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Luis Guillermo Villanueva Torrijo

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Related publications (129)

Page 3 of 7

Compliant membranes improve resolution in full-wafer micro/nanostencil lithography

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Andreea Veronica Savu, Oscar Vazquez Mena, Katrin Sidler Arnet

This work reports on a considerable resolution improvement of micro/nanostencil lithography when applied on full-wafer scale by using compliant membranes to reduce gap-induced pattern blurring. Silicon nitride (SiN) membranes are mechanically decoupled fro ...

2012

Three-Dimensional Nano-Acoustic Bragg Reflectors for CMOS Embedded NEMS

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli, David Ruffieux

Integration of CMOS electronic circuits and electromechanical resonators has been pursued for a long time by many different research groups and even foundries. This would improve the overall performance of electromechanical oscillators and sensors. However ...

Institute of Electrical and Electronics Engineers2017

Study on the Performances of AlScN based SAW/BAW Hybrid Resonators A Parametric Analysis of Acoustic Wave Resonators with Large Figure of Merit

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli

In this study, we analyze a 3rd type of FBAR's fundamental mode by finite element method. We show the importance of the substrate's wave velocity and conductivity on the electromechanical coupling efficiency. Then we demonstrate that etching traditional SA ...

IEEE2021

Frequency fluctuations in silicon nanoresonators

Luis Guillermo Villanueva Torrijo

Frequency stability is key to the performance of nanoresonators. This stability is thought to reach a limit with the resonator's ability to resolve thermally induced vibrations. Although measurements and predictions of resonator stability usually disregard ...

2016

Reliable and Improved Nanoscale Stencil Lithography by Membrane Stabilization, Blurring and Clogging Corrections

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Andreea Veronica Savu, Oscar Vazquez Mena, Katrin Sidler Arnet

The reliable and reproducible fabrication of nanostructures by stencil lithography faces three main challenges: the stability of the thin stencil membranes with nanoapertures, the blurring of the deposited structures, and the clogging of the nanoapertures ...

2011

Resonance Frequency Dependence Of A1 Lamb Mode On The Pitch Of The Electrode Structure

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli, Seniz Esra Küçük

Dispersion of A1 Lamb mode near onset frequency is discussed. This mode is close to that used in XBAR devices. The typically used approximation is based on elliptic form of slowness curve and ignoring mode interaction is not valid for widely used materials ...

IEEE2021

Fast and robust hydrogen sensors based on discontinuous palladium films on polyimide, fabricated on a wafer scale

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Thomas Kiefer

Fast hydrogen sensors based on discontinuous palladium (Pd) ﬁlms on supporting polyimide layers, fabricated by a cost-efﬁcient and full-wafer compatible process, are presented. The ﬁlms, deposited by electron-beam evaporation with a nominal thickness of 1. ...

Institute of Physics2010

On "Cavitation on Chip" in Microfluidic Devices With Surface and Sidewall Roughness Elements

Luis Guillermo Villanueva Torrijo

In this paper, cavitating flows are characterized in 29 microfluidic devices in order to achieve a comprehensive perspective regarding flow patterns in microscale, which is crucial in the applications, such as energy harvesting and biomedical treatment. Wh ...

Institute of Electrical and Electronics Engineers2019

Asymmetrically coupled resonators for mass sensing

Luis Guillermo Villanueva Torrijo

Mechanically coupled resonators have been applied in the last years to the development of nanomechanical mass-sensors based on the detection of the different vibration modes of the system by measuring on a single resonator. Their sensitivity and capability ...

American Institute of Physics2017

Thin Film Devices For 5G Communications

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli, Damien Maillard, Muhammad Faizan, Seniz Esra Küçük, Marco Liffredo

Piezoelectric-based resonators are some of the most used devices in the world. Invisible to most people, they constitute key elements for your mobile phone communications. With the advent of 50, the current technologies for piezoelectric resonators need to ...

