Publication

Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators

Luis Guillermo Villanueva Torrijo, Muhammad Faizan
2020
Journal Articles

Abstract

In this paper, we demonstrate the fabrication and characterization of lithium niobate (LN) based Lamb wave mode (S0 and SH0) resonators that address the stringent requirements of RF filtering for modern communication systems. The devices consist of a 400 nm-thick X-cut LN membrane anchored from two ends with interdigitated transducer (IDT) on the top. We present a frequency-scalable process flow using e-beam lithography for the fabrication of ultra-high frequency (10(8) to 10(9) Hz) devices. Our fabricated devices yield the highest reported electromechanical coupling (k(t)(2)) of 31% and 40% for S0 and SH0 modes, respectively, in X-cut LN. We also investigate the influence of IDT material and coverage on k(t)(2) and quality factor (Q) by fabricating identical devices with aluminum and platinum electrodes with electrode coverages ranging from 20% to 70%.

Official source

https://infoscience.epfl.ch/entities/publication/edc34618-6ac1-46d8-ad87-6c23ecf4a1c7

About this result

This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.

Luis Guillermo Villanueva Torrijo, Muhammad Faizan
2020
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/edc34618-6ac1-46d8-ad87-6c23ecf4a1c7

About this result

Related concepts (32)

Semiconductor device fabrication

Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuits (ICs) such as computer processors, microcontrollers, and memory chips (such as NAND flash and DRAM) that are present in everyday electrical and electronic devices. It is a multiple-step photolithographic and physio-chemical process (with steps such as thermal oxidation, thin-film deposition, ion-implantation, etching) during which electronic circuits are gradually created on a wafer, typically made of pure single-crystal semiconducting material.

Natural logarithm

The natural logarithm of a number is its logarithm to the base of the mathematical constant e, which is an irrational and transcendental number approximately equal to 2.718281828459. The natural logarithm of x is generally written as ln x, loge x, or sometimes, if the base e is implicit, simply log x. Parentheses are sometimes added for clarity, giving ln(x), loge(x), or log(x). This is done particularly when the argument to the logarithm is not a single symbol, so as to prevent ambiguity.

Semiconductor device

A semiconductor device is an electronic component that relies on the electronic properties of a semiconductor material (primarily silicon, germanium, and gallium arsenide, as well as organic semiconductors) for its function. Its conductivity lies between conductors and insulators. Semiconductor devices have replaced vacuum tubes in most applications. They conduct electric current in the solid state, rather than as free electrons across a vacuum (typically liberated by thermionic emission) or as free electrons and ions through an ionized gas.

Related publications (30)

Advanced Silicon and SWIR Single-Photon Avalanche Diodes: Design, Simulation, and Characterization

Ekin Kizilkan

Low-level light detection with high spatial and timing accuracy is a growing area of interest by virtue of applications such as light detection and ranging (LiDAR), biomedical imaging, time-resolved Raman spectroscopy, and quantum applications. Single-phot ...

EPFL2024

Contemporary Logic Synthesis: with an Application to AQFP Circuit Optimization

Siang-Yun Lee

Electronic devices play an irreplaceable role in our lives. With the tightening time to market, exploding demand for computing power, and continuous desire for smaller, faster, less energy-consuming, and lower-cost chips, computer-aided design for electron ...

EPFL2024

3D Printing of Customizable Transient Bioelectronics and Sensors

Danick Briand, Nicolas Francis Fumeaux

Transient electronics have emerged as a new category of devices that can degrade after their functional lifetime, offering tremendous potential as disposable sensors, actuators, wearables, and implants. Additive manufacturing methods represent a promising ...

2024