Publications de Jürgen Brugger

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SU-8 is a photoplastic polymer with a wide range of possible applications in microtechnology. Cantilevers designed for atomic force microscopes were fabricated in SU-8. The mechanical properties of these cantilevers were investigated using two microscale t ...

In this paper we present the fabrication and characterization of highly sensitive cantilevers, with and without magnetic tip, used for magnetic resonance force microscopy experiments. The full wafer silicon batch microfabrication was successful and the ach ...

This brief presents a fully integrated nanoelectromechanical system (NEMS) resonator, operable at frequencies in the megahertz range, together with a compact built-in CMOS interfacing circuitry. The proposed low-power second-generation current conveyor cir ...

We present a novel triboelectric nanogenerator (TENG) based on a paper-Teflon configuration fabricated by an easy and cost-efficient process. Carbon electrodes were hand-drawn by means of a graphite pencil on commercial paper cards, and the conductivity wa ...

This paper presents the realization of a hydrodynamic microfluidic trap with the goal of sorting MEMS for self-assembly experiments in liquid. A simplified analytical design rule has been compiled and numerically verified. Microfluidic devices have been fa ...

A simple and easy shape-controllable approach is demonstrated for the fabrication of parabolic-shaped polymer microlenses (mu-lenses), which are widely used in bio-imaging systems such as microfluidic and lab-on-a-chip systems for improving the image quali ...

The authors present a method for spreading large (> 100 mm2) cell membrane fragments across nanoapertures in planar supports. Electron-beam and focused-ion-beam lithog. were used to fabricate arrays of 50-600 nm diam. holes in free-standing silicon nitride ...

Field-effect transistors (FETs) based on two-dimensional materials (2DMs) with atomically thin channels have emerged as a promising platform for beyond-silicon electronics. However, low carrier mobility in 2DM transistors driven by phonon scattering remain ...

We present a three dimensional (3D) microenvironment for on-chip cell culture, with engineered geometrical and mechanical properties. The device, named mu-flower, is based on micorfabricated cantilever beams bent out of plane by the intrinsic stresses of a ...

Dynamic stencil lithography uses a moving shadow-mask to draw patterns by having directionally evaporated material deposited through the stencil apertures onto the substrate. Sub-micrometre, two- dimensional patterning is demonstrated at full 100 mm wafer ...

Stencil lithography (SL) is a shadow mask technique which allows parallel, resistless, micro- and nano- patterning of material through apertures created in a membrane (stencil) onto a substrate. The stencils are usually made of LPCVD low-stress SiN due to ...

A PDMS based tuneable microoptical system fabricated merging deep reactive ion etching, SU-8 and soft lithography, with a low-cost (mass-production), simple and highly repetitive technology, is presented. This system consists on a structure of two microlen ...

Biodegradable implanted devices and microsystems are candidates to fulfill the utmost required in-vivo assistance for a variety of envisioned bio-medical health care applications. They range from monitoring biomarkers, recording, and stimulation, to local ...

The exposure of subnuclear compartments of cells to ionizing radiation is currently not trivial. We describe here a collimator for micrometer-wide stripe irradiation designed to work with conventional high-voltage X-ray tubes and cells cultured on standard ...

The present invention proposes a method for producing an authenticable moiré shape that simultaneously moves and shows a beating effect. The method relies on a combination of the 1D or the 2D moiré and the level line moiré. When tilting a compound showing ...

The standard lithographic techniques to fabricate electronic components involve the use of polymers, baking steps and chemicals. This typically restricts their application to flat substrates made up of standard materials. Stencil lithography has been propo ...

Aluminum and gold nanowires were fabricated using 100 mm stencil wafers containing nanoslits fabricated with a focused ion beam. The stencils were aligned and the nanowires deposited on a substrate with predefined electrical pads. The morphology and resist ...

In this work we demonstrate a new process for precisely encapsulating nanoliters of aqueous solution in a microcapsule. Microcapsules were fabricated by twophoton polymerization and subsequently filled and sealed by inkjet printing. Our new approach overco ...

Jürgen Brugger

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Micromechanical testing of SU-8 cantilevers

KFM detection of quantified charges injected into a thin SiO2 layer containing Si nps embedded by ultra low energy ion implantation using stencil lithography

Highly Sensitive Cantilevers, with and without Magnetic Tip, for Magnetic Resonance Force Microscopy

A Compact and Low-Power CMOS Circuit for Fully-Integrated NEMS Resonators

Penciling A Triboelectric Power Source On Paper

Hydrodynamic Trap for Directed Self-Assembly of MEMS

Simple and easily controllable parabolic-shaped microlenses printed on polymeric mesas

Cell Membranes Suspended Across Nanoaperture Arrays

Deterministic grayscale nanotopography to engineer mobilities in strained MoS2 FETs

Single-Cell 3D Bio-Mems Environment With Engineered Geometry And Physiologically Relevant Stiffnesses

100 mm dynamic stencils pattern sub-micrometre structures

Robust PECVD SiC membrane made for stencil lithography

Vertically-Stacked Si Nanowire FETs with sub-micrometer Gate-All-Around polysilicon gates patterned by nanostencil lithography

Mechanically tuneable microoptical structure based on PDMS

Biodegradable Implantable Microsystems

Microcollimator for Micrometer-Wide Stripe Irradiation of Cells Using 20–30 keV X Rays

Synthesis of moving and beating moiré shapes

All-stencil transistor fabrication on 3D silicon substrates

Metallic Nanowires by Full Wafer Stencil Lithography

LIQUID-IN-A-MEMS: ENCAPSULATION OF LIQUID IN A MICROCAPSULE BY INKJET PRINTING