microfabrication Technologies

Nanoscale MEMS: Fabrication, Tips, and Microscopy

Covers the fabrication of nanoscale MEMS devices and the operation of the Atomic Force Microscope for measuring ultrasmall forces on particles.

Microfabrication Technologies

Explores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.

Cleanroom Basics: Cleanroom Strategy MOOC: Micro and Nanofabrication (MEMS)

Covers methods for achieving high air purity in cleanroom environments for microfabrication processes.

Wet Etching: Glass and Silicon MOOC: Micro and Nanofabrication (MEMS)

Explores the wet etching process of glass and silicon using HF-based solutions and cleanroom processes for HF and BHF etchants.

Micro and Nanofabrication

Covers micro and nanofabrication processes, including plasma etching and dry etching techniques.

Brain-Computer Interfaces: Silicon Technologies

Explores the design and fabrication of Brain-Computer Interfaces using silicon-based technologies and flexible materials, emphasizing key fabrication techniques and material properties.

Micro and Nanofabrication for Optomechanics

Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.

Dry Etching Techniques MOOC: Micro and Nanofabrication (MEMS)

Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.

Lithography: Microfabrication Technologies

Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.

Etch Stop Techniques MOOC: Micro and Nanofabrication (MEMS)

Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.

Thin Film Devices: BCI

Explores the fabrication of thin film devices for BCI, covering interconnect resistance, microfabrication, encapsulation materials, and Parylene coatings.

Microfabrication Techniques: Tips and Sensors

Explores microfabrication techniques for nanotips and sensors, contact modes in AFM, capillary forces, and integrated sensors and actuators.

Surface Profiling Techniques MOOC: Micro and Nanofabrication (MEMS)

Explores surface profiling techniques like white light interferometry and laser beam profiling, emphasizing their non-contact nature and high resolution.

Ion Beam Etching MOOC: Micro and Nanofabrication (MEMS)

Introduces ion beam etchers, combining physical sputtering with chemical activity.

Stress in Thin Films: Film Growth and Microfabrication MOOC: Micro and Nanofabrication (MEMS)

Examines stress in thin films, including uniform distribution and intrinsic factors, within the context of microfabrication.

Dry Etching: Techniques and Equipment MOOC: Micro and Nanofabrication (MEMS)

Explores various dry etching techniques for silicon and the equipment used in the process, including RF plasma sources and HF vapor phase etchers.

Lithography: General Concepts and Mask Fabrication MOOC: Micro and Nanofabrication (MEMS)

Covers lithography concepts, mask fabrication, UV lithography, and emerging techniques.

Micro and Nanofabrication: Chemical Reactions and Etching Processes

Explores chemical reactions and etching processes in micro and nanofabrication, including Si etching and the formation of porous Si.

Thermo-mechanical Micro-actuator: Case Study MOOC: Micro and Nanofabrication (MEMS)

Explores the design and fabrication of a bi-morph micro-actuator and its thermo-mechanical characterization through DC and AC current applications.

Nanostencil Lithography Basics

Covers the basics of nanostencil lithography, including guiding patterns and grayscale patterns, for micro/nano fabrication.