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Publication

Study of Thin Film LiNbO3 Laterally Excited Bulk Acoustic Resonators

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli, Hüseyin Baris Atakan
2022
Journal Articles

Abstract

This work presents an in-depth study of simulation and measurement results of laterally excited shear bulk acoustic resonators (XBAR) in Lithium Niobate, at 5 GHz with high electromechanical coupling factor (k(t)(2)) as high as 25%, and with impedances at resonance close to 2 Omega. Loaded Quality factors of up to 340 and 150 are obtained at resonance and anti-resonance, respectively. Experimental00 dispersion behaviors of main mode and spurious are presented. Several geometric parameters affecting resonator performance are studied in order to improve figure of merits (FoM) of the device for 5G filter applications. The modified fabrication process presented shows a high yield of over 90% of devices which can be scalable for mass production of high frequency, sub-6 GHz, wide band filters.

Official source

https://infoscience.epfl.ch/entities/publication/009df88e-f521-4857-9446-453d4ad29450

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Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli, Hüseyin Baris Atakan
2022
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/009df88e-f521-4857-9446-453d4ad29450

About this result

Ontological neighbourhood

Electrical engineering

Radio-frequency engineering: Topics in radio-frequency engineering

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