Covers the design and fabrication of microfabricated transducers for measuring liquid flow and temperature in small-diameter tubes, emphasizing hands-on prototyping and team collaboration.
Covers advanced topics in MEMS technology, including design, packaging, device categories, historical perspective, market trends, and the role of startups.
Explores the forces, tips, and probes used in Scanning Probe Microscopy, focusing on AFM principles, tip resolution limits, and cantilever probe fabrication.
Covers the introduction to Micro-Electro-Mechanical Systems (MEMS), including operating principles, elements, scaling laws, silicon choice, sensors, and actuators.
