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Jürgen Brugger

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Publications associées (329)

Special Issue on Selected Papers From the 11th IEEE Sensors Conference 2012

Jürgen Brugger

Institute of Electrical and Electronics Engineers2013

Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography

Jürgen Brugger, Oscar Vazquez Mena, Katrin Sidler Arnet, Andreea Veronica Savu, Luis Guillermo Villanueva Torrijo, Cristina Martin Olmos

In order to keep up with the advances in nano-fabrication, alternative, cost-efficient lithography techniques need to be implemented. Two of the most promising are nanoimprint lithography (NIL) and stencil lithography. We explore here the possibility of fa ...

MDPI2013

Heated mask

Jürgen Brugger, Andreea Veronica Savu, Shenqi Xie

The invention concerns a method and a device wherein a stencil is provided with an integrated microhotplate on the stencil membrane to prevent aperture clogging, whereby the stencil can be locally heated up in order to minimize material condensation, remov ...

2013

Acousto-fluidic system assisting in-liquid self-assembly of microcomponents

Alcherio Martinoli, Jürgen Brugger, Grégory Mermoud, Loïc Jacot-Descombes, Rosario Maurizio Gullo, Massimo Mastrangeli, Helmut Knapp

In this paper, we present the theoretical background, design, fabrication and characterization of a micromachined chamber assisting the fluidic self-assembly of micro-electro-mechanical systems in a bulk liquid. Exploiting bubble-induced acoustic microstre ...

2013

Integrated long-range thermal bimorph actuators for parallelizable bio-AFM applications

Jürgen Brugger, Jonas Gustav Henriksson, Rosario Maurizio Gullo

AFM-based cell force spectroscopy is an emerging research method that already has enhanced our understanding of the structural changes that take place in a cell as it becomes cancerous. However, the method is limited as it is not time-efficient in its curr ...

Institute of Electrical and Electronics Engineers2013

A portable microfluidic-based biophotonic sensor for extracellular H2O2 measurements

Christian Santschi, Jürgen Brugger, Olivier Martin, Victor Javier Cadarso Busto, Guillaume Suarez, Volodymyr Koman, Nadia Rachel Von Moos

2013

Three-dimensional SU-8 microtiles for fluidic self-assembly

Alcherio Martinoli, Jürgen Brugger, Massimo Mastrangeli

2013

Al2O3/W hetero-structured nanopore membranes: From native to tunable nanofluidic diodes

Philippe Renaud, Arnaud Bertsch, Jürgen Brugger, Fabien Patrick Wildhaber, Songmei Wu

We present here Al2O3/W hetero-structured nanopore membranes which function as native and electrical field tunable nanofluidic diodes. A typical membrane is 100×100 μm2 in size with pore density of ∼ 20/μm2. The nanopores are 26 nm in diameter and 400 nm i ...

IEEE2013

Application of stencil masks for ion beam lithographic patterning

Jürgen Brugger, Andreea Veronica Savu

The application of Au/Si3N4 stencil masks for the transfer of patterns using different MeV-ion beams with various substrates has been investigated. The techniques investigated were namely, conventional lithography with positive- and negative-tone resist po ...

Elsevier2013

Field effect modulated nanofluidic diode membrane based on Al2O3/W heterogeneous nanopore arrays

Philippe Renaud, Arnaud Bertsch, Jürgen Brugger, Fabien Patrick Wildhaber, Songmei Wu

We developed Al2O3/W heterogeneous nanopore arrays for field effect modulated nanofluidic diodes. They are fabricated by transferring self-organized nanopores of anodic aluminium oxide into a W thin film. The nanopores are ∼20 nm in diameter and 400 nm in ...

American Institute of Physics2013

Carbon nanotubes-SU8 composite for flexible conductive inkjet printable applications

László Forró, Richard Gaal, Jürgen Brugger, Arnaud Magrez, Kristopher Pataky, Marijana Mionic Ebersold

We have developed a conducting composite based on multi-walled carbon nanotubes and bisphenol A novolak epoxy resin (SU8) for inkjet printing purposes. We could deposit regular conducting stripes and arrays of 150 mu m spots on glass and on flexible polyet ...

Royal Society of Chemistry2012

Ultra-low power hydrogen sensing based on a palladium-coated nanomechanical beam resonator

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Jonas Gustav Henriksson

Hydrogen sensing is essential to ensure safety in near-future zero-emission fuel cell powered vehicles. Here, we present a novel hydrogen sensor based on the resonant frequency change of a nanoelectromechanical clamped-clamped beam. The beam is coated with ...

Royal Soc Chemistry2012

Capteur pour la detection d'hydrogene et procede de fabrication d'un tel capteur

Jürgen Brugger

2012

Optical detection of extracellular H2O2 using multiscattering matrices

Christian Santschi, Jürgen Brugger, Olivier Martin, Victor Javier Cadarso Busto, Guillaume Suarez, Volodymyr Koman

2012

A microfluidic probe for optical detection of extracellular H2O2

Christian Santschi, Jürgen Brugger, Olivier Martin, Victor Javier Cadarso Busto, Guillaume Suarez, Volodymyr Koman

2012

Highly ordered palladium nanodot patterns for full concentration range hydrogen sensing

Jürgen Brugger, Thomas Kiefer, Luis Guillermo Villanueva Torrijo

A hydrogen sensor based on a novel fabrication process that combines the precision of advanced nano-fabrication techniques with a bottom-up process based on electrochemistry is presented. The sensor allows for reliable detection between 0.1% and 100% of H2 ...

2012

The Solution of Nonlinear Function of Ion Mobility Based on FAIMS Spectrum Peak Position

Jürgen Brugger

FAIMS's ion separation mechanism is based on analyte's characteristic nonlinear relationship between its ion mobility and applied electric field strength. Present characterization methods for this nonlinear relationship are based on precarious assumptions ...

Office Spectroscopy & Spectral Analysis2012

In-situ actuated gap reduction and clogging-free apertures for quasi-dynamic stencil lithography

Jürgen Brugger, Andreea Veronica Savu, Shenqi Xie

We demonstrate a high-resolution implementation of quasi-dynamic stencil lithography based on the integration of a micro-hotplate on the stencil membrane. The stencil design has been tailored so that the thermally actuated membrane reduces the gap between ...

2012

Sub micrometer ceramic structures fabricated by molding a polymer-derived ceramic

Jürgen Brugger, Raphael Grandjean, Thomas Kiefer, Jonas Grossenbacher, Rosario Maurizio Gullo

This paper describes the fabrication of sub micrometer silicon oxycarbide (SiCO) ceramic structures. The method consists in replicating silicon micro/nanostructures in polydimethylsiloxane (PDMS), followed by a micro/nano molding of liquid polymer derived ...

Elsevier2012

Phenyl-bridged polysilsesquioxane positive and negative resist for electron beam lithography

Jürgen Brugger, Vaida Auzelyte

We present and characterize an organic–inorganic hybrid sol–gel material, phenyl-bridged polysilsesquioxane (ph-PSQ), for use as a new highresolution resist for electron beam lithography (EBL). The resist has a unique characteristic as the only positive to ...

Institute of Physics2012

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