Home

Person

Luis Guillermo Villanueva Torrijo

About
Privacy
Disclaimer

Graph Chatbot

Related publications (129)

Page 4 of 7

Phase Noise Measurements Of Aluminum Scandium Nitride Oscillators

Luis Guillermo Villanueva Torrijo, Andrea Lozzi, Marco Liffredo

This paper presents the first phase noise (PN) measurements of oscillators based on aluminum scandium nitride (AlScN) resonators. 2-port AlScN contour mode resonators (CMR) operating at 195 MHz arc fabricated. A large pool of Q values (ranging from 150 to ...

IEEE2019

Micro 3D printing of a functional MEMS accelerometer

Luis Guillermo Villanueva Torrijo, Damien Maillard

Microelectromechanical system (MEMS) devices, such as accelerometers, are widely used across industries, including the automotive, consumer electronics, and medical industries. MEMS are efficiently produced at very high volumes using large-scale semiconduc ...

SPRINGERNATURE2022

Fabrication of fluid-compatible trilayer cantilevers with integrated piezoelectric actuators

Luis Guillermo Villanueva Torrijo, Georg Fantner, Damien Maillard, Nahid Hosseini, Mustafa Kangül, Matthias Neuenschwander

Microcantilevers are popular transducers thanks to their simple design and a high sensitivity. In many applications, the cantilevers need to be actuated, either to induce a controlled deflection or to excite the resonance. This can be achieved with integra ...

2025

On cavitation inception and cavitating flow patterns in a multi-orifice microfluidic device with a functional surface

Luis Guillermo Villanueva Torrijo

During the last decade, hydrodynamic cavitation has been implemented in various applications such as energy harvesting and biomedical applications. Facile hydrodynamic cavitation methods are required for fulfilling the requirements in these applications. I ...

AMER INST PHYSICS2021

Metallic Nanodot Arrays by Stencil Lithography for Plasmonic Biosensing Applications

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Oscar Vazquez Mena

The fabrication of gold nanodots by stencil lithography and its application for optical biosensing based on localized surface plasmon resonance are presented. Arrays of 50−200 nm wide nanodots with different spacing of 50−300 nm are fabricated without any ...

American Chemical Society2011

Study of Thin Film LiNbO3 Laterally Excited Bulk Acoustic Resonators

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli, Hüseyin Baris Atakan

This work presents an in-depth study of simulation and measurement results of laterally excited shear bulk acoustic resonators (XBAR) in Lithium Niobate, at 5 GHz with high electromechanical coupling factor (k(t)(2)) as high as 25%, and with impedances at ...

Institute of Electrical and Electronics Engineers2022

Suspended micro/nano channel resonators: a review

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina

Micro- and nano-electromechanical systems (M/NEMS) have demonstrated outstanding sensing capabilities down to the yoctogram (10(-24) g) scale in vacuum environment and cryogenic temperatures. In order to bring such extraordinary resolution levels into the ...

2020

Fluid-mediated parallel self-assembly of polymeric micro-capsules for liquid encapsulation and release

Jürgen Brugger, Alcherio Martinoli, Luis Guillermo Villanueva Torrijo, Rosario Maurizio Gullo, Victor Javier Cadarso Busto, Cristina Martin Olmos, Massimo Mastrangeli, Grégory Mermoud, Loïc Jacot-Descombes

Fluid-mediated self-assembly is one of the most promising routes for assembling and packaging smart microsystems in a scalable and cost-efficient way. In this work the pairwise fluidic self-assembly of 100 μm-sized SU-8 cylinders is studied with respect to ...

2013

Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications

Luis Guillermo Villanueva Torrijo

Graphene's unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS). However, the inte ...

2020

Anchor Losses Dependence on Electrode Material in Contour Mode Resonators

Luis Guillermo Villanueva Torrijo, Andrea Lozzi

We here present a study on the influence of metal electrodes on the anchor losses in Contour Mode Resonators (CMRs). Our Finite Element Modelling (FEM) simulation results show that electrode material is key to determine the acoustic losses, and therefore t ...

