Luis Guillermo Villanueva Torrijo

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We present an extensive study shedding light on the role of surface and bulk losses in micromechanical resonators. We fabricate thin silicon nitride membranes of different sizes and we coat them with different thicknesses of metal. We later characterize th ...

3D printing of MEMS devices could enable the cost-efficient production of custom-designed and complex 3D MEMS for prototyping and for low-volume applications. In this work, we present the first micro 3D-printed functional MEMS accelerometers using two-phot ...

A method is presented that allows the deﬁnition of micrometer- and submicrometer-sized implanted structures in silicon without using photoresist patterning. The process is based on the use of stencils as masks in a conventional ion implanter, and is tested ...

Complications from thrombosis constitute a massive global burden for human health. Current treatment methods have limitations and can cause serious adverse effects. Hydrodynamic cavitation (HC) is a physical phenomenon where bubbles develop and collapse ra ...

Micro and Nano Electro Mechanical systems (M/NEMS) have a lot of potential to be used for sensing in different schemes and operation modes. We focus here on the use of coupled resonators for sensing and address the major limitation that these systems face, ...

In a free ZY-LiNbO3 400nm thick platelet, narrow electrodes (500nm wide) placed periodically with a pitch of few micrometers can eXcite standing Bulk Acoustic shear wave Resonances (XBARs), by means of lateral electric field parallel to crystalline Y- axis ...

One of the major advantages of stencil lithography is the possibility to use stencils many times. However, when stencils contain nanoapertures, the clogging of the membranes limits the useful life time of the stencils. The clogging is due to the accumulati ...

We report on the design and operation of a world-to-chip microfluidic interface and experimental setup for fluidic micro- and nano-electromechanical systems. The central component of the interface is an engineered polyether ether ketone connector that brin ...

Optical detection back-action in cantilever resonant or static detection presents a challenge when striving for state-of-the-art performance. The origin and possible routes for minimizing optical back-action have received little attention in literature. He ...

Aluminium nitride is a promising photonic material from the ultra-violet to the mid-infrared spectral range. We present spectroscopic ellipsometry of sputtered AlN thin films on insulator in the spectral range 0.19 mu m - 25 mu m, surface roughness charact ...

This study explores the utilization of sputtered aluminum nitride (AlN) thin film on insulator as a platform for integrated photonic MEMS. We experimentally demonstrate proof-of-concept photonic ring resonators with Q-factors up to 31000 at a resonance wav ...

A hydrogen sensor based on a novel fabrication process that combines the precision of advanced nano-fabrication techniques with a bottom-up process based on electrochemistry is presented. The sensor allows for reliable detection between 0.1% and 100% of H2 ...

Hydrodynamic cavitation is considered an effective tool to be used in different applications, such as surface cleaning, ones in the food industry, energy harvesting, water treatment, biomedical applications, and heat transfer enhancement. Thus, both charac ...

This paper presents the use of a novel type of resonators made of a thin membrane of Y-cut Lithium Niobate that has an array of interdigitated electrodes on the top, and a floating metal on the bottom. Each electrode gives rise to a quasi-independent reson ...

We introduce a detailed design and fabrication process of Silicon microcantilever arrays for biomolecular detection in liquid environment, utilized with laser readout. We present typical fabrication problems and provide related solutions to obtain high qua ...

The unique mechanical and electrical properties of graphene make it an exciting material for nanoelectromechanical systems (NEMS). NEMS resonators with graphene springs facilitate studies of graphene's fundamental material characteristics and thus enable i ...

Hydrodynamic cavitation is one of the major phase change phenomena and occurs with a sudden decrease in the local static pressure within a fluid. With the emergence of microelectromechanical systems (MEMS), high-speed microfluidic devices have attracted co ...

A PDMS based tuneable microoptical system fabricated merging deep reactive ion etching, SU-8 and soft lithography, with a low-cost (mass-production), simple and highly repetitive technology, is presented. This system consists on a structure of two microlen ...

The exposure of subnuclear compartments of cells to ionizing radiation is currently not trivial. We describe here a collimator for micrometer-wide stripe irradiation designed to work with conventional high-voltage X-ray tubes and cells cultured on standard ...

In this paper we describe five different transduction techniques for the motion of NEMS resonators. We describe how these techniques differ from those used for MEMS and how centrosymmetric or amorphous materials can be used to fabricate NEMS. ...

Luis Guillermo Villanueva Torrijo

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Interface Losses In Multimaterial Resonators

A 3D-Printed Functional Mems Accelerometer

Localized Ion Implantation Through Micro/Nanostencil Masks

Hydrodynamic Cavitation-Induced Thrombolysis on a Clot-on-a-Chip Platform

Balancing of Coupled Piezoelectric NEMS Resonators

Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters

Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching

Modular interface and experimental setup for in-vacuum operation of microfluidic devices

Position and mode dependent optical detection back-action in cantilever beam resonators

Optical Properties of Aluminium Nitride on Insulator for Integrated Photonics

Optical Ring Resonators in Sputtered Aluminum Nitride on Insulator for Integrated Photonic MEMS

Highly ordered palladium nanodot patterns for full concentration range hydrogen sensing

Engineered Lateral Roughness Element Implementation and Working Fluid Alteration to Intensify Hydrodynamic Cavitating Flows on a Chip for Energy Harvesting

Towards a N77 Electroacoustic Filter Using Thin Films of Crystalline Y-cut Lithium Niobate

Silicon microresonator arrays: A comprehensive study on fabrication techniques and pH-controlled stress-induced variations in cantilever stiffness

Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors

Design and fabrication of a vigorous "cavitation-on-a-chip" device with a multiple microchannel configuration

Mechanically tuneable microoptical structure based on PDMS

Microcollimator for Micrometer-Wide Stripe Irradiation of Cells Using 20–30 keV X Rays

Piezoelectric Nanoelectromechanical Systems