IEEE2021

Evidence of Surface Loss as Ubiquitous Limiting Damping Mechanism in SiN Micro- and Nanomechanical Resonators

Luis Guillermo Villanueva Torrijo

Silicon nitride (SiN) micro-and nanomechanical resonators have attracted a lot of attention in various research fields due to their exceptionally high quality factors (Qs). Despite their popularity, the origin of the limiting loss mechanisms in these struc ...

American Physical Society2014

Large arrays of chemo-mechanical nanoswitches for ultralow-power hydrogen sensing

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Thomas Kiefer

A hydrogen sensor based on large arrays of nanoswitches in palladium (Pd) is presented. An individual nanoswitch is realized by a suspended Pd/Ti/poly-Si trimorph electrode and a fixed Pd/Ti bottom electrode, which are separated by a vertical nanoscopic ga ...

Institute of Physics2010

Additively Manufactured Degradable Piezoelectric Microsystems for Sensing and Actuating

Danick Briand, Luis Guillermo Villanueva Torrijo, Nicolas Francis Fumeaux, Morgan Mc Kay Monroe

The global overabundance of electronic waste and ever-increasing concerns regarding the energy-and material-intensive manufacturing processes associated with traditional electronics are driving the development of solution-processed, degradable electronics. ...

Wiley2023

5 GHz laterally-excited bulk-wave resonators (XBARs) based on thin platelets of lithium niobate

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli

In a free-standing 400-nm-thick platelet of crystalline ZY-LiNbO3, narrow electrodes (500 nm) placed periodically with a pitch of a few microns can eXcite standing shear-wave bulk acoustic resonances (XBARs), by utilising lateral electric fields oriented p ...

2019

Emulating paper: A review of reflective display technologies

Olivier Martin, Luis Guillermo Villanueva Torrijo, Dorian Giraud Herle

Reflective displays, which harness ambient light, offer energy-efficient alternatives to traditional emissive screens in mobile devices. This review provides an overview of various reflective display technologies and their comparative performance metrics. ...

2024

Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators

Luis Guillermo Villanueva Torrijo, Muhammad Faizan

In this paper, we demonstrate the fabrication and characterization of lithium niobate (LN) based Lamb wave mode (S0 and SH0) resonators that address the stringent requirements of RF filtering for modern communication systems. The devices consist of a 400 n ...

IOP PUBLISHING LTD2020

Ultra-low power hydrogen sensing based on a palladium-coated nanomechanical beam resonator

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Jonas Gustav Henriksson

Hydrogen sensing is essential to ensure safety in near-future zero-emission fuel cell powered vehicles. Here, we present a novel hydrogen sensor based on the resonant frequency change of a nanoelectromechanical clamped-clamped beam. The beam is coated with ...

Royal Soc Chemistry2012

Acoustic Actuation Of Suspended Graphene For Linear Excitation Of 2D Nems

Luis Guillermo Villanueva Torrijo, Muhammad Faizan, Marsha Mary Parmar

In this paper, we present the fabrication of on-chip piezoelectric acoustic actuation for 2D materials. Acoustic actuation is achieved at device level through patterning of aluminum nitride (AlN) thin film at wafer scale. Two piezoelectric stacks consistin ...

IEEE2019

A single nanotrench in a palladium microwire for hydrogen detection

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Oscar Vazquez Mena, Thomas Kiefer

The hydrogen sensing characteristics of a single nanotrench fabricated by focused ion beam milling (FIB) in an evaporated palladium microwire are presented. In situ atomic force microscopy (AFM) measurements proved that, in the presence of H2, the trench c ...

2008

Broadband Mechanically Tunable Metasurface Reflectivity Modulator in the Visible Spectrum

Olivier Martin, Luis Guillermo Villanueva Torrijo, Niels Quack, Andrei Kiselev, Dorian Giraud Herle

Reflectivity modulation is a critical feature for applicationsin telecommunications, 3D imaging and printing, advanced laser machining,or portable displays. Tunable metasurfaces have recently emerged asa promising implementation for miniaturized and high-p ...

AMER CHEMICAL SOC2023