Publications by Jürgen Brugger

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A display panel assembly comprises a transflective holographic screen, i.e., a transparent screen that reflects light from a projection system, comprising at least a volume hologram, a first protective element and a second protective element, each arranged ...

The fabrication of gold nanodots by stencil lithography and its application for optical biosensing based on localized surface plasmon resonance are presented. Arrays of 50−200 nm wide nanodots with different spacing of 50−300 nm are fabricated without any ...

Two superposed layers of transparent cylindrical lenslet gratings create classical moiré fringes when illuminated from behind. We rely on this observation to conceive special devices made of superposed lenslet gratings that produce compelling beating shape ...

In this paper, the fabrication and use of stencils for full-wafer scale shadow mask (stencil) lithography is described. The stencils fabricated via microelectromechanical systems are mechanically stabilized and show clearly reduced stress-induced membrane ...

A novel single-layer structured triboelectric generator (TEG) is proposed with a hybrid mix of carbon nanotube (CNT) and silk. Here, the mixing of two materials in liquid phase for proven effective power generation is shown. In this research, CNT provides ...

Vascularization arguably poses the most significant hurdle for the success of most biomaterials-based tissue engineering therapies. In this work, we report two printing strategies that permit the 3D Inkjet printing of fluorescent alginate hydro gels into o ...

Polymer-derived ceramics exhibit excellent properties and are compatible with many shaping techniques due to their liquid precursors. We present a fast and pressureless process for the fabrication of SiCN. Using varied amounts of the filler divinyl benzene ...

A new technology based on a combination of Al-protection layers and HF-vapor etching to produce ultrathin single crystal silicon cantilevers is presented. 500 um long, 10 um wide and 0.5 um thick cantilevers have been fabricated with a high yield. A resona ...

Embedding liquid metals (LMs) into an elastomer is emerging as a promising strategy for stretchable conductors. Existing manufacturing techniques are struggling between spatial resolution and process complexity and are limited to chemically resistant subst ...

Micro and nanoparticles made from polymers, metals, ceramics, and lipids are crucial for biomedical devices, energy storage, and electronics. Traditional fabrication methods like grinding, milling, and emulsification result in monolithic shapes and heterog ...

We describe a novel surface micromachining process for the fabrication of ceramic-type MEMS devices, such as free-standing cantilevers, that is based on the use of high-aspect ratio micromolds of SU8 and aluminum as sacrificial layer. 250μm-high and 100-10 ...

We present a novel approach for hydrogen gas detection, based on palladium-coated micromechanical resonators. A sequence of thin film technniques allows the large-scale parallel fabrication of free-standing beams separated from a counter-electrode by a mes ...

Well-controlled spherical microstructures open new possibilities for several MEMS devices, such as hemispherical microfluidic channels or micro-optical elements. However, machining of micro-spherical shapes has proven to be difficult with conventional plan ...

This paper describes a novel and scalable method for the fabrication of polymer derived ceramics (PDC) structures with high aspect ratio and micrometre scale features. Elastomeric micro-moulds composed of a filling pot are used to deliver via sacrificial m ...

In order to realize high-performance organic thin-film transistors (TFT), two parameters of the organic semiconducting layer are desired: single crystallinity for high mobility and patterning for low off currents. High-quality single crystals can be fabric ...

We propose a new process for forming parallel nanobridge patterns by nanostencil lithography. In this process, a low-stress silicon nitride stencil with parallel nanobridge structures is fabricated by a new edge patterning technique where those nanobridges ...

Nanoporous SiN membranes are interesting for a number of applications, e.g. stenciling, filtration, or tissue engineering [1-3]. The patterning of the pores requires a high resolution lithographic tool. Focused ion beam milling or e-beam lithography fulfil ...

A microscopic four-point probe (micro4PP) for resistivity measurements on thin films was designed and fabricated using the negative photoresist SU-8 as base material. The device consists of four microscopic cantilevers, each of them supporting a probe tip ...

Jürgen Brugger

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Transflective holographic film for head worn display

Precision Surface Microtopography Regulates Cell Fate Via Changes To Actomyosin Contractility And Nuclear Architecture

Metallic Nanodot Arrays by Stencil Lithography for Plasmonic Biosensing Applications

Level-line moirés by superposition of cylindrical microlens gratings

Silicon Supported Membranes for Improved Large-Area and High-Density Micro/Nanostencil Lithography

Wearable Triboelectric Generator based on a Hybrid Mix of Carbon Nanotube and Polymer Layers

High-Fidelity Printing Strategies for Printing 3D Vascular Hydrogel Structures

Multiscale 2D/3D microshaping and property tuning of polymer-derived SiCN ceramics

Combined Al-protection and HF-vapor release process for ultrathin single crystal silicon cantilevers

Stretchable Conductors Fabricated by Stencil Lithography and Centrifugal Force-Assisted Patterning of Liquid Metal

Additive manufacturing of water-soluble 3D micro molds for complex-shaped lipid microparticles

Surface Micromachining of Polyureasilazane Based Ceramic-MEMS using SU-8 Micromolds

Stencilled Conducting Bismuth Nanowires

Ultra-low power palladium-coated MEMS resonators for hydrogen detection under ambient conditions

Fabrication of epoxy spherical microstructures by controlled drop-on-demand inkjet printing

On the micrometre precise mould filling of liquid polymer derived ceramic precursor for 300-µm-thick high aspect ratio ceramic MEMS

Arrays of Pentacene Single Crystals by Stencil Evaporation

Patterning of parallel nanobridge structures by reverse nanostencil lithography using an edge-patterned stencil

Nanoporous SiN membranes patterned by wafer-scale nanosphere lithography

Microscopic four-point probe based on SU-8 cantilevers