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Luis Guillermo Villanueva Torrijo

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Publications associées (132)

A formula for the admittance of laterally excited bulk wave resonators (XBARs)

Victor Plessky, Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli

The recently invented laterally excited bulk wave resonators (XBARs) demonstrate outstanding parameters suitable for the design of low loss filters for the fifth generation of mobile phones. The operation of XBARs can be interpreted as an excitation of ant ...

WILEY2021

FABRICATION AND ANALYSIS OF THIN FILM LITHUM NIOBATE RESONATORS FOR 5GHz FREQUENCY AND LARGE k(t)(2) APPLICATIONS

Victor Plessky, Luis Guillermo Villanueva Torrijo, Seniz Esra Küçük, Soumya Yandrapalli

This work presents the fabrication and analysis of suspended thin film Lithium Niobate resonators. The yield of the new fabrication process presented below is >90% showing devices with high k(t)(2) of 28% resonators at 5GHz, making them suitable for high f ...

IEEE2021

Study on the Performances of AlScN based SAW/BAW Hybrid Resonators A Parametric Analysis of Acoustic Wave Resonators with Large Figure of Merit

Luis Guillermo Villanueva Torrijo, Guilain Lionel Germain Lang, Soumya Yandrapalli

In this study, we analyze a 3rd type of FBAR's fundamental mode by finite element method. We show the importance of the substrate's wave velocity and conductivity on the electromechanical coupling efficiency. Then we demonstrate that etching traditional SA ...

IEEE2021

Avoiding transduction-induced heating in suspended microchannel resonators using piezoelectricity

Luis Guillermo Villanueva Torrijo, Damien Maillard, Annalisa De Pastina, Amir Musa Abazari

Calorimetry of single biological entities remains elusive. Suspended microchannel resonators (SMRs) offer excellent performance for real-time detection of various analytes and could hold the key to unlocking pico-calorimetry experiments. However, the typic ...

SPRINGERNATURE2021

Resonance Frequency Dependence Of A1 Lamb Mode On The Pitch Of The Electrode Structure

Victor Plessky, Luis Guillermo Villanueva Torrijo, Seniz Esra Küçük, Soumya Yandrapalli

Dispersion of A1 Lamb mode near onset frequency is discussed. This mode is close to that used in XBAR devices. The typically used approximation is based on elliptic form of slowness curve and ignoring mode interaction is not valid for widely used materials ...

IEEE2021

On cavitation inception and cavitating flow patterns in a multi-orifice microfluidic device with a functional surface

Luis Guillermo Villanueva Torrijo, Merve Zuvin, Morteza Ghorbani

During the last decade, hydrodynamic cavitation has been implemented in various applications such as energy harvesting and biomedical applications. Facile hydrodynamic cavitation methods are required for fulfilling the requirements in these applications. I ...

AMER INST PHYSICS2021

Suspended micro/nano channel resonators: a review

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina

Micro- and nano-electromechanical systems (M/NEMS) have demonstrated outstanding sensing capabilities down to the yoctogram (10(-24) g) scale in vacuum environment and cryogenic temperatures. In order to bring such extraordinary resolution levels into the ...

2020

Directed Self-Assembly of Block Copolymers for the Fabrication of Functional Devices

Luis Guillermo Villanueva Torrijo

Directed self-assembly of block copolymers is a bottom-up approach to nanofabrication that has attracted high interest in recent years due to its inherent simplicity, high throughput, low cost and potential for sub-10 nm resolution. In this paper, we revie ...

MDPI2020

Evidence of Smaller 1/F Noise in AlScN-Based Oscillators Compared to AlN-Based Oscillators

Luis Guillermo Villanueva Torrijo, Andrea Lozzi, Marco Liffredo

In this paper we investigate the direct effect of resonator quality factor (Q) on the oscillator phase noise. We use 2-port contour mode resonators (CMRs), fabricated both with aluminum nitride (AlN) and aluminum scandium nitride (AlScN), as the frequency- ...

