Luis Guillermo Villanueva Torrijo

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In this study, we analyze a 3rd type of FBAR's fundamental mode by finite element method. We show the importance of the substrate's wave velocity and conductivity on the electromechanical coupling efficiency. Then we demonstrate that etching traditional SA ...

Frequency stability is key to the performance of nanoresonators. This stability is thought to reach a limit with the resonator's ability to resolve thermally induced vibrations. Although measurements and predictions of resonator stability usually disregard ...

The reliable and reproducible fabrication of nanostructures by stencil lithography faces three main challenges: the stability of the thin stencil membranes with nanoapertures, the blurring of the deposited structures, and the clogging of the nanoapertures ...

Fast hydrogen sensors based on discontinuous palladium (Pd) ﬁlms on supporting polyimide layers, fabricated by a cost-efﬁcient and full-wafer compatible process, are presented. The ﬁlms, deposited by electron-beam evaporation with a nominal thickness of 1. ...

In this paper, cavitating flows are characterized in 29 microfluidic devices in order to achieve a comprehensive perspective regarding flow patterns in microscale, which is crucial in the applications, such as energy harvesting and biomedical treatment. Wh ...

Piezoelectric-based resonators are some of the most used devices in the world. Invisible to most people, they constitute key elements for your mobile phone communications. With the advent of 50, the current technologies for piezoelectric resonators need to ...

Silicon nitride (SiN) micro-and nanomechanical resonators have attracted a lot of attention in various research fields due to their exceptionally high quality factors (Qs). Despite their popularity, the origin of the limiting loss mechanisms in these struc ...

A hydrogen sensor based on large arrays of nanoswitches in palladium (Pd) is presented. An individual nanoswitch is realized by a suspended Pd/Ti/poly-Si trimorph electrode and a fixed Pd/Ti bottom electrode, which are separated by a vertical nanoscopic ga ...

The global overabundance of electronic waste and ever-increasing concerns regarding the energy-and material-intensive manufacturing processes associated with traditional electronics are driving the development of solution-processed, degradable electronics. ...

In a free-standing 400-nm-thick platelet of crystalline ZY-LiNbO3, narrow electrodes (500 nm) placed periodically with a pitch of a few microns can eXcite standing shear-wave bulk acoustic resonances (XBARs), by utilising lateral electric fields oriented p ...

Reflective displays, which harness ambient light, offer energy-efficient alternatives to traditional emissive screens in mobile devices. This review provides an overview of various reflective display technologies and their comparative performance metrics. ...

In this paper, we demonstrate the fabrication and characterization of lithium niobate (LN) based Lamb wave mode (S0 and SH0) resonators that address the stringent requirements of RF filtering for modern communication systems. The devices consist of a 400 n ...

Hydrogen sensing is essential to ensure safety in near-future zero-emission fuel cell powered vehicles. Here, we present a novel hydrogen sensor based on the resonant frequency change of a nanoelectromechanical clamped-clamped beam. The beam is coated with ...

In this paper, we present the fabrication of on-chip piezoelectric acoustic actuation for 2D materials. Acoustic actuation is achieved at device level through patterning of aluminum nitride (AlN) thin film at wafer scale. Two piezoelectric stacks consistin ...

The hydrogen sensing characteristics of a single nanotrench fabricated by focused ion beam milling (FIB) in an evaporated palladium microwire are presented. In situ atomic force microscopy (AFM) measurements proved that, in the presence of H2, the trench c ...

Reflectivity modulation is a critical feature for applicationsin telecommunications, 3D imaging and printing, advanced laser machining,or portable displays. Tunable metasurfaces have recently emerged asa promising implementation for miniaturized and high-p ...

This paper presents the first phase noise (PN) measurements of oscillators based on aluminum scandium nitride (AlScN) resonators. 2-port AlScN contour mode resonators (CMR) operating at 195 MHz arc fabricated. A large pool of Q values (ranging from 150 to ...

Microelectromechanical system (MEMS) devices, such as accelerometers, are widely used across industries, including the automotive, consumer electronics, and medical industries. MEMS are efficiently produced at very high volumes using large-scale semiconduc ...

Microcantilevers are popular transducers thanks to their simple design and a high sensitivity. In many applications, the cantilevers need to be actuated, either to induce a controlled deflection or to excite the resonance. This can be achieved with integra ...

During the last decade, hydrodynamic cavitation has been implemented in various applications such as energy harvesting and biomedical applications. Facile hydrodynamic cavitation methods are required for fulfilling the requirements in these applications. I ...

Luis Guillermo Villanueva Torrijo

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Study on the Performances of AlScN based SAW/BAW Hybrid Resonators A Parametric Analysis of Acoustic Wave Resonators with Large Figure of Merit

Frequency fluctuations in silicon nanoresonators

Reliable and Improved Nanoscale Stencil Lithography by Membrane Stabilization, Blurring and Clogging Corrections

Fast and robust hydrogen sensors based on discontinuous palladium films on polyimide, fabricated on a wafer scale

On "Cavitation on Chip" in Microfluidic Devices With Surface and Sidewall Roughness Elements

Thin Film Devices For 5G Communications

Evidence of Surface Loss as Ubiquitous Limiting Damping Mechanism in SiN Micro- and Nanomechanical Resonators

Large arrays of chemo-mechanical nanoswitches for ultralow-power hydrogen sensing

Additively Manufactured Degradable Piezoelectric Microsystems for Sensing and Actuating

5 GHz laterally-excited bulk-wave resonators (XBARs) based on thin platelets of lithium niobate

Emulating paper: A review of reflective display technologies

Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators

Ultra-low power hydrogen sensing based on a palladium-coated nanomechanical beam resonator

Acoustic Actuation Of Suspended Graphene For Linear Excitation Of 2D Nems

A single nanotrench in a palladium microwire for hydrogen detection

Broadband Mechanically Tunable Metasurface Reflectivity Modulator in the Visible Spectrum

Phase Noise Measurements Of Aluminum Scandium Nitride Oscillators

Micro 3D printing of a functional MEMS accelerometer

Fabrication of fluid-compatible trilayer cantilevers with integrated piezoelectric actuators

On cavitation inception and cavitating flow patterns in a multi-orifice microfluidic device with a functional surface