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Luis Guillermo Villanueva Torrijo

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Publications associées (132)

Piezoelectric Nanoelectromechanical Systems

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Kaitlin Marie Howell, Andrea Lozzi, Tom Larsen, Muhammad Faizan

In this paper we describe five different transduction techniques for the motion of NEMS resonators. We describe how these techniques differ from those used for MEMS and how centrosymmetric or amorphous materials can be used to fabricate NEMS. ...

2017

Modelling the Size Effects on the Mechanical Properties of Micro/Nano Structures (vol 15, 28543, 2015)

Luis Guillermo Villanueva Torrijo, Amir Musa Abazari

Mdpi Ag2016

Frequency fluctuations in silicon nanoresonators

Thomas Alava, Luis Guillermo Villanueva Torrijo, Eric Sage

Frequency stability is key to the performance of nanoresonators. This stability is thought to reach a limit with the resonator's ability to resolve thermally induced vibrations. Although measurements and predictions of resonator stability usually disregard ...

2016

Anchor Losses Dependence on Electrode Material in Contour Mode Resonators

Luis Guillermo Villanueva Torrijo, Andrea Lozzi

We here present a study on the influence of metal electrodes on the anchor losses in Contour Mode Resonators (CMRs). Our Finite Element Modelling (FEM) simulation results show that electrode material is key to determine the acoustic losses, and therefore t ...

Ieee2016

Resistless nanofabrication by stencil lithography: A review

Jürgen Brugger, Oscar Vazquez Mena, Luis Guillermo Villanueva Torrijo

We present a review on stencil lithography and focus on the particular interest and challenges when applying it to the scalable fabrication of nm-size devices. We first describe the basic technique with its main advantages and challenges. Then we review th ...

Elsevier2015

Modelling the Size Effects on the Mechanical Properties of Micro/Nano Structures

Luis Guillermo Villanueva Torrijo, Amir Musa Abazari

Experiments on micro- and nano-mechanical systems (M/NEMS) have shown that their behavior under bending loads departs in many cases from the classical predictions using Euler-Bernoulli theory and Hooke's law. This anomalous response has usually been seen a ...

MDPI Ag2015

Phase Synchronization of Two Anharmonic Nanomechanical Oscillators

Luis Guillermo Villanueva Torrijo

American Physical Society2014

Evidence of Surface Loss as Ubiquitous Limiting Damping Mechanism in SiN Micro- and Nanomechanical Resonators

Luis Guillermo Villanueva Torrijo

Silicon nitride (SiN) micro-and nanomechanical resonators have attracted a lot of attention in various research fields due to their exceptionally high quality factors (Qs). Despite their popularity, the origin of the limiting loss mechanisms in these struc ...

American Physical Society2014

Optical detection of radio waves through a nanomechanical transducer

Luis Guillermo Villanueva Torrijo, Albert Schliesser

Nature Publishing Group2014

Single-layer graphene on silicon nitride micromembrane resonators

Luis Guillermo Villanueva Torrijo

American Institute of Physics2014

Interface Losses In Multimaterial Resonators

Luis Guillermo Villanueva Torrijo, Tom Larsen

We present an extensive study shedding light on the role of surface and bulk losses in micromechanical resonators. We fabricate thin silicon nitride membranes of different sizes and we coat them with different thicknesses of metal. We later characterize th ...

Ieee2014

Fluid-mediated parallel self-assembly of polymeric micro-capsules for liquid encapsulation and release

Alcherio Martinoli, Jürgen Brugger, Grégory Mermoud, Loïc Jacot-Descombes, Luis Guillermo Villanueva Torrijo, Cristina Martin Olmos, Victor Javier Cadarso Busto, Rosario Maurizio Gullo, Massimo Mastrangeli

Fluid-mediated self-assembly is one of the most promising routes for assembling and packaging smart microsystems in a scalable and cost-efficient way. In this work the pairwise fluidic self-assembly of 100 μm-sized SU-8 cylinders is studied with respect to ...

2013

Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography

Jürgen Brugger, Oscar Vazquez Mena, Katrin Sidler Arnet, Andreea Veronica Savu, Luis Guillermo Villanueva Torrijo, Cristina Martin Olmos

In order to keep up with the advances in nano-fabrication, alternative, cost-efficient lithography techniques need to be implemented. Two of the most promising are nanoimprint lithography (NIL) and stencil lithography. We explore here the possibility of fa ...

MDPI2013

Ultra-low power hydrogen sensing based on a palladium-coated nanomechanical beam resonator

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Jonas Gustav Henriksson

Hydrogen sensing is essential to ensure safety in near-future zero-emission fuel cell powered vehicles. Here, we present a novel hydrogen sensor based on the resonant frequency change of a nanoelectromechanical clamped-clamped beam. The beam is coated with ...

Royal Soc Chemistry2012

Highly ordered palladium nanodot patterns for full concentration range hydrogen sensing

Jürgen Brugger, Thomas Kiefer, Luis Guillermo Villanueva Torrijo

A hydrogen sensor based on a novel fabrication process that combines the precision of advanced nano-fabrication techniques with a bottom-up process based on electrochemistry is presented. The sensor allows for reliable detection between 0.1% and 100% of H2 ...

2012

Compliant membranes improve resolution in full-wafer micro/nanostencil lithography

Jürgen Brugger, Oscar Vazquez Mena, Katrin Sidler Arnet, Andreea Veronica Savu, Luis Guillermo Villanueva Torrijo

This work reports on a considerable resolution improvement of micro/nanostencil lithography when applied on full-wafer scale by using compliant membranes to reduce gap-induced pattern blurring. Silicon nitride (SiN) membranes are mechanically decoupled fro ...

2012

High-Resolution Resistless Nanopatterning on Polymer and Flexible Substrates for Plasmonic Biosensing Using Stencil Masks

Jürgen Brugger, Oscar Vazquez Mena, Andreea Veronica Savu, Luis Guillermo Villanueva Torrijo, Mahmut Tosun

The development of nanoscale lithographic methods on polymer materials is a key requirement to improve the spatial resolution and performance of flexible devices. Here, we report the fabrication of metallic nanostructures down to 20 and 50 nm in size on po ...

American Chemical Society2012

All-stencil transistor fabrication on 3D silicon substrates

Philippe Langlet, Cyrille Hibert, Peter Vettiger, Jürgen Brugger, Oscar Vazquez Mena, Katrin Sidler Arnet, Andreea Veronica Savu, Luis Guillermo Villanueva Torrijo, Cristina Martin Olmos

The standard lithographic techniques to fabricate electronic components involve the use of polymers, baking steps and chemicals. This typically restricts their application to flat substrates made up of standard materials. Stencil lithography has been propo ...

Iop Publishing Ltd2012

Ultra-low power palladium-coated MEMS resonators for hydrogen detection under ambient conditions

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Jonas Gustav Henriksson

We present a novel approach for hydrogen gas detection, based on palladium-coated micromechanical resonators. A sequence of thin film technniques allows the large-scale parallel fabrication of free-standing beams separated from a counter-electrode by a mes ...

IEEE2011

Localized Ion Implantation Through Micro/Nanostencil Masks

Philippe Langlet, Jürgen Brugger, Oscar Vazquez Mena, Luis Guillermo Villanueva Torrijo, Cristina Martin Olmos

A method is presented that allows the deﬁnition of micrometer- and submicrometer-sized implanted structures in silicon without using photoresist patterning. The process is based on the use of stencils as masks in a conventional ion implanter, and is tested ...

Institute of Electrical and Electronics Engineers2011

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