Institute of Electrical and Electronics Engineers2020

On the effect of linear feedback and parametric pumping on a resonator's frequency stability

Luis Guillermo Villanueva Torrijo

Resonant sensors based on micro- and nano-electro mechanical systems (M/NEMS) are ubiquitous in many sensing applications due to their outstanding performance capabilities, which are directly proportional to the quality factor (Q) of the devices. We addres ...

2020

Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications

Luis Guillermo Villanueva Torrijo, Stefan Wagner, Sayedeh Shirin Afyouni Akbari

Graphene's unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS). However, the inte ...

2020

Large Suspended Monolayer and Bilayer Graphene Membranes with Diameter up to 750 mu m

Luis Guillermo Villanueva Torrijo, Tom Larsen, Marsha Mary Parmar, Sayedeh Shirin Afyouni Akbari

In this paper ultra clean monolayer and bilayer Chemical Vapor Deposited (CVD) graphene membranes with diameters up to 500 mu m and 750 mu m, respectively have been fabricated using Inverted Floating Method (IFM) followed by thermal annealing in vacuum. Th ...

Nature Research2020

Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators

Luis Guillermo Villanueva Torrijo, Muhammad Faizan

In this paper, we demonstrate the fabrication and characterization of lithium niobate (LN) based Lamb wave mode (S0 and SH0) resonators that address the stringent requirements of RF filtering for modern communication systems. The devices consist of a 400 n ...

IOP PUBLISHING LTD2020

Frequency fluctuations in nanomechanical silicon nitride string resonators

Luis Guillermo Villanueva Torrijo, Alper Demir

High quality factor (Q) nanomechanical resonators have received a lot of attention for sensor applications with unprecedented sensitivity. Despite the large interest, few investigations into the frequency stability of high-Q resonators have been reported. ...

AMER PHYSICAL SOC2020

Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel

Philippe Renaud, Stefano Silvio Giovanni Varricchio, Luis Guillermo Villanueva Torrijo, Stefano Stassi, Damien Maillard, Annalisa De Pastina, Davide Scaiola, Carlo Ricciardi

Suspended nanochannel resonators (SNRs) are promising devices able to characterize mass down to the attogram scale, thus being able to detect nanoparticles or biomolecules. In this paper, we present a flexible fabrication process for SNRs based on a sacrif ...

ELSEVIER2020

5 GHz laterally-excited bulk-wave resonators (XBARs) based on thin platelets of lithium niobate

Victor Plessky, Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli

In a free-standing 400-nm-thick platelet of crystalline ZY-LiNbO3, narrow electrodes (500 nm) placed periodically with a pitch of a few microns can eXcite standing shear-wave bulk acoustic resonances (XBARs), by utilising lateral electric fields oriented p ...

2019

Acoustic Actuation Of Suspended Graphene For Linear Excitation Of 2D Nems

Luis Guillermo Villanueva Torrijo, Muhammad Faizan, Marsha Mary Parmar

In this paper, we present the fabrication of on-chip piezoelectric acoustic actuation for 2D materials. Acoustic actuation is achieved at device level through patterning of aluminum nitride (AlN) thin film at wafer scale. Two piezoelectric stacks consistin ...

IEEE2019

Modular interface and experimental setup for in-vacuum operation of microfluidic devices

Luis Guillermo Villanueva Torrijo, Damien Maillard, Annalisa De Pastina, Tom Larsen

We report on the design and operation of a world-to-chip microfluidic interface and experimental setup for fluidic micro- and nano-electromechanical systems. The central component of the interface is an engineered polyether ether ketone connector that brin ...

2019

Engineered acoustic mismatch for anchor loss control in contour mode resonators

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Andrea Lozzi

Improving the quality factor (Q) of electromechanical resonators is of paramount importance for different applications, ranging from RF filtering to sensing. In this paper, we present a modified fabrication process flow for contour mode resonators to simul ...

2019

Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters

Victor Plessky, Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Soumya Yandrapalli, Muhammad Faizan

In a free ZY-LiNbO3 400nm thick platelet, narrow electrodes (500nm wide) placed periodically with a pitch of few micrometers can eXcite standing Bulk Acoustic shear wave Resonances (XBARs), by means of lateral electric field parallel to crystalline Y- axis ...

IEEE2019

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