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Jürgen Brugger

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Related publications (329)

Metallic Nanowires by Full Wafer Stencil Lithography

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart, Oscar Vazquez Mena, Katrin Sidler Arnet, Andreea Veronica Savu, Luis Guillermo Villanueva Torrijo

Aluminum and gold nanowires were fabricated using 100 mm stencil wafers containing nanoslits fabricated with a focused ion beam. The stencils were aligned and the nanowires deposited on a substrate with predefined electrical pads. The morphology and resist ...

American Chemical Society (ACS)2008

Stencil Lithography: Quick and Clean

Jürgen Brugger, Luis Guillermo Villanueva Torrijo

2008

Towards Smart Substrates for Controlling Micrometric Droplet Motion

Alcherio Martinoli, Vahid Fakhfouri, Jürgen Brugger, Grégory Mermoud

In this contribution, we describe a novel approach to the problem of setting micrometric droplets in motion. First, this paper reviews the state-of-the-art methods to enable millimetric droplet motion, and investigates the scalability of the most promising ...

2007

Dry etching for the correction of gap-induced blurring and improved pattern resolution in nanostencil lithography

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

We present nanostencil lithography as a new and parallel nanopatterning technique for batch fabrication of micro/ nanoelectromechanical systems (MEMS/NEMS) with high throughput and resolution. We use nanostencil lithography for the purpose of integrating n ...

2007

Direct observation of nuclear spin diffusion in real space

Giovanni Boero, Jürgen Brugger, Schahrazede-Lila Mouaziz

Images directly visualizing the spatial spin-diffusion process are reported. The measurements were performed using a magnetic resonance force microscope. The field gradient associated with the forcedetection experiment is large enough to affect the spin dy ...

2007

Nanostenciling for combinatorial fabrications and interconnections of nanopatterns and microelectrodes

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart, Sébastien Gauthier

Stencil lithography is used for patterning and connecting nanostructures with metallic microelectrodes in ultrahigh vacuum. Microelectrodes are fabricated by static stencil deposition through a thin silicon nitride membrane. Arbitrary nanoscale patterns ar ...

2007

Uniformly Dispersed Deposition of Colloidal Nanoparticles and Nanowires by Boiling

László Forró, Andrzej Kulik, Gerit Kulik, Jürgen Brugger, Jin Won Seo, Sylvia Jeney, Arnaud Magrez, Kyumin Lee, Martial Duchamp, Ravi Shankar Sundaram

Uniformly dispersed deposition of various nanoparticles (gold and silver of 20?50 nm) and nanowires (ZnO and VOx) on different surfaces (Si, GaAs, mica, and steel) was obtained by boiling colloid drops on preheated substrates. Our results suggest a deposit ...

AIP American Institute of Physics2007

An Epoxy Photoresist Modified by Luminescent Nanocrystals for the Fabrication of 3D High-Aspect-Ratio Microstructures

Vahid Fakhfouri, Jürgen Brugger

An epoxy-based negative-tone photoresist, which is known as a suitable material for high-aspect-ratio surface micromachining, is functionalized with red-light-emitting CdSe@ZnS nanocrystals (NCs). The proper selection of a common solvent for the NCs and th ...

2007

Synthesis of localized 2D-layers of silicon nanoparticles embedded in a SiO2 layer by a stencil-masked ultra-low energy ion implantation process

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

We propose an original approach called “stencil-masked ion implantation process” to perform a spatially localized synthesis of a limited number of Si nanoparticles (nps) within a thin SiO2 layer. This process consists in implanting silicon ions at ultra-lo ...

Wiley2007

NMR spectroscopy and perfusion of mammalian cells using surface microprobes

Pierre-André Besse, Radivoje Popovic, Florian Maria Wurm, Mathieu Benjamin Stettler, Jürgen Brugger, Klaus Ehrmann, Kristopher Pataky

NMR spectra of mammalian cells are taken using surface microprobes that are based on microfabricated planar coils. The surface microprobe resembles a miniaturized Petri dish commonly used in biological research. The diameter of the planar coils is 1 mm. Ch ...

2007

Predicting mask distortion, clogging and pattern transfer for stencil lithography

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

One of the ultimate tasks for stencil lithography is the ability to fabricate arrays of structures with controlled dimensions on the nanometer scale precisely positioned on a suitable surface. The race to shrink feature sizes requires the limits of convent ...

2007

Selective deposition of gold nanoparticles using Van der Waals interactions

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

Gold nanoparticles with hydrophobic surface have been deposited on a silicon substrate chemically patterned by reactive ion etching through a stencil mask and chemical vapour deposition of alkyl silanes. After deposition by dipping and adequate rinsing, th ...

2007

Quick & Clean: Advances in High Resolution Stencil Lithography

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart, Oscar Vazquez Mena, Katrin Sidler Arnet, Andreea Veronica Savu, Luis Guillermo Villanueva Torrijo

2007

Highly Sensitive Cantilevers, with and without Magnetic Tip, for Magnetic Resonance Force Microscopy

Giovanni Boero, Jürgen Brugger, Alain Dysli, Schahrazede-Lila Mouaziz

In this paper we present the fabrication and characterization of highly sensitive cantilevers, with and without magnetic tip, used for magnetic resonance force microscopy experiments. The full wafer silicon batch microfabrication was successful and the ach ...

IEEE2007

Fabrication and testing of a poly(vinylidene fluoride) (PVDF) microvalve for gas flow control

Jürgen Brugger

A microactuator made from poly(vinylidene fluoride) (PVDF), a piezoelectric polymer, was fabricated to control the gas flow rate through a glass micronozzle. The actuator was formed by gluing together two PVDF sheets with opposite polarization directions. ...

2007

Patterning of parallel nanobridge structures by reverse nanostencil lithography using an edge-patterned stencil

Jürgen Brugger, Oscar Vazquez Mena

We propose a new process for forming parallel nanobridge patterns by nanostencil lithography. In this process, a low-stress silicon nitride stencil with parallel nanobridge structures is fabricated by a new edge patterning technique where those nanobridges ...

2007

Integrated Nickel Micro-Nano-Hall Sensors on SU-8 Cantilevers for Scanning Hall Probe Microscopy

Radivoje Popovic, Giovanni Boero, Christian Santschi, Chantal Imboden, Jürgen Brugger, Schahrazede-Lila Mouaziz, Oscar Vazquez Mena

We report the fabrication and characterization of nickel Hall sensors integrated on SU-8 cantilevers. Sensors having active area down to 1x1 μm 2 show a magnetic field resolution better than 1μT/Hz 1/2 in the thermal noise frequency range. The fabricated d ...

IEEE2007

Micropositioning and microscopic observation of individual picoliter-sized containers within SU-8 microchannels

Horst Vogel, Christoph Schreiter, Jürgen Brugger

We describe the fabrication and application of a bioanalytical chip, made of SU-8 photoresist, comprising integrated, high aspect-ratio microfluidic channels, suitable to manipulate and investigate vesicles, cell fragments and biological cells. A central m ...

2007

Nanostenciling for fabrication and interconnection of nanopatterns and microelectrodes

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart, Sébastien Gauthier

AIP American Institute of Physics2007

A Compact and Low-Power CMOS Circuit for Fully-Integrated NEMS Resonators

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

This brief presents a fully integrated nanoelectromechanical system (NEMS) resonator, operable at frequencies in the megahertz range, together with a compact built-in CMOS interfacing circuitry. The proposed low-power second-generation current conveyor cir ...

2007

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