Ieee2016

Stencilled Conducting Bismuth Nanowires

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Andreea Veronica Savu, Oscar Vazquez Mena, Katrin Sidler Arnet, Sam Neuser

2009

Ultra-low power palladium-coated MEMS resonators for hydrogen detection under ambient conditions

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Jonas Gustav Henriksson

We present a novel approach for hydrogen gas detection, based on palladium-coated micromechanical resonators. A sequence of thin film technniques allows the large-scale parallel fabrication of free-standing beams separated from a counter-electrode by a mes ...

IEEE2011

Piezoelectric and elastic properties of Al0.60Sc0.40N thin films deposited on patterned metal electrodes

Federico Peretti, Luis Guillermo Villanueva Torrijo, Silvan Stettler, Marco Liffredo, Nan Xu

Sc-doped aluminum nitride (AlScN) allows for piezoelectric devices with large electromechanical coupling and the benefits increase with larger Sc doping in the film. However, with a larger Sc concentration, the process window narrows, and it is necessary t ...

2024

A 5G n77 Filter Using Shear Bulk Mode Resonator With Crystalline X-cut Lithium Niobate Films

Luis Guillermo Villanueva Torrijo, Florian Fernand Hartmann

This paper presents the use of a shear bulk acoustic mode resonator made of a membrane of X-cut lithium niobate (LiNbO3) for ultra-wide band filter applications. Aluminum interdigitated (IDT) electrodes are deposited on top of the LiNbO3 thin film as well ...

IEEE2023

Measuring direct flexoelectricity at the nanoscale

Luis Guillermo Villanueva Torrijo, Daniel Moreno Garcia

Flexoelectricity is a property of all dielectric materials, where inhomogeneous strain induces electrical polarization. This effect becomes particularly prominent at the nanoscale where larger strain gradients can be obtained. While flexoelectric charges h ...

Institute of Electrical and Electronics Engineers2025

Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli

This work presents the study of suspended Y-cut Lithium Niobate shear bulk acoustic resonators for wide band filter applications in the frequency range of 3.5-4.5GHz. The resonators consist of a Lithium Niobate film with Aluminum top interdigitated electro ...

Institute of Electrical and Electronics Engineers2023

Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Andreea Veronica Savu, Oscar Vazquez Mena, Katrin Sidler Arnet, Cristina Martin Olmos

In order to keep up with the advances in nano-fabrication, alternative, cost-efficient lithography techniques need to be implemented. Two of the most promising are nanoimprint lithography (NIL) and stencil lithography. We explore here the possibility of fa ...

MDPI2013

Design and optimization of nanogap array sensors

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Thomas Kiefer

We present a percolation based model which is suitable for the design of sensors based on highly ordered nanogap arrays. Monte-Carlo simulations and analytical expressions are used to calculate the sensitivity and dynamic range as a function of the topolog ...

2008

Transversal Spurious Mode Suppression in Ultra-Large-Coupling SH0 Acoustic Resonators on YX36 degrees-Cut Lithium Niobate

Luis Guillermo Villanueva Torrijo, Silvan Stettler

This work reports on the design and fabrication of fundamental shear horizontal (SH0) mode acoustic resonators based on a suspended lithium niobate (LNO) film at 1.04 GHz. Due to the large e16 piezoelectric coefficient of YX36 degrees.-cut LNO, fabricated ...

Institute of Electrical and Electronics Engineers2023

Direct fabrication of NIL stamps using Stencil Lithography

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Oscar Vazquez Mena, Thomas Kiefer

Stencil Lithography has been used for the rapid and low cost fabrication of high resolution NIL stamps. The stamps are fabricated by Al deposition through a nanoscale shadow mask and subsequent Si etching. Features down to 50 nm in the stamps have been ach ...

2008